公开(公告)号：WO2013148410A3

公开(公告)日：2013-12-19

申请号：PCT/US2013032920

申请日：2013-03-19

Applicant: MKS INSTR INC

Inventor： TRAN KEN ,  TIAN FENG ,  CHEN XING ,  LEE FRANKLIN

IPC: C01B13/11 ,  H02M1/36 ,  H02M3/335 ,  H02M7/48 ,  H02M7/537 ,  H02M7/538

CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high- voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

Abstract translation: 使用本文所述的系统和技术可以实现向产生臭氧的电池供应高频电力的改进。 以大于负载频率的开关频率工作的DC-DC转换器的应用支持产生用于为这样的单元供电的高压AC，同时允许减小组件尺寸并降低负载调整电路的品质因数 。 可以使用反馈技术来控制用于获得开关和负载频率中的一个或多个的可控功率逆变器，以在一个或多个外部供电和负载条件的变化下向产生臭氧的电池提供稳定的高质量功率。 还可以提供浪涌保护电路以选择性地引入限流电阻，直到输入DC总线已被充分初始化，由从DC总线获得的测量值确定。 限流电阻可以是正温系数热敏电阻。

公开(公告)号：EP2834911A4

公开(公告)日：2016-03-30

申请号：EP13768401

申请日：2013-03-18

Applicant: MKS INSTR INC

Inventor： TRAN KEN ,  CHEN XING ,  NEWMAN RUSSELL L ,  LEE FRANKLIN

IPC: H02M7/48

CPC classification number: H05B33/0803 ,  Y02B20/348

Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.

Abstract translation: 用于产生臭氧的电介质阻挡放电系统的电力系统可以包括全桥逆变级和并联谐振回路，输出用于为介质阻挡放电单元堆提供电力的信号。 使用脉冲宽度调制（PWM）和频率调制（FM）的组合来控制逆变器级，以实现从全负载到轻负载的所有负载条件下的软开关。 电流控制回路误差放大器补偿器可以向产生用于逆变器级的开关信号的相移PWM控制器芯片提供占空比调整信号。 反馈信号也用于调整PWM控制器芯片的时钟频率时间常数以提供FM。 在一个实施例中，反馈信号是连接在电流控制回路误差放大器补偿器的输出处的反相放大器的输出。

公开(公告)号：SG11201404303PA

公开(公告)日：2014-09-26

申请号：SG11201404303P

申请日：2013-03-18

Applicant: MKS INSTR INC

Inventor： TRAN KEN ,  CHEN XING ,  NEWMAN RUSSELL L ,  LEE FRANKLIN

IPC: H02M7/48

Abstract: A power system for a dielectric barrier discharge system, such as used for generating ozone, can include a full bridge inverter stage and parallel resonant tank outputting a signal for powering a dielectric barrier discharge cell stack. The inverter stage is controlled using a combination of pulse width modulation (PWM) and frequency modulation (FM) to enable soft switching through all load conditions—from full load to light load. A current control loop error amplifier compensator can provide a duty cycle adjustment signal to a phase shift PWM controller chip that generates the switching signals for the inverter stage. A feedback signal is also used to adjust a clock frequency time constant of the PWM controller chip to provide the FM. In one embodiment, the feedback signal is an output of an inverting amplifier connected at an output of the current control loop error amplifier compensator.