MICRO MECHANICAL PACKAGING APPARATUS

    公开(公告)号:JP2002043449A

    公开(公告)日:2002-02-08

    申请号:JP2001151776

    申请日:2001-05-22

    Abstract: PROBLEM TO BE SOLVED: To provide a packaging technology for a MEMS assembly where a MEMS device array is mounted on a silicon wafer platform. SOLUTION: A silicon chamber may is sealed airtightly. By using a package made of only silicon for the MEMS device array, the thermodynamic instability disappears substantially. The mechanical instability is also reduced by using a contact pin array in order to interconnect a silicon supporting substrate for the MEMS device to the next interconnection level. The MEMS device can be detached easily by using the contact pin array for the purpose of replacement or repairing.

    IC PACKAGE
    2.
    发明专利

    公开(公告)号:JP2000091462A

    公开(公告)日:2000-03-31

    申请号:JP25301799

    申请日:1999-09-07

    Abstract: PROBLEM TO BE SOLVED: To mutually wire one IC chip with a translator and obtain high mutual wiring density by a power source and an installation mutual wiring structure, using a power source step and a grounding step made in an isolated multistep structure mutual wiring translator. SOLUTION: A power source and a grounding step are provided with several- step isolated mutual wiring steps 31 to 34 on a translator 21 which is silicon. By a multistep structure mutual wiring feature included in the translator 21, several power source and grounding mutual wiring are adjusted and integrated by this board step. Then, a power source input/output or a grounding input/ output is further coupled to a next board step. Moreover, since the translator 21 accommodates a single multipin IC chip, it is made larger than the IC chip. This large translator region enables leading a pattern and developing it in all direction on the translator 21 made of silicon.

    BALL GRID ARRAY PACKAGE
    3.
    发明专利

    公开(公告)号:JP2002043461A

    公开(公告)日:2002-02-08

    申请号:JP2000199728

    申请日:2000-06-30

    Abstract: PROBLEM TO BE SOLVED: To provide an IC package having a high-density I/O wherein an IC chip is bonded to a silicon intermediate interconnect substrate (IIS) and the IIS is wire-bonded to a printed wiring board(PWB). SOLUTION: This package comprises the PWB having wire-bonding pads on its upper surface, the semiconductor IIS, a means for die-bonding the lower surface of the IIS to the upper surface of the PWB, and a means for wire- bonding the wire-bonding pads on the IIS to the wire-bonding pad on the PWB. Further, the IIS comprises a semiconductor substrate having a center region on its upper surface, IIS interconnect sites on the center region of the upper surface of the semiconductor substrate, the IIS wire-bonding pads around the center region of the upper surface of the semiconductor substrate, and a metallized runner which interconnects the IIS interconnect sites with the IIS wire- bonding pads.

    HIGH-PERFORMANCE MULTI-CHIP IC PACKAGE

    公开(公告)号:JP2001244406A

    公开(公告)日:2001-09-07

    申请号:JP2001026208

    申请日:2001-02-02

    Abstract: PROBLEM TO BE SOLVED: To provide a multi-chip IC package with high interconnection density. SOLUTION: The upper surface (or lower surface) of a flexible substrate is joined to a rigid support substrate with an opening for accommodating an IC chip that is joined to the upper surface (or lower surface) of the flexible substrate. In a preferred embodiment, a plurality of IC memories are mounted to one surface of the flexible substrate, and at least one logic chip is mounted to the other surface. An extremely thin flexible substrate is used to optimize the through hole interconnection length between the memory element and the logic element. When the logic chip is to be mounted to a hollow part that is formed by an opening by flip chips, a heat sink plate is used to cover the hollow part and at the same time perform efficient thermal contact to the reverse side of the logic chip.

    MEMORY CHIP PACKAGE
    8.
    发明专利

    公开(公告)号:JPH1116940A

    公开(公告)日:1999-01-22

    申请号:JP14477898

    申请日:1998-05-26

    Abstract: PROBLEM TO BE SOLVED: To protect I/O lead wires from an obstacle due to alpha particles by a method wherein memory chips are respectively provided with a semiconductor charge storage site, the soldered interconnection of the memory chips with a substrate for interconnection use is made within a specified value from the charge storage sites and a solder material has a specified lead content. SOLUTION: A plurality of bonded semiconductor chips 12, 13 and 14 are provided on a substrate 11 for interconnection use. The chips 12 and 13 are memory chips and the chip 14 is a logic chip. The memory chips 12 and 13 are respectively provided with a semiconductor charge storage site and are mounted on the substrate 11 using a soldered connection. The soldered interconnection of the chips 12 and 13 with the substrate 11 is made within the extent of at least 5 mills, that is, 0.127 mm, from the semiconductor charge storage sites. Moreover, the lead content of a solder material is less than 5%. As a solder to be used for bonding the chips 12 and 13 to the substrate 11 in such a way, one hardly contains an alpha particle radioactive material is used.

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