METHOD FOR FORMING CARBON NANOTUBE-DISPERSED FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    1.
    发明申请
    METHOD FOR FORMING CARBON NANOTUBE-DISPERSED FILM AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    制备碳纳米管分散膜的方法和制造半导体器件的方法

    公开(公告)号:WO2009093698A4

    公开(公告)日:2009-12-10

    申请号:PCT/JP2009051092

    申请日:2009-01-23

    Inventor: NARITA KAORU

    Abstract: A method for forming a uniform and dense carbon nanotube-dispersed film irrespective of the characteristics of the carbon nanotube-dispersed liquid and the type of substrate, and a method for manufacturing a semiconductor device having excellent electrical characteristics with less variation in characteristics are provided. The method for forming the carbon nanotube-dispersed film includes steps of coating a substrate (110) with a carbon nanotube-dispersed liquid containing carbon nanotubes (1101) dispersed in a solvent, cooling droplets (102) of the carbon nanotube-dispersed liquid to increase the viscosity of the solvent, evaporating the solvent to uniformly precipitate the carbon nanotubes (1101) and form a carbon nanotube coating film (1012), forming, on the carbon nanotube coating film (1012), a coating film of a carbon nanotube-dispersed liquid (1013) with higher carbon nanotube concentration, and evaporating the solvent from the coating film of carbon nanotube-dispersed liquid (1013) to form a film having dispersed carbon nanotubes (1022).

    Abstract translation: 提供了形成均匀且致密的碳纳米管分散膜的方法,而不管碳纳米管分散液体的特性和基板的类型如何,以及具有优异的电特性,特性变化小的半导体器件的制造方法。 形成碳纳米管分散膜的方法包括以下步骤:用分散在溶剂中的含有碳纳米管(1101)的碳纳米管分散液涂布基板(110),将碳纳米管分散液体的液滴(102)冷却至 提高溶剂的粘度,蒸发溶剂以使碳纳米管(1101)均匀沉淀并形成碳纳米管涂膜(1012),在碳纳米管涂膜(1012)上形成碳纳米管 - 具有较高碳纳米管浓度的分散液(1013),并从碳纳米管分散液(1013)的涂膜蒸发溶剂,形成具有分散的碳纳米管(1022)的膜。

    CRUSHED ICE TRANSPORTING DEVICE
    3.
    发明专利

    公开(公告)号:JPS63288821A

    公开(公告)日:1988-11-25

    申请号:JP11994687

    申请日:1987-05-15

    Abstract: PURPOSE:To obtain a transporting device for transporting crushed ice continuously to a fish tank by providing a crushed ice discharger having vanes rotatable in a horizontal plane to a storage tank. CONSTITUTION:A tank 30 for storing crushed ice temporarily is made cylindrical. Consequently, bridging phenomenon of crushed ice occurs scarcely on the bottom wall 46 of the storage tank. A discharger 45 is arranged at the bottom wall 46 side of the storage tank 30 in order to scrape crushed ice stored on the bottom wall 46 and feed positively to discharge ports 50, 51. Consequently, bridging phenomenon of crushed ice does not occur on the bottom wall 46 of the storage tank. Crushed ice fed to the discharge ports 50, 51 is further fed to crushed ice pressure feed pipes 64, 64 by means of rotary valves 52, 53 then carried to a specific fish tank by means of compressed air. Since bridging phenomenon does not occur on the bottom wall 46 of the storage tank, negative pressure is produced in the storage tank 30 when crushed ice is carried in thus moving the crushed ice smoothly from the storage tank 30 to the rotary valves 52, 53.

    4.
    发明专利
    未知

    公开(公告)号:DE69422220T2

    公开(公告)日:2000-09-07

    申请号:DE69422220

    申请日:1994-05-25

    Applicant: NEC CORP

    Inventor: NARITA KAORU

    Abstract: In an output circuit having first and second MOS transistors (Q1, Q2) in series between a first power supply line (Vcc, Vcc1) and a second power supply line (Vss1, Vss), and a third MOS transistor (Q3), the gates of the first and second transistors are connected to first and second input nodes, respectively, and an output node is provided between the first and second MOS transistors. The third MOS transistor is connected between one of the input nodes and the output node. The gate of the third MOS transistor is connected to a third power supply line (Vss2, Vcc2).

    5.
    发明专利
    未知

    公开(公告)号:DE69106231T2

    公开(公告)日:1995-08-10

    申请号:DE69106231

    申请日:1991-06-18

    Applicant: NEC CORP

    Inventor: NARITA KAORU

    Abstract: A memory cell comprising a MOSFET formed on a principle surface of a semiconductor substrate and an information storage capacitor having a storage electrode formed in or on the substrate so as to contact with a drain region of the MOSFET, and a capacitor electrode formed adjacent to the storage electrode with a capacitor insulator film being sandwiched between the storage electrode and the capacitor electrode. The storage electrode is connected to the drain region of the MOSFET through a thin barrier layer which is formed between the drain region and the storage electrode region so as to prevent impurities in the storage electrode from being diffused into the drain region.

    6.
    发明专利
    未知

    公开(公告)号:DE69623509T2

    公开(公告)日:2003-05-28

    申请号:DE69623509

    申请日:1996-01-11

    Applicant: NEC CORP

    Inventor: NARITA KAORU

    Abstract: An input terminal and an input protective resistor of an N-type diffusion layer connected thereto are provided on a P-type semiconductor substrate. First and second N-type MOS transistors for internal circuit are connected to a grounding wiring at respective source diffusion layers. The first MOS transistor is located at closer distance from the input protective resister than the second MOS transistor. The source diffusion layer of the first MOS transistor and the grounding wiring are connected via a high melting point metal layer wiring, such as a tungsten silicide or so forth to increase a resistance to improve electrostatic breakdown potential. Accordingly, the distance between the input protective resistor and the first MOS transistor can be made smaller to eliminate dead space around the input protective resistor to enable reduction of a chip area.

    10.
    发明专利
    未知

    公开(公告)号:DE69623509D1

    公开(公告)日:2002-10-17

    申请号:DE69623509

    申请日:1996-01-11

    Applicant: NEC CORP

    Inventor: NARITA KAORU

    Abstract: An input terminal and an input protective resistor of an N-type diffusion layer connected thereto are provided on a P-type semiconductor substrate. First and second N-type MOS transistors for internal circuit are connected to a grounding wiring at respective source diffusion layers. The first MOS transistor is located at closer distance from the input protective resister than the second MOS transistor. The source diffusion layer of the first MOS transistor and the grounding wiring are connected via a high melting point metal layer wiring, such as a tungsten silicide or so forth to increase a resistance to improve electrostatic breakdown potential. Accordingly, the distance between the input protective resistor and the first MOS transistor can be made smaller to eliminate dead space around the input protective resistor to enable reduction of a chip area.

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