公开(公告)号：IT201700124320A1

公开(公告)日：2019-05-01

申请号：IT201700124320

申请日：2017-10-31

Applicant: ST MICROELECTRONICS SRL ,  MILANO POLITECNICO

Inventor： VALZASINA CARLO ,  GATTERE GABRIELE ,  TOCCHIO ALESSANDRO ,  LANGFELDER GIACOMO

IPC: H03B5/04 ,  G01R23/09 ,  H03B5/30 ,  H03L1/02

公开(公告)号：IT201600132408A1

公开(公告)日：2018-06-29

申请号：IT201600132408

申请日：2016-12-29

Applicant: MILANO POLITECNICO ,  ST MICROELECTRONICS SRL

Inventor： LAGHI GIACOMO ,  LANGFELDER GIACOMO ,  GATTERE GABRIELE ,  TOCCHIO ALESSANDRO ,  PACI DARIO

IPC: G01R33/028

公开(公告)号：IT201700097531A1

公开(公告)日：2019-03-02

申请号：IT201700097531

申请日：2017-08-30

Applicant: ST MICROELECTRONICS SRL ,  MILANO POLITECNICO

Inventor： TOCCHIO ALESSANDRO ,  RIZZINI FRANCESCO ,  VALZASINA CARLO ,  LANGFELDER GIACOMO ,  MARRA CRISTIANO ROCCO

IPC: G01P15/097 ,  G01P15/18

公开(公告)号：ITTO20130653A1

公开(公告)日：2015-02-01

申请号：ITTO20130653

申请日：2013-07-31

Applicant: MILANO POLITECNICO ,  ST MICROELECTRONICS SRL

Inventor： LANGFELDER GIACOMO ,  PACI DARIO ,  TOCCHIO ALESSANDRO

公开(公告)号：IT201600106928A1

公开(公告)日：2018-04-24

申请号：IT201600106928

申请日：2016-10-24

Applicant: ST MICROELECTRONICS SRL ,  MILANO POLITECNICO

Inventor： TOCCHIO ALESSANDRO ,  FALORNI LUCA GIUSEPPE ,  COMI CLAUDIA ,  ZEGA VALENTINA

IPC: G01C19/574

公开(公告)号：ITUA20162172A1

公开(公告)日：2017-10-01

申请号：ITUA20162172

申请日：2016-03-31

Applicant: ST MICROELECTRONICS SRL ,  MILANO POLITECNICO

Inventor： TOCCHIO ALESSANDRO ,  RIZZINI FRANCESCO ,  VALZASINA CARLO ,  LANGFELDER GIACOMO

IPC: G01P15/125

公开(公告)号：ITUA20162173A1

公开(公告)日：2017-10-01

申请号：ITUA20162173

申请日：2016-03-31

Applicant: ST MICROELECTRONICS SRL

Inventor： TOCCHIO ALESSANDRO ,  GATTERE GABRIELE

IPC: G01P15/125 ,  G01P15/08

公开(公告)号：ITTO20130237A1

公开(公告)日：2014-09-23

申请号：ITTO20130237

申请日：2013-03-22

Applicant: ST MICROELECTRONICS SRL

Inventor： BALDASARRE LEONARDO ,  TOCCHIO ALESSANDRO ,  ZERBINI SARAH

公开(公告)号：IT201700057094A1

公开(公告)日：2018-11-25

申请号：IT201700057094

申请日：2017-05-25

Applicant: ST MICROELECTRONICS SRL

Inventor： GATTERE GABRIELE ,  CORSO LORENZO ,  TOCCHIO ALESSANDRO ,  VALZASINA CARLO

公开(公告)号：ITUB20154667A1

公开(公告)日：2017-04-14

申请号：ITUB20154667

申请日：2015-10-14

Applicant: ST MICROELECTRONICS SRL

Inventor： TOCCHIO ALESSANDRO ,  RIZZINI FRANCESCO ,  GUERINONI LUCA

IPC: G01P15/125 ,  G01C19/5755 ,  G01P15/08

Abstract: A MEMS sensor device (41) provided with a sensing structure (20), having: a substrate (2) with a top surface (2a) extending in a horizontal plane (xy); an inertial mass (30), suspended over the substrate (2); elastic coupling elements (32), elastically connected to the inertial mass (30) so as to enable inertial movement thereof with respect to the substrate (2) as a function of a quantity to be detected along a sensing axis (x) belonging to the horizontal plane (xy); and sensing electrodes (35a, 35b), capacitively coupled to the inertial mass (30) so as to form at least one sensing capacitor (C 1 , C 2 ), a value of capacitance of which is indicative of the quantity to be detected. The sensing structure (20) moreover has a suspension structure (21), to which the sensing electrodes (35a, 35b) are rigidly coupled, and to which the inertial mass (30) is elastically coupled through the elastic coupling elements (32); the suspension structure (21) is connected to an anchorage structure (23), fixed with respect to the substrate (2), by means of elastic suspension elements (28).