公开(公告)号：MY137043A

公开(公告)日：2008-12-31

申请号：MYPI20032608

申请日：2003-07-11

Applicant: INTEL CORP

Inventor： WANG LI-PENG ,  BAR-SADEH EYAL ,  RAO VALLURI R ,  HECK JOHN ,  MA QING ,  TRAN QUAN ,  TALALAYEVSKY ALEXANDER ,  GINSBURG EYAL

IPC: H03H9/24 ,  H03H3/02 ,  H03H9/56

Abstract: A FILM BULK ACOUSTIC RESONATOR FILTER (10) MAY BE FORMED WITH A PLURALITY OF INTERCONNECTED SERIES AND SHUNT FILM BULK ACOUSTIC RESONATORS (38) FORMED ON THE SAME MEMBRANE (35). EACH OF THE FILM BULK ACOUSTIC RESONATORS (38) MAY BE FORMED FROM A COMMON LOWER CONDUCTIVE LAYER WHICH IS DEFINED TO FORM THE BOTTOM ELECTRODE (32) OF EACH FILM BULK ACOUSTIC RESONATOR (38). A COMMON TOP CONDUCTIVE LAYER MAY BE DEFINED TO FORM EACH TOP ELECTRODE (36) OF EACH FILM BULK ACOUSTIC RESONATOR (38). A COMMON PIEZOELECTRIC FILM LAYER (34), THAT MAYOR MAY NOT BE PATTERNED, FORMS A CONTINUOUS OR DISCONTINUOUS FILM. FIG 1 & 9.