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公开(公告)号:US20220102242A1
公开(公告)日:2022-03-31
申请号:US17032577
申请日:2020-09-25
Applicant: Intel Corporation
Inventor: Mitul Modi , Joseph Van Nausdle , Omkar Karhade , Edvin Cetegen , Nicholas Haehn , Vaibhav Agrawal , Digvijay Raorane , Dingying Xu , Ziyin Lin , Yiqun Bai
Abstract: Techniques and mechanisms for facilitating heat conductivity in a packaged device with a dummy die. In an embodiment, a packaged device comprises a substrate and one or more IC die coupled to a surface thereof. A dummy die, adjacent to an IC die and coupled to a region of the substrate, comprises a polymer resin and a filler. A package mold structure of the packaged device adjoins respective sides of the IC die and the dummy die, and adjoins the surface of the substrate. In another embodiment, a first CTE of the dummy die is less than a second CTE of the package mold structure, and a first thermal conductivity of the dummy die is greater than a second thermal conductivity of the package mold structure.
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公开(公告)号:US20250149455A1
公开(公告)日:2025-05-08
申请号:US18503459
申请日:2023-11-07
Applicant: Intel Corporation
Inventor: Nicholas Haehn , Jeremy Ecton , Brandon C. Marin , Srinivas V. Pietambaram , Gang Duan
IPC: H01L23/538 , H01L23/00 , H01L23/15 , H01L23/31 , H01L23/48 , H01L25/065
Abstract: Disclosed herein are microelectronic assemblies and related devices and methods. In some embodiments, a microelectronic assembly may include a glass layer having a surface; a material on the surface of the glass layer, the material including a polyimide or a dielectric material; a via including a conductive material, wherein the via extends through the glass layer and through the material on the surface of the glass layer, and wherein the via has a first diameter through the material on the surface, a second diameter at the surface of the glass layer, and the first diameter is equal to the second diameter plus 1 micron or minus 1 micron; and a dielectric layer on the material at the surface of the glass layer, the dielectric layer including a conductive pathway electrically coupled to the via.
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公开(公告)号:US20250112163A1
公开(公告)日:2025-04-03
申请号:US18375203
申请日:2023-09-29
Applicant: Intel Corporation
Inventor: Pratyush Mishra , Pratyasha Mohapatra , Srinivas Pietambaram , Whitney Bryks , Mahdi Mohammadighaleni , Joshua Stacey , Travis Palmer , Yosef Kornbluth , Kuang Liu , Astitva Tripathi , Yuqin Li , Rengarajan Shanmugam , Xing Sun , Brian Balch , Darko Grujicic , Jieying Kong , Nicholas Haehn , Jacob Vehonsky , Mitchell Page , Vincent Obiozo Eze , Daniel Wandera , Sameer Paital , Gang Duan
IPC: H01L23/538 , H01L21/48 , H01L23/15 , H01L25/065
Abstract: An IC die package includes a substrate comprising glass and a plurality of holes extending through the glass. A via metallization is present within the holes. A liner is between the via metallization and the glass. The liner can comprise a beta-titanium alloy layer, polymer hydrogel layer and an MXene seed layer, an organic material layer and a metal layer, or an organic material layer between first and second metal layers. A polymer layer may be formed by electrodeposition of charged nanoparticles.
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公开(公告)号:US11652036B2
公开(公告)日:2023-05-16
申请号:US15942864
申请日:2018-04-02
Applicant: Intel Corporation
Inventor: Jeremy Ecton , Hiroki Tanaka , Kristof Kuwawi Darmawikarta , Oscar Ojeda , Arnab Roy , Nicholas Haehn
IPC: H01L23/498 , H01L23/14 , H01L23/00 , H01L21/027 , G03F7/039 , G03F7/038 , G03F7/20 , G03F7/26 , H01L21/48
CPC classification number: H01L23/49838 , G03F7/038 , G03F7/039 , G03F7/20 , G03F7/26 , H01L21/0274 , H01L21/4857 , H01L23/145 , H01L23/49822 , H01L23/49866 , H01L24/16 , H01L2224/16227
Abstract: Disclosed herein are via-trace structures with improved alignment, and related package substrates, packages, and computing device. For example, in some embodiments, a package substrate may include a conductive trace, and a conductive via in contact with the conductive trace. The alignment offset between the conductive trace and the conductive via may be less than 10 microns, and conductive trace may have a bell-shaped cross-section or the conductive via may have a flared shape.
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公开(公告)号:US20210289638A1
公开(公告)日:2021-09-16
申请号:US17336008
申请日:2021-06-01
Applicant: INTEL CORPORATION
Inventor: Jeremy Ecton , Nicholas Haehn , Oscar Ojeda , Arnab Roy , Timothy White , Suddhasattwa Nad , Hsin-Wei Wang
IPC: H05K3/46 , H01L21/48 , H01L23/498 , H05K3/18 , H05K5/00
Abstract: Techniques and mechanisms for providing anisotropic etching of a metallization layer of a substrate. In an embodiment, the metallization layer includes grains of a conductor, wherein a first average grain size and a second average grain size correspond, respectively, to a first sub-layer and a second sub-layer of the metallization layer. The first sub-layer and the second sub-layer each span at least 5% of a thickness of the metallization layer. A difference between the first average grain size and the second average grain size is at least 10% of the first average grain size. In another embodiment, a first condition of metallization processing contributes to grains of the first sub-layer being relatively large, wherein an alternative condition of metallization processing contributes to grains of the second sub-layer being relatively small. A grain size gradient across a thickness of the metallization layer facilitates etching processes being anisotropic.
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公开(公告)号:US11594463B2
公开(公告)日:2023-02-28
申请号:US16158191
申请日:2018-10-11
Applicant: Intel Corporation
Inventor: Nicholas Neal , Nicholas Haehn
IPC: H01L23/00 , H01L23/367 , H01L23/532
Abstract: A semiconductor device package structure is provided. The semiconductor device package structure includes a substrate having a first layer over a second layer. The first layer may have greater thermal conductivity than the second layer. The semiconductor device package structure further includes one or more dies coupled to the substrate. A heat spreader may have a first section coupled to a first surface of a first die of the one or more dies, and a second section coupled to the first layer.
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公开(公告)号:US20220102231A1
公开(公告)日:2022-03-31
申请号:US17032583
申请日:2020-09-25
Applicant: Intel Corporation
Inventor: Mitul Modi , Joseph Van Nausdle , Omkar Karhade , Edvin Cetegen , Nicholas Haehn , Vaibhav Agrawal , Digvijay Raorane
IPC: H01L23/29 , H01L21/56 , H01L23/16 , H01L25/065
Abstract: Techniques and mechanisms for facilitating heat conductivity in a packaged device with a dummy die. In an embodiment, a packaged device comprises a substrate and one or more IC die coupled thereto. A dummy die structure extends to a bottom of a recess structure formed by a first package mold structure on the substrate. The dummy die structure comprises a polymer resin and a filler, or comprises a metal which has a low coefficient of thermal expansion (CTE). A second package mold structure, which extends to the recess structure, is adjacent to the first package mold structure and to an IC die. In another embodiment, a first CTE of the dummy die is less than a second CTE of one of the package mold structures, and a first thermal conductivity of the dummy die is greater than a second thermal conductivity of the one of the package mold structures.
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公开(公告)号:US11116084B2
公开(公告)日:2021-09-07
申请号:US16634804
申请日:2017-09-27
Applicant: INTEL CORPORATION
Inventor: Jeremy Ecton , Nicholas Haehn , Oscar Ojeda , Arnab Roy , Timothy White , Suddhasattwa Nad , Hsin-Wei Wang
IPC: H05K3/46 , H01L21/48 , H01L23/498 , H05K3/18 , H05K5/00
Abstract: Techniques and mechanisms for providing anisotropic etching of a metallization layer of a substrate. In an embodiment, the metallization layer includes grains of a conductor, wherein a first average grain size and a second average grain size correspond, respectively, to a first sub-layer and a second sub-layer of the metallization layer. The first sub-layer and the second sub-layer each span at least 5% of a thickness of the metallization layer. A difference between the first average grain size and the second average grain size is at least 10% of the first average grain size. In another embodiment, a first condition of metallization processing contributes to grains of the first sub-layer being relatively large, wherein an alternative condition of metallization processing contributes to grains of the second sub-layer being relatively small. A grain size gradient across a thickness of the metallization layer facilitates etching processes being anisotropic.
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公开(公告)号:US20190304890A1
公开(公告)日:2019-10-03
申请号:US15942864
申请日:2018-04-02
Applicant: Intel Corporation
Inventor: Jeremy Ecton , Hiroki Tanaka , Kristof Kuwawi Darmawikarta , Oscar Ojeda , Arnab Roy , Nicholas Haehn
IPC: H01L23/498 , H01L23/14 , H01L23/00 , H01L21/48 , H01L21/027 , G03F7/039 , G03F7/038 , G03F7/20 , G03F7/26
Abstract: Disclosed herein are via-trace structures with improved alignment, and related package substrates, packages, and computing device. For example, in some embodiments, a package substrate may include a conductive trace, and a conductive via in contact with the conductive trace. The alignment offset between the conductive trace and the conductive via may be less than 10 microns, and conductive trace may have a bell-shaped cross-section or the conductive via may have a flared shape.
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公开(公告)号:US20250112175A1
公开(公告)日:2025-04-03
申请号:US18477638
申请日:2023-09-29
Applicant: Intel Corporation
Inventor: Brandon C. Marin , Jesse C. Jones , Yosef Kornbluth , Mitchell Page , Soham Agarwal , Fanyi Zhu , Shuren Qu , Hanyu Song , Srinivas V. Pietambaram , Yonggang Li , Bai Nie , Nicholas Haehn , Astitva Tripathi , Mohamed R. Saber , Sheng Li , Pratyush Mishra , Benjamin T. Duong , Kari Hernandez , Praveen Sreeramagiri , Yi Li , Ibrahim El Khatib , Whitney Bryks , Mahdi Mohammadighaleni , Joshua Stacey , Travis Palmer , Gang Duan , Jeremy Ecton , Suddhasattwa Nad , Haobo Chen , Robin Shea McRee , Mohammad Mamunur Rahman
IPC: H01L23/00 , H01L23/13 , H01L23/15 , H01L25/065
Abstract: Various techniques for edge stress reduction in glass cores and related devices and methods are disclosed. In one example, a microelectronic assembly includes a glass core having a bottom surface, a top surface opposite the bottom surface, and one or more sidewalls extending between the bottom surface and the top surface, and further includes a panel of an organic material, wherein the glass core is embedded within the panel. In another example, a microelectronic assembly includes a glass core as in the first example, where an angle between a portion of an individual sidewall and one of the bottom surface or the top surface is greater than 90 degrees. In yet another example, a microelectronic assembly includes a glass core as in the first example, and further includes a pattern of a material on one of the one or more sidewalls.
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