公开(公告)号：JP2000208731A

公开(公告)日：2000-07-28

申请号：JP2000004300

申请日：2000-01-13

Applicant: LUCENT TECHNOLOGIES INC

Inventor： SANDER SRINIVASAN CHETTLER ,  JAMES THEODORE CLEMENS ,  MERCHANT SAILESH M ,  ROY PRADIP K ,  HEMU M VAIDEA

IPC: H01L27/10 ,  H01L21/02 ,  H01L21/768 ,  H01L21/8242 ,  H01L27/108

Abstract: PROBLEM TO BE SOLVED: To provide a capacity of an integrated circuit including a fixed plug. SOLUTION: The capacity of an integrated circuit contains a substrate, a first dielectric substance layer 26 which is adjacent to the substrate and is provided with a first groove in the substrate, and a first metal plug 30 extending upward in the first groove 28. A mutual connection line 32 lies on the first groove 28 and is in contact with the first metal plug 30 for specifying a fixed recessed part on the opposite side to the first metal plug 30. A second dielectric substance layer 36 lies on the mutual connection line 32 and is provided with a second groove 38 therein. The second metal plug 22 extends upwards in the second groove 38. More specifically, the second metal plug 22 includes a base body extending upwards in the second groove 38 and a fixing part, which is connected with the base body and of which fixing recessed part allows the second metal plug 32 to be fixed to the mutual connection line 32. The second groove 38 can be made deep for fixing the second metal plug 22, without loosening the metal plug and separation thereof from the lower mutual connection line.

公开(公告)号：SG83177A1

公开(公告)日：2001-09-18

申请号：SG200000078

申请日：2000-01-06

Applicant: LUCENT TECHNOLOGIES INC

Inventor： SUNDAR SRINIVASAN CHETLUR ,  JAMES THEODORE CLEMENS ,  SAILESH MANSINH MERCHANT ,  PRADIP KUMAR ROY ,  HEM M VAIDYA

IPC: H01L27/10 ,  H01L21/02 ,  H01L21/768 ,  H01L21/8242 ,  H01L27/108 ,  H01L29/92

Abstract: An integrated circuit capacitor includes a substrate (24), a first dielectric layer (26) adjacent the substrate and having a first trench (28) therein, and a first metal plug (30) extending upwardly from the substrate into the first trench. An interconnection line (32) overlies the first trench and contacts the first metal plug to define anchoring recesses (34) on opposite lateral sides of the first metal plug. A second dielectric layer (36) is on the interconnection line and has a second trench (38) therein. A second metal plug (22) extends upwardly into the second trench. More particularly, the second metal plug includes a body portion (40) extending upwardly into the second trench, and anchor portions (42) connected to the body portion and engaging the anchoring recesses to anchor the second metal plug to the interconnection line. The capacitor stack (44,48,46) overlies the second trench and contacts the second metal plug. Because the second metal plug is anchored, a depth of the second trench can be greater, thereby increasing the surface area of the capacitor, without the metal plug becoming loose and separating from the underlying interconnection line.