公开(公告)号：US12286342B2

公开(公告)日：2025-04-29

申请号：US18066802

申请日：2022-12-15

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger

IPC: B81B7/02 ,  H02M3/07

Abstract: Embodiments for constant charge or capacitance for capacitive micro-electro-mechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.

公开(公告)号：US20250100871A1

公开(公告)日：2025-03-27

申请号：US18971829

申请日：2024-12-06

Applicant: INVENSENSE, INC. ,  TDK ELECTRONICS AG

Inventor： Joseph Seeger ,  Dennis Mortensen

IPC: B81B3/00

Abstract: The present invention relates to electrodes for microelectromechanical system (MEMS) microphones. In one embodiment, a MEMS sensor includes a membrane and a backplate situated parallel to the membrane and separated by a gap. The backplate includes a first region that includes a center point of the backplate and has first holes of a first hole pitch, a second region that is positioned outside the first region and has second holes of a second hole pitch that is smaller than the first hole pitch, and a transitional region that is positioned between the first region and the second region and has third holes of a third hole pitch that is between the first hole pitch and the second hole pitch. The first and second regions of the backplate and their respective holes can be of a shape (e.g., hexagonal) that differs from the shape of the backplate.

公开(公告)号：US11225409B2

公开(公告)日：2022-01-18

申请号：US16574037

申请日：2019-09-17

Applicant: InvenSense, Inc.

Inventor： Pei-Wen Yen ,  Ting-Yuan Liu ,  Jye Ren ,  Chung-Hsien Lin ,  Joseph Seeger ,  Calin Miclaus

IPC: B81B7/00

Abstract: A device includes a microelectromechanical system (MEMS) sensor die comprising a deformable membrane, a MEMS heating element, and a substrate. The MEMS heating element is integrated within a same layer and a same plane as the deformable membrane. The MEMS heating element surrounds the deformable membrane and is separated from the deformable membrane through a trench. The MEMS heating element is configured to generate heat to heat up the deformable membrane. The substrate is coupled to the deformable membrane.

公开(公告)号：US11047685B2

公开(公告)日：2021-06-29

申请号：US16735351

申请日：2020-01-06

Applicant: INVENSENSE, INC.

Inventor： Ozan Anac ,  Joseph Seeger

IPC: G01C19/5762 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/08 ,  B81B3/00

Abstract: Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

公开(公告)号：US10399849B2

公开(公告)日：2019-09-03

申请号：US14681071

申请日：2015-04-07

Applicant: INVENSENSE, INC.

Inventor： Matthew Julian Thompson ,  Stephen Lloyd ,  Joseph Seeger

IPC: B81B7/00 ,  H03K21/02 ,  B81B7/02 ,  B81C99/00 ,  H01L21/66 ,  G06F11/30

Abstract: A device with a first MEMS device and a second MEMS device is disclosed. The first MEMS device is configured to sense at least one external influence. The second MEMS device is responsive to the at least one external influence. The first MEMS device is configured to change a state when the at least one external influence exceeds a threshold value. The first MEMS device is configured to retain the state below the threshold value, wherein the change in state of the first MEMS device is done passively and wherein the state of the first MEMS device is indicative of a status of the second MEMS device.

公开(公告)号：US20190185317A1

公开(公告)日：2019-06-20

申请号：US16206861

申请日：2018-11-30

Applicant: INVENSENSE, INC.

Inventor： Jongwoo Shin ,  Houri Johari-Galle ,  Bongsang Kim ,  Joseph Seeger ,  Dongyang Kang

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/008 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0292 ,  B81C1/00523 ,  B81C2203/0785

Abstract: A device comprising a micro-electro-mechanical system (MEMS) substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor (CMOS) substrate is presented herein. The MEMS substrate comprises defined protrusions of respective distinct heights from a surface of the MEMS substrate, and the MEMS substrate is bonded to the CMOS substrate. In an aspect, the defined protrusions can be formed from the MEMS substrate. In another aspect, the defined protrusions can be deposited on, or attached to, the MEMS substrate. In yet another aspect, the MEMS substrate comprises monocrystalline silicon and/or polysilicon. In yet even another aspect, the defined protrusions comprise respective electrodes of sensors of the device.

公开(公告)号：US20190144264A1

公开(公告)日：2019-05-16

申请号：US15811471

申请日：2017-11-13

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joseph Seeger ,  Matthew Thompson

IPC: B81B3/00 ,  B81C99/00

CPC classification number: B81B3/0013 ,  B81B3/0008 ,  B81B3/0027 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/04 ,  B81B2203/055 ,  B81C99/003 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P21/00 ,  G01P2015/0808

Abstract: A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

公开(公告)号：US09846175B2

公开(公告)日：2017-12-19

申请号：US14606858

申请日：2015-01-27

Applicant: InvenSense, Inc.

Inventor： Steven S. Nasiri ,  Goksen G. Yaralioglu ,  Joseph Seeger ,  Babak Taheri

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  B60R21/0132

CPC classification number: G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

公开(公告)号：US20170199035A1

公开(公告)日：2017-07-13

申请号：US14963526

申请日：2015-12-09

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger

IPC: G01C19/5684 ,  G01C19/5726

Abstract: A system and/or method for utilizing quadrature signals, for example in a MEMS gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a MEMS gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. Such a quadrature signal may, for example, be obtained passively as part of general Coriolis signal processing. Also for example, such a quadrature signal may be actively created and/or obtained through the use of electrical and/or mechanical features.

公开(公告)号：US09606191B2

公开(公告)日：2017-03-28

申请号：US14208222

申请日：2014-03-13

Applicant: Invensense, Inc.

Inventor： Joseph Seeger ,  Jin Qiu ,  Matthew Julian Thompson

IPC: G01N27/72 ,  G01R33/02 ,  G01P15/08 ,  G01R33/028 ,  H01L21/00

CPC classification number: G01R33/02 ,  B81B2201/00 ,  G01P15/08 ,  G01R33/0286 ,  H01L21/00 ,  H01L2221/00

Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.