公开(公告)号：US09673035B2

公开(公告)日：2017-06-06

申请号：US14442283

申请日：2013-08-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Jong Rok Ahn ,  Cheolsu Han ,  Sang Jung Ahn

IPC: H01J49/14 ,  H01J49/06 ,  H01J49/16

CPC classification number: H01J49/147 ,  H01J49/067 ,  H01J49/16

Abstract: According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.

公开(公告)号：US09425022B2

公开(公告)日：2016-08-23

申请号：US14696569

申请日：2015-04-27

Applicant: Korea Research Institute of Standards and Science

Inventor： Takashi Ogawa ,  Bok Lae Cho ,  Sang Jung Ahn ,  In Yong Park ,  Cheolsu Han

IPC: H01J37/05 ,  H01J49/44 ,  H01J37/12 ,  G01N23/225 ,  H01J37/21

CPC classification number: H01J37/05 ,  G01N23/2251 ,  H01J37/12 ,  H01J37/21 ,  H01J49/44 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

Abstract translation: 本文公开了一种单色仪和包括该单色仪的带电粒子束装置。 单色仪可以包括第一静电透镜，其被配置为具有由入射在第一静电透镜上的发射体放电的带电粒子束，折射带电粒子束的射线，并且包括多个电极和与该第一静电透镜间隔开的第二静电透镜 第一静电透镜以特定间隔被配置为具有与第一静电透镜的中心轴线相同设置的中心轴，由入射在第二静电透镜上的第一静电透镜输出的带电粒子束折射带电的光线 粒子束，并且包括多个电极。 因此，具有即使在通过单色仪之后，带电粒子束也具有优异的特性的优点。

公开(公告)号：US10283339B2

公开(公告)日：2019-05-07

申请号：US15518408

申请日：2015-10-07

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon Park ,  Sang Jung Ahn ,  Cheolsu Han ,  Keu Chan Lee ,  Seok Rae Yoon

IPC: H01J49/14 ,  G01N27/62 ,  H01J49/26 ,  H01J49/00 ,  H01J49/06 ,  H01J49/42

Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.