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公开(公告)号:JP2001330543A
公开(公告)日:2001-11-30
申请号:JP2000153979
申请日:2000-05-25
Applicant: NAT INST OF ADVANCED IND SCIEN
Inventor: KUROKAWA AKIRA , ICHIMURA SHINGO , NONAKA HIDEHIKO
Abstract: PROBLEM TO BE SOLVED: To solve problems so far experienced in measuring the concentration of a mixed gas, for example, that the mixture ratio (concentration) can not be accurately measured when the pressure of the mixed gas is different from the atmospheric pressure and that an explosive mixed gas can not be measured by a method using heat or light radiation. SOLUTION: An absolute pressure gauge head 1 such as a diaphragm gauge for measuring an absolute pressure, and a pressure gauge head 2 sensitive to any of the physical properties of gas, such as a quartz friction vacuum gauge that is a pressure gauge sensitive to viscosity or a spinning rotor gauge, are connected to a pipe 4 containing a two kind mixed gas, whose constituent gases are previously known such as oxygen and ozone but their mixture ratio is unknown, and its pressure is simultaneously measured. From the two pressure measurements, the true value of the relevant physical property of the mixed gas is found, and the concentration of the gas is found from data on the correspondence of the physical property and concentration.
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公开(公告)号:JP2001276575A
公开(公告)日:2001-10-09
申请号:JP2000089659
申请日:2000-03-28
Applicant: NAT INST OF ADVANCED IND SCIEN
Inventor: NONAKA HIDEHIKO , KUROKAWA AKIRA , ITO HIROSHI , ICHIMURA SHINGO
Abstract: PROBLEM TO BE SOLVED: To provide a method and apparatus for detoxifying ozone-containing exhaust gas, capable of easily and efficiently decomposing ozone in ozone- containing exhaust gas of high concentration while holding the flow rate of exhaust gas sufficiently and capable of detoxifying the ozone-containing exhaust gas without generating impurities in an ozone decomposition system. SOLUTION: In the method and apparatus for detoxifying ozone-containing exhaust gas, the ozone-containing exhaust gas is brought into contact with a solid substance, which contains a metal element capable of reversibly taking plural kinds of oxidizing states, in an atmosphere having proper temperature and pressure to decompose ozone in the exhaust gas to detoxify the exhaust gas. As the solid substance, a metal or metal oxide, wherein two or more kinds of oxidizing states are present in an equilibrated state, or a composite metal oxide, wherein an oxidizing state is continuously changed, is used.
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公开(公告)号:JP2001244227A
公开(公告)日:2001-09-07
申请号:JP2000049757
申请日:2000-02-25
Applicant: NAT INST OF ADVANCED IND SCIEN
Inventor: KOSUGI RYOJI , ICHIMURA SHINGO , KUROKAWA AKIRA , FUKUDA KENJI , SENZAKI SUMIHISA , CHO GENSHU , OGUSHI HIDEYO , ARAI KAZUO
IPC: C30B29/36 , C30B33/12 , H01L21/304
Abstract: PROBLEM TO BE SOLVED: To prepare reliable semiconductor devices by a gas washing method of a semiconductor substrate surface by carrying out ozone exposure accompanying ultraviolet-ray irradiation under reduced pressure, and by effectively removing carbon impurities on the semiconductor substrate surface. SOLUTION: In the substrate pretreatment washing process when semiconductor devices are prepared, a substrate temperature is maintained from the room temperature to 1200 deg.C, and ultraviolet rays are applied onto the substrate surface for carrying out ozone exposure.
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公开(公告)号:JP2001176867A
公开(公告)日:2001-06-29
申请号:JP35822099
申请日:1999-12-17
Applicant: NAT INST OF ADVANCED IND SCIEN , IWATANI INT CORP
Inventor: ICHIMURA SHINGO , KUROKAWA AKIRA , NAKAMURA TAKESHI , KOIKE KUNIHIKO
IPC: H01L21/316
Abstract: PROBLEM TO BE SOLVED: To provide a method for forming a silicon oxide film, in an atmosphere at low temperature in the range from an ambient temperature to 600 deg.C. SOLUTION: On forming the silicon oxide film by acting an ozone gas on a silicon substrate, the ozone gas of 15 to 30 vol.% under a depressed atmosphere is activated on the silicon substrate at a temperature equal to or below 600 deg.C.
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公开(公告)号:JP2001304756A
公开(公告)日:2001-10-31
申请号:JP2000118889
申请日:2000-04-20
Inventor: ICHIMURA SHINGO , NONAKA HIDEHIKO , KUROKAWA AKIRA , MURAKAMI HIROSHI , NISHIGUCHI TETSUYA , MIYAMOTO MASAHARU , MORIKAWA YOSHIKI , OISHI KAZUSHIRO , HANAKURA MITSURU
Abstract: PROBLEM TO BE SOLVED: To accumulate liquefied ozone of a high concentration. SOLUTION: A cold tray 2a of the same constitution as a liquefied ozone generator 2 is provided in a flow path between a fine particle removing filter 7 and a flow control valve 8. The cold trap 2a is cooled by means of a trap chamber 29, a freezer 33, a cold head 32 and a metal block 31 for cooling. The metal block 31 is controlled by a temperature controller 34 comprising a temperature sensor and a heater, and the freezer 33 is controlled by a compressor. An ozone-containing oxygen gas is introduced into a trap chamber 29 from the filter 7. The freezer 33 and the controller 34 set the temperature of the chamber 29 higher than the temperature of an ozone chamber 9. Thus, the trap chamber 29 liquefies or solidifies an impurity gas of comparatively higher temperature than zone to be liquefied.
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公开(公告)号:JP2001304754A
公开(公告)日:2001-10-31
申请号:JP2000118886
申请日:2000-04-20
Inventor: ICHIMURA SHINGO , KUROKAWA AKIRA , KAWADA MASAKUNI , MORIKAWA YOSHIKI , MIYAMOTO MASAHARU , OISHI KAZUSHIRO , NISHIGUCHI TETSUYA , HANAKURA MITSURU
Abstract: PROBLEM TO BE SOLVED: To provide a liquefied ozone generator in which deformation and breakage are prevented from occurring in a refrigeration means connected to an ozone chamber through a cooling metal block, in case of ozone explosion in the ozone chamber. SOLUTION: A metal cooling block is provided in connection with at least the bottom face of the ozone chamber, the metal block is thermally connected to the cooling means through a buffer means formed of a member of a high heat conductivity and a buffering action.
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公开(公告)号:JP2001139310A
公开(公告)日:2001-05-22
申请号:JP31803599
申请日:1999-11-09
Inventor: NONAKA HIDEHIKO , KUROKAWA AKIRA , OISHI KAZUSHIRO , MIYAMOTO MASAHARU , MORIKAWA YOSHIKI , NISHIGUCHI TETSUYA
Abstract: PROBLEM TO BE SOLVED: To safely and efficiently take out high concentration ozone gas from liquefied ozone by locally heating the liquefied ozone by laser beam. SOLUTION: This ozone generating device is composed of a refrigerator 11 for cooling ozone and an ozone chamber 12 of a vessel tube for storing the liquefied ozone, and has a structure that the bottom part of the ozone chamber 12 is brought into contact with a cold head 13 of the refrigerator 11 to be cooled to a prescribed temperature, and a heat insulating material is inserted into a gap between the ozone chamber 12 and an outside vessel 14 to prevent the inflow of heat by evacuating. A view port 30 and a reflection mirror 31 composed of a prism or the like are attached to the upper part of the ozone chamber 12 and a laser beam irradiation device 32 is mounted outside the view port 13. The liquid surface of the liquefied ozone 24 is irradiated through the reflection mirror 31 from the view port 30 with the laser beam emitted from the lamer beam irradiation device 32.
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公开(公告)号:JP2001139309A
公开(公告)日:2001-05-22
申请号:JP31803399
申请日:1999-11-09
Inventor: KUROKAWA AKIRA , KAWADA MASAKUNI , ICHIMURA SHINGO , MURAKAMI HIROSHI , MORIKAWA YOSHIKI , MIYAMOTO MASAHARU , OISHI KAZUSHIRO , NISHIGUCHI TETSUYA , HANAKURA MITSURU
Abstract: PROBLEM TO BE SOLVED: To generate liquefied ozone in practical level for example, even in a field such as the application to a semiconductor wafer process by improving the liquefying rate of ozone. SOLUTION: The liquefying rate of ozone is improved by controlling an ozone-containing oxygen gas introduced into an ozone chamber to adjust the inside pressure of the ozone chamber to 53-100 hPa and cooling the inside of the ozone chamber by using a metallic block for cooling.
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公开(公告)号:JP2001133142A
公开(公告)日:2001-05-18
申请号:JP31803799
申请日:1999-11-09
Inventor: KUROKAWA AKIRA , KAWADA MASAKUNI , ICHIMURA SHINGO , MURAKAMI HIROSHI , NISHIGUCHI TETSUYA , MIYAMOTO MASAHARU , MORIKAWA YOSHIKI , OISHI KAZUSHIRO , HANAKURA MITSURU
Abstract: PROBLEM TO BE SOLVED: To improve the liquefying capacity of a liquid ozone manufacturing device by improving the heat-exchanging capacity of the device. SOLUTION: A cup 29 is set up on the bottom of an ozone chamber 9 in a turned-over state. The front end of an ozone-containing oxygen gas introducing pipe 25 is inserted into and connected to the bottom section of the cup 29. The cup 29 has the hole 30 into which the pipe 25 is inserted and a plurality of small holes 31 on its outer peripheral wall surface. The cup 29 is made of such a metallic material as aluminum, etc., which is not damaged by liquid ozone.
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公开(公告)号:JP2001133141A
公开(公告)日:2001-05-18
申请号:JP31803699
申请日:1999-11-09
Inventor: KUROKAWA AKIRA , KAWADA MASAKUNI , ICHIMURA SHINGO , HANAKURA MITSURU , MIYAMOTO MASAHARU , MORIKAWA YOSHIKI , OISHI KAZUSHIRO , NISHIGUCHI TETSUYA
Abstract: PROBLEM TO BE SOLVED: To increase the liquid ozone generating and storing capacities of a liquid ozone manufacturing device while the safety with respect to the explosion of liquid ozone is secured. SOLUTION: An ozone-containing oxygen gas is distributed to divided chambers 9a-9c through a valve 8 and the chambers 9a-9c generate and store liquid ozone. A left mixed gas which is not used for the generation of the liquid ozone is discharged through another valve 10. At the time of utilizing the generated liquid ozone as a high-concentration ozone gas, the liquid ozone is vaporized by raising the controlled temperature of a metallic block 28 for cooling by closing the valves 8 and 10 and opening a valve 15.
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