公开(公告)号：JP2013042172A

公开(公告)日：2013-02-28

申请号：JP2012242490

申请日：2012-11-02

Applicant: Lam Res Corp ,  ラム リサーチ コーポレイション

Inventor： ERIK M FREER ,  REDEKER FRED C ,  KATRINA MIKHAYLICHENKO ,  MICHAEL RAVKIN ,  MIKHAIL KOROLIK ,  JOHN M DE LARIOS

IPC: H01L21/304

CPC classification number: H01L21/67092 ,  B08B3/00 ,  B08B7/00 ,  B08B7/02 ,  C11D9/02 ,  C11D11/0047 ,  C11D17/0017 ,  C23G1/18 ,  G03F7/423 ,  H01L21/02052 ,  H01L21/02057 ,  H01L21/02096 ,  H01L21/31133 ,  H01L21/67028 ,  H01L21/6708 ,  H01L21/67086 ,  Y10T137/4891

Abstract: PROBLEM TO BE SOLVED: To provide a method and apparatus for cleaning a semiconductor substrate.SOLUTION: A method for cleaning a substrate is provided. The method starts with applying an activation solution to a surface of the substrate. The activation solution and the surface of the substrate are in contact with a surface of a solid cleaning surface. The activation solution is absorbed into a portion of the solid cleaning element and then the die substrate or the solid cleaning surface is moved relative to each other to clean the surface of the substrate. A method is also provided for cleaning the surface of the substrate with a solid cleaning element that undergoes plastic deformation. Corresponding cleaning apparatus is also provided.

Abstract translation: 要解决的问题：提供一种用于清洁半导体衬底的方法和装置。 提供了一种清洗基板的方法。 该方法开始于将活化溶液施加到基底的表面。 活化溶液和基材的表面与固体清洁表面的表面接触。 活化溶液被吸收到固体清洁元件的一部分中，然后模具基底或固体清洁表面相对于彼此移动以清洁基底的表面。 还提供了一种用于利用经历塑性变形的固体清洁元件来清洁基板的表面的方法。 还提供了相应的清洁装置。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：MY143763A

公开(公告)日：2011-07-15

申请号：MYPI20082382

申请日：2006-12-19

Applicant: LAM RES CORP

Inventor： MIKHAIL KOROLIK ,  FREER ERIK M ,  DE LARIOS JOHN M ,  KATRINA MIKHAYLICHENKO ,  MIKE RAVKIN ,  FRED REDEKER

IPC: B08B7/00

Abstract: 1 8 METHOD AND SYSTEM FOR USING A TWO-PHASES SUBSTRATE CLEANING COMPOUND ABSTRACT OF THE DISCLOSURE 1511 CLEANING COMPOUNDS, APPARATUS, AND METHODS TO REMOVE CONTAMINANTS FROM A 5 SUBSTRATE SURFACE ARE PROVIDED. AN EXEMPLARY CLEANING COMPOUND TO REMOVE PARTICULATE CONTAMINANTS FROM A SEMICONDUCTOR SUBSTRATE SURFACE IS PROVIDED. THE CLEANING COMPOUND INCLUDES A VISCOUS LIQUID WITH A VISCOSITY BETWEEN ABOUT I CP TO ABOUT 10,000 O. THE CLEANING COMPOUND ALSO INCLUDES A PLURALITY OF SOLID COMPONENTS DISPERSED IN THE VISCOUS LIQUID, THE PLURALITY OF SOLID COMPONENTS INTERACT WITH THE PARTICULATE CONTAMINANTS ON THE SUBSTRATE SURFACE TO REMOVE THE PARTICULATE CONTAMINANTS FROM THE SUBSTRATE SURFACE,

公开(公告)号：MY149848A

公开(公告)日：2013-10-31

申请号：MYPI20082419

申请日：2006-12-18

Applicant: LAM RES CORP

Inventor： FREER ERIK M ,  DE LARIOS JOHN M ,  MICHAEL RAVKIN ,  MIKHAIL KOROLIK ,  KATRINA MIKHAYLICHENKO

IPC: B08B3/00

Abstract: A METHOD FOR MAKING A SOLUTION FOR USE IN PREPARING A SURFACE OF A SUBSTRATE IS PROVIDED. THE METHOD INCLUDES PROVIDING (602) A CONTINUOUS MEDIUM THAT ADDS (604) A POLYMER MATERIAL TO THE CONTINUOUS MEDIUM. A FATTY ACID IS ADDED TO THE CONTINUOUS MEDIUM HAVING THE POLYMER MATERIAL, AND THE POLYMER MATERIAL DEFINES A PHYSICAL NETWORK THAT EXERTS FORCES IN THE SOLUTION THAT OVERCOME BUOYANCY FORCES EXPERIENCED BY THE FATTY ACID, THUS PREVENTING THE FATTY ACIDS FROM MOVING WITHIN THE SOLUTION UNTIL A YIELD STRESS OF THE POLYMER MATERIAL IS EXCEED BY AN APPLIED AGITATION. THE APPLIED AGITATION IS FROM TRANSPORTING THE SOLUTION FROM A CONTAINER TO A PREPARATION STATION THAT APPLIES THE SOLUTION TO THE SURFACE OF THE SUBSTRATE.

公开(公告)号：SG187413A1

公开(公告)日：2013-02-28

申请号：SG2012096426

申请日：2006-11-29

Applicant: LAM RES CORP

Inventor： ERIK M FREER ,  JOHN M DE LARIOS ,  KATRINA MIKHAYLICHENKO ,  MICHAEL RAVKIN ,  MIKHAIL KOROLIK ,  FRED C REDEKER

Abstract: 27A cleaning compound is provided. The cleaning compound includes about 0.1 weight percent to about 10 weight percent of a fatty acid dispersed in water. The cleaning compound includes an amount of a base sufficient to bring a pH of the fatty acid water solution to about a level where above about 50% of the dispersed fatty acid is ionized. A method for cleaning a substrate, a system for cleaning a substrate, and a cleaning solution prepared by a process are also provided.Fig. 1

公开(公告)号：SG115790A1

公开(公告)日：2005-10-28

申请号：SG200501830

申请日：2005-03-18

Applicant: LAM RES CORP

Inventor： KATRINA MIKHAYLICHENKO ,  JOHN DELARIOS

IPC: B05C5/00 ,  B05D1/18 ,  B08B3/00 ,  B08B3/02 ,  B08B3/04 ,  C23C18/16 ,  C25D5/22 ,  C25D7/12 ,  C25D17/00 ,  C25D21/02 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

Abstract: Provided is an apparatus and a method for heating fluid in a proximity head. A fluid source supplies fluid to a channel within the proximity head. The fluid flows in the channel, through the proximity head, to an outlet port located on a bottom surface of the proximity head. Further, within the proximity head is a heating portion that heats the fluid. Various methods can heat the fluid in the heating portion. For example, the fluid can be heated via resistive heating and heat exchange. However, any mechanism for heating fluid in the proximity head is possible. After heating the fluid, the proximity head delivers the heated fluid through the outlet port to a surface of a semiconductor wafer.

公开(公告)号：MY158269A

公开(公告)日：2016-09-30

申请号：MYPI20082348

申请日：2006-12-08

Applicant: LAM RES CORP

Inventor： JOHN PARKS ,  REDEKER FRED C ,  MIKHAIL KOROLIK ,  KATRINA MIKHAYLICHENKO ,  CLINT THOMAS ,  FREER ERIK M ,  DE LARIOS JOHN M ,  RAVKIN MICHAEL

IPC: B08B7/00

Abstract: 39 METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE ABSTRACT A CLEANING MATERIAL IS DISPOSED OVER A SUBSTRATE. THE CLEANING MATERIAL INCLUDES SOLID COMPONENTS DISPERSED WITHIN A LIQUID MEDIUM. A FORCE IS APPLIED TO THE SOLID 5 COMPONENTS WITHIN THE LIQUID MEDIUM TO BRING THE SOLID COMPONENTS WITHIN PROXIMITY TO CONTAMINANTS PRESENT ON THE SUBSTRATE. THE FORCE APPLIED TO THE SOLID COMPONENTS CAN BE EXERTED BY AN IMMISCIBLE COMPONENT WITHIN THE LIQUID MEDIUM. WHEN THE SOLID COMPONENTS ARE BROUGHT WITHIN SUFFICIENT PROXIMITY TO THE CONTAMINANTS, AN INTERACTION IS ESTABLISHED BETWEEN THE SOLID COMPONENTS AND THE CONTAMINANTS. THEN, THE SOLID 10 COMPONENTS ARE MOVED AWAY FROM THE SUBSTRATE SUCH THAT THE CONTAMINANTS HAVING INTERACTED WITH THE SOLID COMPONENTS ARE REMOVED FROM THE SUBSTRATE.

公开(公告)号：MY149895A

公开(公告)日：2013-10-31

申请号：MYPI20082420

申请日：2006-12-18

Applicant: LAM RES CORP

Inventor： FREER ERIK M ,  DELARIOS JOHN M ,  KATRINA MIKHAYLICHENKO ,  MICHAEL RAVKIN ,  MIKHAIL KOROLIK ,  REDEKER FRITZ C

IPC: B08B3/00

Abstract: A METHOD AND SYSTEM (10) FOR CLEANING A SURFACE, HAVING PARTICULATE MATTER THEREON, OF A SUBSTRATE FEATURES IMPINGING UPON THE SURFACE OF A JET (108) OF A LIQUID HAVING COUPLING ELEMENTS (94) ENTRAINED THEREIN. A SUFFICIENT DRAG FORCE IS IMPARTED UPON THE COUPLING ELEMENTS TO HAVE THE SAME MOVE WITH RESPECT TO THE LIQUID AND CAUSE THE PARTICULATE MATTER TO MOVE WITH RESPECT TO THE SUBSTRATE.