中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

13 records (took 0.021 seconds)

    METHOD AND APPARATUS OF PROVIDING POWER TO IGNITE AND SUSTAIN A PLASMA IN A REACTIVE GAS GENERATOR
    1.
    发明申请
    METHOD AND APPARATUS OF PROVIDING POWER TO IGNITE AND SUSTAIN A PLASMA IN A REACTIVE GAS GENERATOR 审中-公开
    向IGNITE提供电力的方法和装置，并在可靠的气体发生器中保持等离子体

    公开(公告)号：WO2007056190A2

    公开(公告)日：2007-05-18

    申请号：PCT/US2006043046

    申请日：2006-11-03

    Applicant: MKS INSTR INC ,  MILLNER ALAN ,  ALEXANDER THOMAS ,  BYSTRYAK ILYA ,  TRAN KEN ,  JOSHI MADHUWANTI

    Inventor： MILLNER ALAN ,  ALEXANDER THOMAS ,  BYSTRYAK ILYA ,  TRAN KEN ,  JOSHI MADHUWANTI

    IPC: H01J37/32

    CPC classification number: H01J37/32174 ,  H01J37/321 ,  H01J37/32137 ,  H05H1/46

    Abstract: According to a first aspect, a power supply and a method of providing power for igniting a plasma in a reactive gas generator is provided that includes (i) coupling a series resonant circuit that comprises a resonant inductor and a resonant capacitor between a switching power source and a transformer, the transformer having a transformer primary and a plasma secondary; (ii) providing a substantially resonant AC voltage from the resonant capacitor across the transformer primary, thereby inducing a substantially resonant current within the transformer primary to generate the plasma secondary; and (iii) upon generation of the plasma secondary, the resonant inductor limiting current flowing to the switching power supply. According to another aspect, bipolar high voltage ignition electrodes can be used in conjunction with inductive energy coupling to aid in plasma ignition.

    Abstract translation: 根据第一方面，提供了一种电源和提供用于点燃无功气体发生器中的等离子体的功率的方法，其包括（i）将包括谐振电感器的串联谐振电路和谐振电容器耦合在开关电源 和变压器，变压器具有变压器初级和等离子体次级; （ii）从变压器初级侧的谐振电容器提供基本上谐振的AC电压，从而在变压器初级线路内引起基本上谐振的电流以产生等离子体次级; 和（iii）在产生等离子体次级时，谐振电感器限制流向开关电源的电流。 根据另一方面，双极性高压点火电极可以与感应能耦合一起使用以辅助等离子体点火。

    METHOD AND APPARATUS OF PROVIDING POWER TO IGNITE AND SUSTAIN A PLASMA IN A REACTIVE GAS GENERATOR
    2.
    发明申请
    METHOD AND APPARATUS OF PROVIDING POWER TO IGNITE AND SUSTAIN A PLASMA IN A REACTIVE GAS GENERATOR 审中-公开
    向IGNITE提供电力的方法和装置，并在可靠的气体发生器中保持等离子体

    公开(公告)号：WO2007056190B1

    公开(公告)日：2008-02-28

    申请号：PCT/US2006043046

    申请日：2006-11-03

    Applicant: MKS INSTR INC ,  MILLNER ALAN ,  ALEXANDER THOMAS ,  BYSTRYAK ILYA ,  TRAN KEN ,  JOSHI MADHUWANTI

    Inventor： MILLNER ALAN ,  ALEXANDER THOMAS ,  BYSTRYAK ILYA ,  TRAN KEN ,  JOSHI MADHUWANTI

    IPC: H01J37/32

    CPC classification number: H01J37/32174 ,  H01J37/321 ,  H01J37/32137 ,  H05H1/46

    Abstract: According to a first aspect, a power supply and a method of providing power for igniting a plasma in a reactive gas generator is provided that includes (i) coupling a series resonant circuit (100) that comprises a resonant inductor (110) and a resonant capacitor (120) between a switching power source (60) and a transformer (30), the transformer having a transformer primary (32) and a plasma secondary (36); (ii) providing a substantially resonant AC voltage from the resonant capacitor across the transformer primary, thereby inducing a substantially resonant current within the transformer primary to generate the plasma secondary; and (iii) upon generation of the plasma secondary, the resonant inductor limiting current flowing to the switching power supply. According to another aspect, bipolar high voltage ignition electrodes can be used in conjunction with inductive energy coupling to aid in plasma ignition.

    Abstract translation: 根据第一方面，提供了一种电源和提供用于点燃无功气体发生器中的等离子体的功率的方法，其包括（i）耦合包括谐振电感器（110）的串联谐振电路（100）和谐振电路 电容器（120）在开关电源（60）和变压器（30）之间，变压器具有变压器初级（32）和等离子体次级（36）; （ii）从变压器初级侧的谐振电容器提供基本上谐振的AC电压，从而在变压器初级线路内引起基本上谐振的电流以产生等离子体次级; 和（iii）在产生等离子体次级时，谐振电感器限制流向开关电源的电流。 根据另一方面，双极性高压点火电极可以与感应能耦合一起使用以辅助等离子体点火。

    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS
    3.
    发明申请
    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 审中-公开
    紧凑的可配置电源，用于提供生产臭氧的电池

    公开(公告)号：WO2013148410A3

    公开(公告)日：2013-12-19

    申请号：PCT/US2013032920

    申请日：2013-03-19

    Applicant: MKS INSTR INC

    Inventor： TRAN KEN ,  TIAN FENG ,  CHEN XING ,  LEE FRANKLIN

    IPC: C01B13/11 ,  H02M1/36 ,  H02M3/335 ,  H02M7/48 ,  H02M7/537 ,  H02M7/538

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

    Abstract translation: 使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。 以大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这样的单元供电的高压AC，同时允许减小组件尺寸并降低负载调整电路的品质因数 。 可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。 还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化，由从DC总线获得的测量值确定。 限流电阻可以是正温系数热敏电阻。

    A VERSATILE ZERO-VOLTAGE SWITCH RESONANT INVERTER FOR INDUSTRIAL DIELECTRIC BARRIER DISCHARGE GENERATOR APPLICATIONS
    4.
    发明公开
    A VERSATILE ZERO-VOLTAGE SWITCH RESONANT INVERTER FOR INDUSTRIAL DIELECTRIC BARRIER DISCHARGE GENERATOR APPLICATIONS 审中-公开
    越野车NULLSCHALTUNGS-SCHALTRESONANZWECHSELRICHTERFÜRINDUSTRIELLE GENERATORANWENDUNGEN MIT DIELEKTRISCHER SPERRENTLADUNG

    公开(公告)号：EP2834911A4

    公开(公告)日：2016-03-30

    申请号：EP13768401

    申请日：2013-03-18

    Applicant: MKS INSTR INC

    Inventor： TRAN KEN ,  CHEN XING ,  NEWMAN RUSSELL L ,  LEE FRANKLIN

    IPC: H02M7/48

    CPC classification number: H05B33/0803 ,  Y02B20/348

    Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.

    Abstract translation: 用于产生臭氧的电介质阻挡放电系统的电力系统可以包括全桥逆变级和并联谐振回路，输出用于为介质阻挡放电单元堆提供电力的信号。 使用脉冲宽度调制（PWM）和频率调制（FM）的组合来控制逆变器级，以实现从全负载到轻负载的所有负载条件下的软开关。 电流控制回路误差放大器补偿器可以向产生用于逆变器级的开关信号的相移PWM控制器芯片提供占空比调整信号。 反馈信号也用于调整PWM控制器芯片的时钟频率时间常数以提供FM。 在一个实施例中，反馈信号是连接在电流控制回路误差放大器补偿器的输出处的反相放大器的输出。

    TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
    6.
    发明专利
    TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD 未知

    公开(公告)号：SG10201705205WA

    公开(公告)日：2017-07-28

    申请号：SG10201705205W

    申请日：2014-03-14

    Applicant: MKS INSTR INC

    Inventor： CHEN XING ,  POKIDOV ILYA ,  TIAN FENG ,  TRAN KEN ,  LAM DAVID ,  WENZEL KEVIN W

    Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.

    TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
    7.
    发明专利
    TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD 未知

    公开(公告)号：SG11201507152RA

    公开(公告)日：2015-10-29

    申请号：SG11201507152R

    申请日：2014-03-14

    Applicant: MKS INSTR INC

    Inventor： CHEN XING ,  POKIDOV ILYA ,  TIAN FENG ,  TRAN KEN ,  LAM DAVID ,  WENZEL KEVIN W

    IPC: B01D53/32 ,  B01J12/00 ,  H01J37/32

    Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.

Patent Agency Ranking