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公开(公告)号：JP2000082207A
公开(公告)日：2000-03-21
申请号：JP20756799
申请日：1999-07-22
Applicant: ST MICROELECTRONICS SRL
Inventor： CINI DARIO , VIGNA BENEDETTO
Abstract: PROBLEM TO BE SOLVED: To reduce the occupancy area of a micro-actuator and to prevent the weight increase in a suspension unit in the case of the using it to start a read/write head. SOLUTION: This integrated device is provided with a micro-actuator 1' containing an electrostatic coupled external stator and an internal rotor, the internal rotor contains spring like mess 6 and plural movable arms prolonging from it in the radial direction, and the external stator contains plural first fixed arms prolonging for the spring like mass 6 in the radial direction and facing oppositely to the movable arms. Then, the micro-actuator 1' is connected to a drive means 30 for fixed arms and is connected to a measurement means 32 for measuring the position of the internal rotor in relation with the external stator and a capacitive non-connection means arranged between the drive means 30 and the measurement means 32 contains at least one of the fixed arm and the movable arm.
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公开(公告)号：JP2001133478A
公开(公告)日：2001-05-18
申请号：JP2000274207
申请日：2000-09-08
Applicant: ST MICROELECTRONICS SRL
Inventor： VIGNA BENEDETTO , GOLA ALBERTO , ZERBINI SARAH , CINI DARIO
Abstract: PROBLEM TO BE SOLVED: To provide a capacitive sensor and a method for correcting the position offset of the capacitive inertia sensor. SOLUTION: An inertial sensor (1') of this invention is made of semiconductive material, and contains a stator (2) and a rotor (4) connected to each other electrostatically, and a microactuator (24) which is made of semiconductive material also, connected to the rotor 4, and controlled so as to move the rotor 4 itself and correct the position offset of the rotor (4).
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公开(公告)号：DE69831659D1
公开(公告)日：2006-02-02
申请号：DE69831659
申请日：1998-07-22
Applicant: ST MICROELECTRONICS SRL
Inventor： CINI DARIO , VIGNA BENEDETTO
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