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公开(公告)号：JP2000164460A
公开(公告)日：2000-06-16
申请号：JP33350099
申请日：1999-11-24
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor： HUNT ANDREW TYE , FLANAGAN JOHN SCOTT , NEUMAN GEORGE A , JII JIUAMU WAN , HERUMATO G HORRIS , WEN-I RIN , MICHEL HENDRICK
Abstract: PROBLEM TO BE SOLVED: To enable a smaller miniaturization of a printed circuit board by method wherein a thin film capacitor is made to comprise a metal wheel and a dielectric layer having a specified thickness on the wheel as a structure for the thin film capacitor. SOLUTION: As a simple layout of a thin layer capacitor, a dielectric layer 404 is formed on a metal wheel 402 or a metal layer 402 and a second metal layer 406 is formed on the surface on the opposite side of the layer 404. A layer, which can function as the layer 404 for a buried capacitor and a registor, is very thin and is uniform, can be deposited by a combustion chemical vapor deposition(CCVD) method. The thickness of the layer 404 deposited for the buried capacitor is typically about 0.03 to about 2 microns, preferably the thickness is about 0.1 to about 1 micron and most preferably the thickness is about 0.2 to about 0.6 micron. As the thinner layer 104 has a higher capacitance, the capability to deposit a very thin film of the CCVD method is the favorable point of the CCVD method.
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公开(公告)号：JP2001210956A
公开(公告)日：2001-08-03
申请号：JP2000329569
申请日：2000-10-27
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor： HUNT ANDREW T , WEN-I RIN , CARPENTER RICHARD W
Abstract: PROBLEM TO BE SOLVED: To provide a nanolaminate structure having a circuit for providing both a capacitor and a resistor. SOLUTION: Concerning the multiplayer laminate for forming a thin layer copacitor and a resistor or combination thereof, this multiplayer laminate has at least two layers of resistance materials and a dielectric layer, inserted between two layers of resistance materials.
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