HIGH PERFORMANCE SPECTROMETER DEVICE WITH PARALLEL INTERFEROMETERS
    2.
    发明申请
    HIGH PERFORMANCE SPECTROMETER DEVICE WITH PARALLEL INTERFEROMETERS 审中-公开
    具有平行干涉仪的高性能光谱仪器件

    公开(公告)号:WO2016153599A3

    公开(公告)日:2016-11-10

    申请号:PCT/US2016015819

    申请日:2016-01-29

    Abstract: A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.

    Abstract translation: 具有增加的光学吞吐量和/或光谱分辨率的光谱仪包括并联耦合的多个干涉仪。 光分路器将源光束分成多个输入光束,并将每个输入光束引导到多个干涉仪中的相应一个。 一个或多个检测器被光学耦合以从多个干涉仪中的每一个接收相应的输出,并且被配置为检测作为输出结果产生的干涉图。

    LONG TRAVEL RANGE MEMS ACTUATOR
    5.
    发明申请
    LONG TRAVEL RANGE MEMS ACTUATOR 审中-公开
    长行程范围MEMS致动器

    公开(公告)号:WO2010121121A2

    公开(公告)日:2010-10-21

    申请号:PCT/US2010031380

    申请日:2010-04-16

    Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

    Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件,每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物,其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配,并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时,第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。

    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS

    公开(公告)号:SG175725A1

    公开(公告)日:2011-12-29

    申请号:SG2011075298

    申请日:2010-04-16

    Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed mirror and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed mirror is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.

    LONG TRAVEL RANGE MEMS ACTUATOR
    7.
    发明专利

    公开(公告)号:SG175240A1

    公开(公告)日:2011-11-28

    申请号:SG2011075314

    申请日:2010-04-16

    Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

    COMPENSATED MEMS FTIR SPECTROMETER ARCHITECTURE

    公开(公告)号:SG179018A1

    公开(公告)日:2012-04-27

    申请号:SG2012015855

    申请日:2010-09-08

    Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

Patent Agency Ranking