CONCENTRATION MEASURING METHOD AND CONCENTRATION MEASURING INSTRUMENT FOR TWO KIND OF MIXED GAS

    公开(公告)号:JP2001330543A

    公开(公告)日:2001-11-30

    申请号:JP2000153979

    申请日:2000-05-25

    Abstract: PROBLEM TO BE SOLVED: To solve problems so far experienced in measuring the concentration of a mixed gas, for example, that the mixture ratio (concentration) can not be accurately measured when the pressure of the mixed gas is different from the atmospheric pressure and that an explosive mixed gas can not be measured by a method using heat or light radiation. SOLUTION: An absolute pressure gauge head 1 such as a diaphragm gauge for measuring an absolute pressure, and a pressure gauge head 2 sensitive to any of the physical properties of gas, such as a quartz friction vacuum gauge that is a pressure gauge sensitive to viscosity or a spinning rotor gauge, are connected to a pipe 4 containing a two kind mixed gas, whose constituent gases are previously known such as oxygen and ozone but their mixture ratio is unknown, and its pressure is simultaneously measured. From the two pressure measurements, the true value of the relevant physical property of the mixed gas is found, and the concentration of the gas is found from data on the correspondence of the physical property and concentration.

    METHOD AND APPARATUS FOR DETOXIFYING OZONE-CONTAINING EXHAUST GAS

    公开(公告)号:JP2001276575A

    公开(公告)日:2001-10-09

    申请号:JP2000089659

    申请日:2000-03-28

    Abstract: PROBLEM TO BE SOLVED: To provide a method and apparatus for detoxifying ozone-containing exhaust gas, capable of easily and efficiently decomposing ozone in ozone- containing exhaust gas of high concentration while holding the flow rate of exhaust gas sufficiently and capable of detoxifying the ozone-containing exhaust gas without generating impurities in an ozone decomposition system. SOLUTION: In the method and apparatus for detoxifying ozone-containing exhaust gas, the ozone-containing exhaust gas is brought into contact with a solid substance, which contains a metal element capable of reversibly taking plural kinds of oxidizing states, in an atmosphere having proper temperature and pressure to decompose ozone in the exhaust gas to detoxify the exhaust gas. As the solid substance, a metal or metal oxide, wherein two or more kinds of oxidizing states are present in an equilibrated state, or a composite metal oxide, wherein an oxidizing state is continuously changed, is used.

    ZONE GENERATOR
    5.
    发明专利

    公开(公告)号:JP2001304756A

    公开(公告)日:2001-10-31

    申请号:JP2000118889

    申请日:2000-04-20

    Abstract: PROBLEM TO BE SOLVED: To accumulate liquefied ozone of a high concentration. SOLUTION: A cold tray 2a of the same constitution as a liquefied ozone generator 2 is provided in a flow path between a fine particle removing filter 7 and a flow control valve 8. The cold trap 2a is cooled by means of a trap chamber 29, a freezer 33, a cold head 32 and a metal block 31 for cooling. The metal block 31 is controlled by a temperature controller 34 comprising a temperature sensor and a heater, and the freezer 33 is controlled by a compressor. An ozone-containing oxygen gas is introduced into a trap chamber 29 from the filter 7. The freezer 33 and the controller 34 set the temperature of the chamber 29 higher than the temperature of an ozone chamber 9. Thus, the trap chamber 29 liquefies or solidifies an impurity gas of comparatively higher temperature than zone to be liquefied.

    HIGH CONCENTRATION OZONE GAS-GENERATING DEVICE AND OZONE GAS GENERATING QUANTITY CONTROL METHOD THEREFOR

    公开(公告)号:JP2001139310A

    公开(公告)日:2001-05-22

    申请号:JP31803599

    申请日:1999-11-09

    Abstract: PROBLEM TO BE SOLVED: To safely and efficiently take out high concentration ozone gas from liquefied ozone by locally heating the liquefied ozone by laser beam. SOLUTION: This ozone generating device is composed of a refrigerator 11 for cooling ozone and an ozone chamber 12 of a vessel tube for storing the liquefied ozone, and has a structure that the bottom part of the ozone chamber 12 is brought into contact with a cold head 13 of the refrigerator 11 to be cooled to a prescribed temperature, and a heat insulating material is inserted into a gap between the ozone chamber 12 and an outside vessel 14 to prevent the inflow of heat by evacuating. A view port 30 and a reflection mirror 31 composed of a prism or the like are attached to the upper part of the ozone chamber 12 and a laser beam irradiation device 32 is mounted outside the view port 13. The liquid surface of the liquefied ozone 24 is irradiated through the reflection mirror 31 from the view port 30 with the laser beam emitted from the lamer beam irradiation device 32.

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