ACOUSTIC TRANSDUCER, AND MICROPHONE USING THE ACOUSTIC TRANSDUCER
    2.
    发明申请
    ACOUSTIC TRANSDUCER, AND MICROPHONE USING THE ACOUSTIC TRANSDUCER 审中-公开
    声音传感器和使用声学传感器的麦克风

    公开(公告)号:WO2011148778A8

    公开(公告)日:2012-02-23

    申请号:PCT/JP2011060714

    申请日:2011-05-10

    CPC classification number: H04R3/00 H04R19/016

    Abstract: In an acoustic sensor (11), a vibrating membrane (22) and a fixed membrane (23) are formed on the upper face of a semiconductor substrate, and an acoustic wave is detected by the change of capacitance between a vibration electrode (22a) of the vibrating membrane (22) and a fixed electrode (23a) of the fixed membrane (23). The fixed membrane(23) is provided with a plurality of sound holes (32) for delivering the acoustic wave from the outside to the vibrating membrane (22), and the fixed electrode (23a) is formed so that the boundary of the edge portion (40) does not intersect the sound holes (32).

    Abstract translation: 在声学传感器(11)中,在半导体衬底的上表面上形成振动膜(22)和固定膜(23),并且通过振动电极(22a) 的振动膜(22)和固定膜(23)的固定电极(23a)。 固定膜(23)设有多个用于将声波从外部输送到振动膜(22)的声孔(32),并且固定电极(23a)形成为使得边缘部分 (40)不与声孔(32)相交。

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