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    Monochromator and charged particle apparatus including the same
    1.
    发明授权
    Monochromator and charged particle apparatus including the same 有权
    包括其的单色器和带电粒子装置

    公开(公告)号：US09425022B2

    公开(公告)日：2016-08-23

    申请号：US14696569

    申请日：2015-04-27

    Applicant: Korea Research Institute of Standards and Science

    Inventor： Takashi Ogawa ,  Bok Lae Cho ,  Sang Jung Ahn ,  In Yong Park ,  Cheolsu Han

    IPC: H01J37/05 ,  H01J49/44 ,  H01J37/12 ,  G01N23/225 ,  H01J37/21

    CPC classification number: H01J37/05 ,  G01N23/2251 ,  H01J37/12 ,  H01J37/21 ,  H01J49/44 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/24485

    Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

    Abstract translation: 本文公开了一种单色仪和包括该单色仪的带电粒子束装置。 单色仪可以包括第一静电透镜，其被配置为具有由入射在第一静电透镜上的发射体放电的带电粒子束，折射带电粒子束的射线，并且包括多个电极和与该第一静电透镜间隔开的第二静电透镜 第一静电透镜以特定间隔被配置为具有与第一静电透镜的中心轴线相同设置的中心轴，由入射在第二静电透镜上的第一静电透镜输出的带电粒子束折射带电的光线 粒子束，并且包括多个电极。 因此，具有即使在通过单色仪之后，带电粒子束也具有优异的特性的优点。

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