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公开(公告)号：US5032461A
公开(公告)日：1991-07-16
申请号：US597112
申请日：1990-10-12
Applicant: David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
Inventor： David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
CPC classification number: B05D7/56 , B05D1/60 , B05D3/068 , B05D7/24 , H01G13/00 , H01G4/145 , H01G4/306 , B05D3/148 , Y10T428/31692 , Y10T428/31909
Abstract: A high speed process for forming a multi layered thin film structure in a vacuum wherein each film is less than about four microns thick and the total layers can reach upwards to 4,000 or more. The polymeric layers are formed of a cross linked component selected from the group consisting of polyfunctional acrylates and mixtures of polyfunctional acrylates and monocrylates with the component having a preferable molecular weight of between 200 and 300 and a vapor pressure preferably in excess of 1.times.10.sup.-2 Torr. The polymeric layers may be interleaved with metal layers.
Abstract translation: 用于在真空中形成多层薄膜结构的高速工艺，其中每个薄膜的厚度小于约4微米，总层可达到4000以上。 聚合物层由选自多官能丙烯酸酯和多官能丙烯酸酯和单烯酸酯的混合物的交联组分形成，组分优选分子量为200-300，蒸气压优选超过1×10 -2乇 。 聚合物层可以与金属层交错。
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公开(公告)号：US4647818A
公开(公告)日：1987-03-03
申请号：US600674
申请日：1984-04-16
Applicant: Mooyoung Ham
Inventor： Mooyoung Ham
CPC classification number: H01J17/44 , H01J3/025 , H01J33/00 , H01J37/077
Abstract: Apparatus and method for producing a plurienergetic electron beam source. The apparatus includes a housing which functions as an anode, the same having an electron emission window covered by an electron-transparent grid, a cathode body mounted within the housing and electrically isolated therefrom, the spacing between the cathode body and grid being sufficient to permit a gas discharge to be maintained between them having a plasma region substantially thinner than the cathode sheath region. The method involves the simultaneous feeding of gas between a cathode body and an anode grid, applying voltages of about 10 kV to 20 kV and regulating the gas feed rate and the voltage to maintain a discharge condition of the character described above.
Abstract translation: 用于生产三能电子束源的装置和方法。 该装置包括用作阳极的壳体，其具有由电子透明栅格覆盖的电子发射窗口，阴极体安装在壳体内并与其电隔离，阴极体与栅极之间的间隔足以允许 保持在它们之间的气体放电具有基本上比阴极鞘区域薄的等离子体区域。 该方法包括在阴极体和阳极电网之间同时进料气体，施加约10kV至20kV的电压并调节气体进料速率和电压以维持上述特性的排放条件。
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公开(公告)号：US4613518A
公开(公告)日：1986-09-23
申请号：US691025
申请日：1985-01-14
Applicant: Mooyoung Ham , John W. Duffy
Inventor： Mooyoung Ham , John W. Duffy
CPC classification number: H01G4/232 , Y10T29/435
Abstract: Edge termination of monolithic capacitors having thin electrode layers bonded in dielectric resin is accomplished by ashing away some resin to expose electrode edge surfaces, plating the edge surfaces by vapor deposition, and depositing a conductive layer on the coating by electroless plating, schooping or applying conductive epoxy.
Abstract translation: 在电介质树脂中结合有薄电极层的单片电容器的边缘端接是通过灰化掉一些树脂来暴露电极边缘表面，通过气相沉积来镀覆边缘表面，并通过化学镀，观察或施加导电 环氧树脂。
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Patent Agency Ranking4.发明授权
公开(公告)号：US5125138A
公开(公告)日：1992-06-30
申请号：US636029
申请日：1991-01-04
Applicant: David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
Inventor： David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
CPC classification number: B05D7/56 , B05D1/60 , B05D3/068 , B05D7/24 , H01G13/00 , H01G4/306 , Y10T29/435
Abstract: A monolithic multi-layer capacitor having a central capacitively active area and two electrode joining section separated from the active area by sloped sections has dielectric layers about 1 micron thick in the active area which taper gradually to zero thickness in the sloped sections. Electrode layers in the active area have a thickness in the range from 200 to 500 Angstroms and sufficient thickness throughout the sloped sections for adequate current carrying capacity. Various acrylates are used for the dielectric layers, the number of layers ranging from a few to many thousands.Apparatus and methods for the fabrication of such capacitors on a high speed, production scale basis employ techniques for the flash evaporation of highly reactive monomers of acrylate dielectric materials. The vapor is controllably directed to a deposition surface for condensation and subsequent curing by a field enhanced gas discharge electron beam source. The control of the dielectric vapor is accomplished by adjacent gas streams of an inert gas directed to areas of the deposition surface where deposition of the electrode material is unwanted. Monomers of the dielectric material are ultrasonically atomized in preparation for flash evaporation.
Abstract translation: 具有中心电容有效面积和两个电极接合部分的单片多层电容器具有通过倾斜部分与有源区域分开的电极接合部分，在有源区域中的介电层约为1微米厚，在倾斜部分中逐渐变细至零。 有源区域中的电极层的厚度在200至500埃的范围内，并且在整个倾斜部分具有足够的厚度以具有足够的载流能力。 各种丙烯酸酯用于电介质层，层数从几到数千。 用于以高速，生产规模为基础制造这种电容器的装置和方法采用用于丙烯酸酯介电材料的高反应性单体的闪蒸的技术。 蒸汽被可控地引导到沉积表面用于冷凝，并随后通过场强气体放电电子束源固化。 电介质蒸汽的控制是通过相邻的惰性气体气流来实现的，惰性气体指向沉积表面的区域，其中电极材料的沉积是不希望的。 介电材料的单体被超声波雾化以准备闪蒸。
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公开(公告)号：US4722515A
公开(公告)日：1988-02-02
申请号：US850427
申请日：1986-04-08
Applicant: Mooyoung Ham
Inventor： Mooyoung Ham
CPC classification number: B05B3/082 , B05B3/001 , Y10S261/65
Abstract: A liquid vaporizing apparatus having a cylindrical heated vaporizing surface against which atomized droplets of liquid are thrown by a spinning disk; the disk receiving a continuous thin film of liquid from a capillary tube spaced from the disk so that a fluid drop fed from the tube end is contacted by the disk to roll the drop while pulling a liquid film from the drop, the liquid being continuously replenished from the tube.
Abstract translation: 一种液体蒸发装置，具有圆柱形的加热汽化表面，雾化的液滴被旋转盘抛出; 所述盘从与所述盘间隔开的毛细管接收液体的连续薄膜，使得从所述管端供给的流体液滴与所述盘接触以在从所述液滴中拉出液膜的同时滚动所述液滴，所述液体被不断补充 从管子。
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公开(公告)号：US5097800A
公开(公告)日：1992-03-24
申请号：US551645
申请日：1990-07-10
Applicant: David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
Inventor： David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
Abstract: A high speed apparatus for forming capacitors includes a vacuum chamber in which is located a carrier defining a continuous surface configured to move at a rate of from about 150 feet per minute to about 600 feet per minute during the forming operation, a metal depositing device, a dielectric depositing device, and a radiation source. The metal depositing device is configured to deposit layers of metal onto the moving surface, and the dielectric depositing device includes (a) a device for atomizing a radiation-curable polyfunctional acrylic monomer to form liquid droplets of the monomer, (b) a heated surface on which the atomized monomer droplets impinge and are flash vaporized, and (c) device for thereafter condensing the flash-vaporized monomer on the metal layers to form a monomer coating on successive layers. The radiation source is positioned for curing successive monomer coatings after each such coating has been deposited, to thereby form a polymer dielectric layer. Apparatus are provided for controlling each of the devices so that metal is deposited, a monomer coating is deposited, and the monomer coating is cured to form the polymer dielectric layer before the continuous surface passes the devices again for successive metal layers, monomer coatings, and curings.
Abstract translation: 用于形成电容器的高速装置包括真空室，其中定位有形成连续表面的载体，所述载体构造成在成形操作期间以约150英尺/分钟的速度移动至约600英尺/分钟;金属沉积装置， 介电沉积装置和辐射源。 金属沉积装置被配置为将金属层沉积到移动表面上，并且电介质沉积装置包括（a）用于雾化可辐射固化的多官能丙烯酸单体以形成单体的液滴的装置，（b）加热表面 其上雾化的单体液滴在其上喷射并闪蒸，和（c）此后将闪蒸汽化的单体在金属层上冷凝以在连续层上形成单体涂层的装置。 辐射源被定位用于在每个这样的涂层被沉积之后固化连续的单体涂层，从而形成聚合物介电层。 提供了用于控制每个器件以使得沉积金属，沉积单体涂层的装置，并且在连续表面再次穿过器件之前，将单体涂层固化以形成聚合物电介质层，用于连续的金属层，单体涂层和 治愈。
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7.发明授权
公开(公告)号：US5018048A
公开(公告)日：1991-05-21
申请号：US408471
申请日：1989-09-15
Applicant: David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
Inventor： David G. Shaw , Angelo Yializis , Donald S. Strycker , Mooyoung Ham
CPC classification number: B05D7/56 , B05D1/60 , B05D3/068 , B05D7/24 , H01G13/00 , H01G4/306 , Y10T29/435
Abstract: A monolithic multi-layer capacitor is disclosed having a central capacitively active area and two electrode joining sections separated from the active area by sloped sections. The dielectric layers are about 1 micron thick in the active area and taper gradually to zero thickness in the sloped sections. Electrode layers in the active area have a thickness in the range from 200 to 500 Angstroms and sufficient thickness throughout the sloped sections for adequate current carrying capacity. Various acrylates are used for the dielectric layers, the number of layers ranging from a few to many thousands.Apparatus and methods are disclosed for the fabrication of such capacitors on a high speed, production scale basis. Such employ techniques for the flash evaporation of highly reactive monomers of acrylate dielectric materials so as to form a gaseous stream of such materials. The gas stream is controllably directed to a deposition surface for condensation and subsequent curing by a field enhanced gas discharge electron beam source. The control of the dielectric gas stream is accomplished by means of adjacent gas streams of an inert gas directed to areas of the deposition surface where deposition of the electrode material is unwanted. Means are disclosed for the atomization of the monomers of the dielectric material in preparation for its flash evaporation.
Abstract translation: 公开了一种单片多层电容器，其具有中心电容有源面积和两个电极接合部分，其通过倾斜部分与有源区域分离。 电介质层在有源区域中约为1微米厚，并且在倾斜部分中逐渐变细至零厚度。 有源区域中的电极层的厚度在200至500埃的范围内，并且在整个倾斜部分具有足够的厚度以具有足够的载流能力。 各种丙烯酸酯用于电介质层，层数从几到数千。 公开了用于以高速，生产规模为基础制造这种电容器的装置和方法。 这种采用技术用于快速蒸发丙烯酸酯介电材料的高反应性单体以形成这种材料的气流。 气流被可控地引导到沉积表面以进行冷凝，然后通过场强气体放电电子束源固化。 电介质气流的控制是通过相邻的惰性气体气流来实现的，该惰性气体指向沉积表面的区域，其中电极材料的沉积是不需要的。 公开了为准备其闪蒸而使介电材料的单体雾化的方法。
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公开(公告)号：US4842893A
公开(公告)日：1989-06-27
申请号：US188036
申请日：1988-04-29
Applicant: Angelo Yializis , David G. Shaw , Donald S. Strycker , Mooyoung Ham
Inventor： Angelo Yializis , David G. Shaw , Donald S. Strycker , Mooyoung Ham
CPC classification number: B05D1/60 , B05D3/068 , B05D7/24 , B05D7/56 , C23C14/12 , C23C14/562 , H01G13/00 , H01G4/306 , B05D3/148
Abstract: A high-speed process for coating substrates with thin organic coatings in a vacuum is disclosed and claimed. The process utilizes relatively low boiling, reactive monomers (e.g., polyacrylates) which are flash vaporized, condensed on the substrates and cured, in situ. The resultant cured films are pin-hole free and exhibit excellent adhesion. The process is capable of being run at very high coating and curing speeds, e.g., between 1 and 1000 cm/second.
Abstract translation: 公开并要求保护在真空中用薄的有机涂层涂覆基材的高速方法。 该方法利用相对低沸点的反应性单体（例如聚丙烯酸酯），其被快速蒸发，在基材上冷凝并原位固化。 所得到的固化膜无针孔，表现出优异的附着力。 该方法能够以非常高的涂层和固化速度运行，例如在1至1000cm /秒之间。
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