公开(公告)号：MY158269A

公开(公告)日：2016-09-30

申请号：MYPI20082348

申请日：2006-12-08

Applicant: LAM RES CORP

Inventor： JOHN PARKS ,  REDEKER FRED C ,  MIKHAIL KOROLIK ,  KATRINA MIKHAYLICHENKO ,  CLINT THOMAS ,  FREER ERIK M ,  DE LARIOS JOHN M ,  RAVKIN MICHAEL

IPC: B08B7/00

Abstract: 39 METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE ABSTRACT A CLEANING MATERIAL IS DISPOSED OVER A SUBSTRATE. THE CLEANING MATERIAL INCLUDES SOLID COMPONENTS DISPERSED WITHIN A LIQUID MEDIUM. A FORCE IS APPLIED TO THE SOLID 5 COMPONENTS WITHIN THE LIQUID MEDIUM TO BRING THE SOLID COMPONENTS WITHIN PROXIMITY TO CONTAMINANTS PRESENT ON THE SUBSTRATE. THE FORCE APPLIED TO THE SOLID COMPONENTS CAN BE EXERTED BY AN IMMISCIBLE COMPONENT WITHIN THE LIQUID MEDIUM. WHEN THE SOLID COMPONENTS ARE BROUGHT WITHIN SUFFICIENT PROXIMITY TO THE CONTAMINANTS, AN INTERACTION IS ESTABLISHED BETWEEN THE SOLID COMPONENTS AND THE CONTAMINANTS. THEN, THE SOLID 10 COMPONENTS ARE MOVED AWAY FROM THE SUBSTRATE SUCH THAT THE CONTAMINANTS HAVING INTERACTED WITH THE SOLID COMPONENTS ARE REMOVED FROM THE SUBSTRATE.