Stripper solution for cured positive photoresists

    公开(公告)号:DE3821231A1

    公开(公告)日:1989-01-05

    申请号:DE3821231

    申请日:1988-06-23

    Applicant: SIEMENS AG

    Abstract: The invention relates to a stripper solution for cured positive photoresists and to a process for the use thereof. The solution contains a) 20 to 80 per cent by volume of a lower water-soluble alcohol, b) 10 to 50 per cent by volume of one or more glycols or glycol ethers and c) deionised water in such a proportion that the total of the proportions a), b) and c) gives 100 per cent by volume, and also d) an addition of a basic alkali-free component or an acidic component in a proportion of 1 to 4 parts per thousand. In a bath filled with this stripper solution, even stressed positive photoresist layers can be detached, for example from semiconductor substrates, with ultrasonic assistance without problems and free of residue. Aluminium layers or polyimide layers located below the photoresist layer remain intact, and also there is no contamination.

    5.
    发明专利
    未知

    公开(公告)号:FI853602A0

    公开(公告)日:1985-09-19

    申请号:FI853602

    申请日:1985-09-19

    Applicant: SIEMENS AG

    Abstract: A method for producing a copper platform on integrated circuits formed on a semiconductor wafer wherein an aluminum layer is back-sputtered over the circuits to provide contact surfaces thereon, followed by sputtering on successive layers of titanium and copper on the aluminum layer. A copper platform is electrolytically built up above the aluminum layer and thereafter the copper layer is etched away. The copper platform is then metallized by electroless deposition, and finally the titanium layer is etched away.

    6.
    发明专利
    未知

    公开(公告)号:CH603298A5

    公开(公告)日:1978-08-15

    申请号:CH422776

    申请日:1976-04-05

    Applicant: SIEMENS AG

    Abstract: 1484542 Cleaning and activating circuit boards for soldering SIEMENS A G 4 May 1976 [11 July 1975] 18120/76 Heading C7U [Also in Division B3] The solderability of electric circuit boards with Cu or Cu alloy conductor paths is improved by cleaning the boards in an aqueous solution containing a non ionic surfactant and an organic acid and then activating in an aqueous solution containing potassium peroxy disulphate (persulphate) and an acid. The preferred cleaning solution contains 20-100g/l of an hydroxyethylated alkyl phenol and 15-80g/l of an organic acid such as formic acid. The activating solution is preferably saturated with the potassium peroxydisulphate the pH adjusted to 2-4 with H 2 SO 4 and stabilized with phosphoric acid. The boards may be rinsed with water between treatments and also retreated in the cleaning solution after treating in the activating solution. Colophony or soldering lacquers may then be applied and dried.

    8.
    发明专利
    未知

    公开(公告)号:DE3579282D1

    公开(公告)日:1990-09-27

    申请号:DE3579282

    申请日:1985-08-23

    Applicant: SIEMENS AG

    Abstract: A method for producing a copper platform on integrated circuits formed on a semiconductor wafer wherein an aluminum layer is back-sputtered over the circuits to provide contact surfaces thereon, followed by sputtering on successive layers of titanium and copper on the aluminum layer. A copper platform is electrolytically built up above the aluminum layer and thereafter the copper layer is etched away. The copper platform is then metallized by electroless deposition, and finally the titanium layer is etched away.

    9.
    发明专利
    未知

    公开(公告)号:DE3237394A1

    公开(公告)日:1984-04-12

    申请号:DE3237394

    申请日:1982-10-08

    Applicant: SIEMENS AG

    Abstract: A chemical gilding bath is formulated on the basis of an alkaline, aqueous solution of an alkali gold cyanide complex and has a reducing agent and a stabilizing agent therein. The reducing agent is an organic compound containing at least one enol group within the molecular structure thereof, such as ascorbic acid or salts thereof. The pH value of the bath is adjusted by a buffer solution so as to range between about 7.5 to 12 and preferably is about 8.

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