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公开(公告)号：WO2010151466A3
公开(公告)日：2011-11-17
申请号：PCT/US2010038790
申请日：2010-06-16
Applicant: MKS INSTR INC , NAGARKATTI SIDDHARTH , TIAN FENG , LAM DAVID , RASHID ABDUL , BENZERROUK SOUHEIL , BYSTRYAK ILYA , MENZER DAVID , SCHUSS JACK J , AMBROSINA JESSE E
Inventor： NAGARKATTI SIDDHARTH , TIAN FENG , LAM DAVID , RASHID ABDUL , BENZERROUK SOUHEIL , BYSTRYAK ILYA , MENZER DAVID , SCHUSS JACK J , AMBROSINA JESSE E
IPC: H02J17/00
CPC classification number: H03K5/01 , H03F3/189 , H03F3/217 , H03F2200/105 , H03F2200/375 , H03F2200/387 , H03G3/3047
Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
Abstract translation: 一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。 该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。 该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。
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Patent Agency Ranking
公开(公告)号：DE112010002708T5
公开(公告)日：2012-07-05
申请号：DE112010002708
申请日：2010-06-16
Applicant: MKS INSTR INC
Inventor： TIAN FENG , LAM DAVID , SCHUSS JACK J , NAGARKATTI SIDDHARTH , RASHID ABDUL , BENZERROUK SOUHEIL , BYSTRYAK ILYA , MENZER DAVID , AMBROSINA JESSE E
IPC: H02J17/00
Abstract: Ein Verfahren zur Steuerung einer gepulsten Leistung (Pulsleistung), das ein Messen eines ersten Pulses von einem Leistungsverstärker umfasst, um Daten zu gewinnen. Das Verfahren enthält auch das Erzeugen eines ersten Signals, um einen zweiten Puls der abgegebenen Leistung anzupassen, wobei das erste Signal mit den Daten korreliert ist, um einen Leistungsunterschied zwischen einem Leistungssollwert und einem im Wesentlichen stabilen Teil des zweiten Pulses zu minimieren. Das Verfahren umfasst auch ein Erzeugen eines zweiten Signals, um den zweiten Puls der abgegebenen Leistung anzupassen, wobei das zweite Signal mit den Daten korreliert ist, um einen Amplitudenunterschied zwischen einem Peak des zweiten Pulses und dem im Wesentlichen stabilen Teil des zweiten Pulses zu minimieren.
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公开(公告)号：SG10201705205WA
公开(公告)日：2017-07-28
申请号：SG10201705205W
申请日：2014-03-14
Applicant: MKS INSTR INC
Inventor： CHEN XING , POKIDOV ILYA , TIAN FENG , TRAN KEN , LAM DAVID , WENZEL KEVIN W
Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.
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公开(公告)号：SG11201507152RA
公开(公告)日：2015-10-29
申请号：SG11201507152R
申请日：2014-03-14
Applicant: MKS INSTR INC
Inventor： CHEN XING , POKIDOV ILYA , TIAN FENG , TRAN KEN , LAM DAVID , WENZEL KEVIN W
Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.
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公开(公告)号：GB2487829A
公开(公告)日：2012-08-08
申请号：GB201201091
申请日：2010-06-16
Applicant: MKS INSTR INC
Inventor： NAGARKATTI SIDDHARTH P , TIAN FENG , LAM DAVID , RASHID ABDUL , BENZERROUK SOUHEIL , MENZER DAVID , SCHUSS JACK J , AMBROSINA JESSE E , BYSTRYAK ILYA
IPC: G05F1/66
Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
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公开(公告)号：SG176979A1
公开(公告)日：2012-02-28
申请号：SG2011095833
申请日：2010-06-16
Applicant: MKS INSTR INC
Inventor： NAGARKATTI SIDDHARTH , TIAN FENG , LAM DAVID , RASHID ABDUL , BENZERROUK SOUHEIL , BYSTRYAK ILYA , MENZER DAVID , SCHUSS JACK J , AMBROSINA JESSE E
Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
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