公开(公告)号：EP2847781A4

公开(公告)日：2015-12-09

申请号：EP13788136

申请日：2013-05-07

Applicant: KLA TENCOR CORP

Inventor： NASSER-GHODSI MEHRAN ,  PLETTNER TOMAS ,  HAYNES ROBERT G ,  SEARS CHRISTOPHER MALCOLM STANLEY

IPC: H01J3/02 ,  H01J37/065 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J3/027 ,  H01J3/029 ,  H01J27/024 ,  H01J37/063 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/06375

Abstract: One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The electron further includes a non-planar extractor with an extractor opening and a built-in beam-limiting aperture. The extractor opening is larger than the beam-limiting aperture, and central axes of both the extractor opening and the beam-limiting aperture are aligned with the tip along a beam axis. Another embodiment relates to a method of generating an electron beam using an electron source having a non-planar extractor. Another embodiment relates to an array of electron sources for generating an array of electron beams. The array of electron sources includes an array of electron emitters and an array of non-planar extractor structures. Other embodiments, aspects and features are also disclosed.