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公开(公告)号：SG11201401989UA
公开(公告)日：2014-09-26
申请号：SG11201401989U
申请日：2012-11-01
Applicant: LAM RES CORP
Inventor： DHINDSA RAHINDER , MARAKHTANOV ALEXEI , DELGADINO GERARDO , HUDSON ERIC , YEN BI MING , BAILEY ANDREW D III
IPC: H01L21/306
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