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公开(公告)号:JP2000164460A
公开(公告)日:2000-06-16
申请号:JP33350099
申请日:1999-11-24
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW TYE , FLANAGAN JOHN SCOTT , NEUMAN GEORGE A , JII JIUAMU WAN , HERUMATO G HORRIS , WEN-I RIN , MICHEL HENDRICK
Abstract: PROBLEM TO BE SOLVED: To enable a smaller miniaturization of a printed circuit board by method wherein a thin film capacitor is made to comprise a metal wheel and a dielectric layer having a specified thickness on the wheel as a structure for the thin film capacitor. SOLUTION: As a simple layout of a thin layer capacitor, a dielectric layer 404 is formed on a metal wheel 402 or a metal layer 402 and a second metal layer 406 is formed on the surface on the opposite side of the layer 404. A layer, which can function as the layer 404 for a buried capacitor and a registor, is very thin and is uniform, can be deposited by a combustion chemical vapor deposition(CCVD) method. The thickness of the layer 404 deposited for the buried capacitor is typically about 0.03 to about 2 microns, preferably the thickness is about 0.1 to about 1 micron and most preferably the thickness is about 0.2 to about 0.6 micron. As the thinner layer 104 has a higher capacitance, the capability to deposit a very thin film of the CCVD method is the favorable point of the CCVD method.
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公开(公告)号:CA2385324C
公开(公告)日:2008-03-25
申请号:CA2385324
申请日:2000-09-21
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: REESE BRIAN T , HUNT ANDREW TYE , OLJACA MIODRAG , NEUMAN GEORGE A
Abstract: The present invention involves controlled atomization of liquids for various applications such as particle/droplet seeding for laser-based measurements of flow velocity, temperature, and concentration; flame and plasma based elemental analysis; nano-powder production; spray drying for generation of small-sized particles; nebulizers in the production of sub-micron size droplets and for atomizing fuel for use in combustion chambers. In these and other atomizer applications the control of droplet and/or particle size is very critical. In some applications extremely small droplets are preferred (less than a micron), while in others, droplet diameters on the scale of several microns are required. The present invention has the flexibility of forming droplets within a particular range of diameters, wherein not only the size of the average droplet can be adjusted, but the range of sizes may be adjusted as well. The atomizer (4) itself is in the form of a heated tube (44) having an inlet end (48) and an outlet end (50). As liquid travels through the tube it is heated and upon exiting the tube and entering a reduced pressure area the liquid atomizes to form very fine droplets. By electrically heating the tube by passing a current therethrough, the heating adjustment can be performed on-the-fly, allowing droplet size adjustment during operation of the atomizer. Several different embodiments of the atomization device are disclosed.
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公开(公告)号:CA2385324A1
公开(公告)日:2001-03-29
申请号:CA2385324
申请日:2000-09-21
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW TYE , REESE BRIAN T , NEUMAN GEORGE A , OLJACA MIODRAG
Abstract: The present invention involves controlled atomization of liquids for various applications such as particle/droplet seeding for laser-based measurements o f flow velocity, temperature, and concentration; flame and plasma based elemental analysis; nano-powder production; spray drying for generation of small-sized particles; nebulizers in the production of sub-micron size droplets and for atomizing fuel for use in combustion chambers. In these and other atomizer applications the control of droplet and/or particle size is very critical. In some applications extremely small droplets are preferred (less than a micron), while in others, droplet diameters on the scale of several microns are required. The present invention has the flexibility of forming droplets within a particular range of diameters, wherein not only th e size of the average droplet can be adjusted, but the range of sizes may be adjusted as well. The atomizer (4) itself is in the form of a heated tube (4 4) having an inlet end (48) and an outlet end (50). As liquid travels through t he tube it is heated and upon exiting the tube and entering a reduced pressure area the liquid atomizes to form very fine droplets. By electrically heating the tube by passing a current therethrough, the heating adjustment can be performed on-the-fly, allowing droplet size adjustment during operation of t he atomizer. Several different embodiments of the atomization device are disclosed.
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公开(公告)号:AU2002249829A1
公开(公告)日:2002-08-12
申请号:AU2002249829
申请日:2001-12-27
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: TOMOV TRIFON , LUTEN HENRY A III , OLJACA MIODRAG , NEUMULLER TRAVIS , DANIELSON DOUG , WITBROD FRANK , NEUMAN GEORGE A , HUNT ANDREW T , FORTUNATO FRED
IPC: C23C16/44 , C23C16/453 , C23C16/455 , B05B1/24
Abstract: Apparatus is described for rapidly coating a large area, or for rapidly producing a powder. In one embodiment, a liquid having a coating chemical is pumped from a liquid reservoir to a distribution manifold. From the distribution manifold, the liquid is carried under pressure to a geometric array, e.g., linear, of atomization nozzles. Flow equalization means are provided for equalizing the flow of the liquid delivered to each nozzle, and, preferably, means are provided for equalizing the temperature of the liquid delivered to each nozzle. The liquid, upon exiting the nozzles with the attendant pressure drop atomizes. The atomized liquid coats a substrate either in non-reacted or reacted form, or forms a powder. In a preferred embodiment, a solution of precursor chemical is reacted in a geometric array of flames produced at the nozzles, and a coating material produced in the flame coats the substrate, or a powder is formed. In another embodiment, vaporized precursor and vaporized are fed to a burner chamber having a linear exit slit. The vapor exiting the slit is burned, and material produced in a flame reaction are deposited on a substrate, or the powder formed is collected.
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公开(公告)号:AU7832200A
公开(公告)日:2001-04-24
申请号:AU7832200
申请日:2000-09-21
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: OLJACA MIODRAG , HUNT ANDREW TYE , REESE BRIAN T , NEUMAN GEORGE A
Abstract: The present invention involves controlled atomization of liquids for various applications such as part/droplet seeding for laser-based measurements of flow velocity, temperature, and concentration; flame and a plasma based elemental analysis; nano-powder production; spray drying for generation of small-sized particles; nebulizers in the production of sub-micron size droplets and for atomizing fuel for use in combustion chambers. In these and other atomizer applications the control of droplet and/or particle size is very critical In some applications extremely small droplets are preferred (less than a micron), while in others, droplet diameters on the scale of several microns are required. The present invention has the flexibility of forming droplets within a particular range of diameters, wherein not only the size of the average droplet can be adjusted, but the range of sizes may be adjusted as well. The atomizer (4) itself is in the form of a heated tube (44) having an inlet end (48) and an outlet end (50). As liquid travels through the tube it is heated and upon exiting the tube and entering a reduced pressure area the liquid atomizes to form very fine droplets. By electrically heating the tube by passing a current therethrough, the heating adjustment can be performed on-the-fly allowing size adjustment during operation of the atomizer. Several different embodiments of the atomization device are disclosed.
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公开(公告)号:WO02061163A2
公开(公告)日:2002-08-08
申请号:PCT/US0149559
申请日:2001-12-27
Applicant: MICROCOATING TECHNOLOGIES INC , OLJACA MIODRAG , TOMOV TRIFON , NEUMAN GEORGE A , DANIELSON DOUG , HUNT ANDREW T , NEUMULLER TRAVIS , FORTUNATO FRED , LUTEN HENRY A III , WITBROD FRANK
Inventor: OLJACA MIODRAG , TOMOV TRIFON , NEUMAN GEORGE A , DANIELSON DOUG , HUNT ANDREW T , NEUMULLER TRAVIS , FORTUNATO FRED , LUTEN HENRY A III , WITBROD FRANK
IPC: C23C16/44 , C23C16/453 , C23C16/455 , C23C
CPC classification number: C23C16/45595 , B05B1/14 , B05B7/066 , B05B7/201 , C23C16/453
Abstract: A combustion chemical vapor deposition apparatus (100) having a manifold (116) into which a liquid (211) is pumped into by pump (213) through flow equilization tubes (206). The liquid (211) is sprayed through an array of spray nozzles (104). Combustible gas is provided through nozzles (114) and oxygen is supplied through orifices (106). The manifold is heated by heating element (202).
Abstract translation: 一种燃烧化学气相沉积设备(100),具有歧管(116),液体(211)通过流动均衡管(206)被泵(213)泵入其中。 液体(211)通过一系列喷嘴(104)喷射。 通过喷嘴(114)提供可燃气体,并通过孔(106)供应氧气。 歧管由加热元件(202)加热。
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公开(公告)号:AU777249B2
公开(公告)日:2004-10-07
申请号:AU7832200
申请日:2000-09-21
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: OLJACA MIODRAG , HUNT ANDREW TYE , REESE BRIAN T , NEUMAN GEORGE A
Abstract: The present invention involves controlled atomization of liquids for various applications such as part/droplet seeding for laser-based measurements of flow velocity, temperature, and concentration; flame and a plasma based elemental analysis; nano-powder production; spray drying for generation of small-sized particles; nebulizers in the production of sub-micron size droplets and for atomizing fuel for use in combustion chambers. In these and other atomizer applications the control of droplet and/or particle size is very critical In some applications extremely small droplets are preferred (less than a micron), while in others, droplet diameters on the scale of several microns are required. The present invention has the flexibility of forming droplets within a particular range of diameters, wherein not only the size of the average droplet can be adjusted, but the range of sizes may be adjusted as well. The atomizer (4) itself is in the form of a heated tube (44) having an inlet end (48) and an outlet end (50). As liquid travels through the tube it is heated and upon exiting the tube and entering a reduced pressure area the liquid atomizes to form very fine droplets. By electrically heating the tube by passing a current therethrough, the heating adjustment can be performed on-the-fly allowing size adjustment during operation of the atomizer. Several different embodiments of the atomization device are disclosed.
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