PLANE DISPLAY DEVICE AND ITS MANUFACTURE

    公开(公告)号:JPH06222290A

    公开(公告)日:1994-08-12

    申请号:JP28152693

    申请日:1993-11-10

    Abstract: PURPOSE: To provide a fine pixel plane display which can represent static or dynamic video by using an optical switch, utilizing an electrostatic microactuator manufactured only by a semiconductor process. CONSTITUTION: A shutter-moving element 14 at an arbitrary position in a frame 15 is electrostatically charged in a belt-like shape by applying a select electrode 3 and a signal electrode 2 with voltages which are respectively higher and lower than the voltage of a common electrode 4. When an equilibrium state is reached, the voltage applied to the select line is inverted in polarity, in order and then the electric charges of the select electrode 3 change momentarily, but electric charges which accumulated on the side of the moving element 14 are unable to migrate immediately because of disturbance by the resistance. Consequently, a driving for which moves the moving element 14 to the right is generated, together with a repulsive force between the moving element 14 and select electrode 3, so that the shutter-moving element 14 moves to the right side.

    MANUFACTURE OF SELF-ALIGNED OPTICAL FIBER-OPTICAL ELEMENT COUPLING DEVICE

    公开(公告)号:JPH08220385A

    公开(公告)日:1996-08-30

    申请号:JP31283795

    申请日:1995-11-30

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for a self-arranging type optical fiber- optical element coupler by which the occurrence of an arranging error in a V groove and a solder bump can be prevented and the optical coupling efficiency of an optical element and optical fiber can be improved. SOLUTION: This manufacturing method is provided with a process of forming a first insulating film 13 and a pair of metallic pads 15 on a surface of a silicon substrate 11, a process of forming a second insulating film 17 on the first insulating film 13 and the metallic pads 15, a process of forming a photosensitive film 19 so that second opening parts 23 are formed in parts corresponding to the respective metallic pads 15 and a first opening part 21 is formed in an intermediate position of the two second opening parts 23, a process of exposing the silicon substrate 11 and the metallic pads 15 by removing the first and the second insulating films 13 and 17 by using the photosensitive film 19 as a mask, a process of forming a V groove 27 in an exposed part of the silicon substrate 11 by using the first and the second insulating films 13 and 17 as a corrosively carving mask after the photosensitive film 19 is removed and a process of forming a solder bump on the metallic pads 15.

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