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公开(公告)号:EP1676343A4
公开(公告)日:2008-02-06
申请号:EP04796304
申请日:2004-10-22
Applicant: STC UNM , INNOLUME ACQUISITION INC
Inventor: GRAY ALLEN L , STINTZ ANDREAS , MALLOY KEVIN J , LESTER LUKE F , VARANGIS PETROS M
IPC: H01L29/06 , H01L21/00 , H01L21/20 , H01L29/24 , H01S20060101 , H01S5/00 , H01S5/22 , H01S5/34 , H01S5/343
CPC classification number: B82Y10/00 , B82Y20/00 , H01L21/02392 , H01L21/02433 , H01L21/02463 , H01L21/02505 , H01L21/02513 , H01L21/02546 , H01S5/2201 , H01S5/3412 , H01S5/34366 , H01S2304/02
Abstract: Symmetric quantum dots (320) are embedded in quantum wells (330). The symmetry is achieved by using slightly off-axis substrates (302) and/or overpressure during the quantum dot growth. The quantum dot structure can be used in a variety of applications, including semiconductor lasers.
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公开(公告)号:JP2007318165A
公开(公告)日:2007-12-06
申请号:JP2007187696
申请日:2007-07-18
Applicant: Stc Unm , エスティーシー. ユーエヌエムStc.Unm
Inventor: STINTZ ANDREAS , VARANGIS PETROS N , MALLOY KEVIN J , LESTER LUKE F , NEWELL TIMOTHY C , LI HUA
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y20/00 , H01S5/1228 , H01S5/143 , H01S5/3412 , H01S5/4031 , H01S5/4043 , H01S5/4087
Abstract: PROBLEM TO BE SOLVED: To provide a technology for forming self-assembled quantum dots having desirable optical characteristics. SOLUTION: The quantum dots are self-assembled InAs quantum dots 406 formed in InGaAs quantum wells 404 that are grown on a GaAs substrate by molecular beam epitaxy. A first AlGaAs or GaAs barrier layer 402 is grown. A first InGaAs well layer 404 is grown on the first barrier layer. A sufficient monolayer thickness of InAs is grown on the InGaAs, to form self-assembled islands. A second InGaAs well layer 404 is grown over the InAs islands to embed the quantum dots. A second AlGaAs or GaAs barrier layer 402 is then grown to complete the quantum well. Optical gain characteristics of the quantum well layers are influenced by the compositional uniformity of surrounding layers, the dot size distribution, the dot density, and the number of layers of the dots that can be placed in an active region without exceeding a critical thickness for forming dislocation. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题:提供一种用于形成具有期望光学特性的自组装量子点的技术。 解决方案:量子点是通过分子束外延在GaAs衬底上生长的InGaAs量子阱404中形成的自组装InAs量子点406。 生长第一AlGaAs或GaAs阻挡层402。 在第一阻挡层上生长第一InGaAs阱层404。 在InGaAs上生长足够的单层厚度的InAs,以形成自组装岛。 在InAs岛上生长第二InGaAs阱层404以嵌入量子点。 然后生长第二AlGaAs或GaAs阻挡层402以完成量子阱。 量子阱层的光学增益特性受周围层的组成均匀性,点尺寸分布,点密度和可放置在有源区中的点的层数而不超过形成的临界厚度的影响 错位。 版权所有(C)2008,JPO&INPIT
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公开(公告)号:JP2007116200A
公开(公告)日:2007-05-10
申请号:JP2007023583
申请日:2007-02-01
Applicant: Stc Unm , エスティーシー. ユーエヌエムStc.Unm
Inventor: STINTZ ANDREAS , VARANGIS PETROS N , MALLOY KEVIN J , LESTER LUKE F , NEWELL TIMOTHY C , LI HUA
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y20/00 , H01S5/1228 , H01S5/143 , H01S5/183 , H01S5/3201 , H01S5/34 , H01S5/341 , H01S5/3412 , H01S5/4031 , H01S5/4043 , H01S5/4087
Abstract: PROBLEM TO BE SOLVED: To provide an improved quantum dot structure for opto-electronics application. SOLUTION: A semiconductor active region for providing optical gain includes quantum wells 280, 285 that are disposed between two barrier layers 290, 295 and have substantial, planar well layers having well thickness; and a plurality of quantum dots 205 buried in the quantum wells, wherein each of the quantum dots has a thickness smaller than the well thickness, and has a ratio of length to width being at least approximately 3 in a plane parallel to the planar well layer. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题:为光电应用提供改进的量子点结构。 解决方案:用于提供光学增益的半导体有源区包括设置在两个阻挡层290,295之间的量子阱280,285,并具有具有良好厚度的基本上平坦的阱层; 以及埋在量子阱中的多个量子点205,其中每个量子点具有小于阱厚度的厚度,并且在与平面阱层平行的平面中具有至少约3的比率 。 版权所有(C)2007,JPO&INPIT
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公开(公告)号:JP2009117856A
公开(公告)日:2009-05-28
申请号:JP2008326728
申请日:2008-12-23
Applicant: Stc Unm , エスティーシー. ユーエヌエムStc.Unm
Inventor: STINTZ ANDREAS , VARANGIS PETROS N , MALLOY KEVIN J , LESTER LUKE F , NEWELL TIMOTHY C , LI HUA
IPC: H01S5/10 , H01S5/343 , H01S5/12 , H01S5/125 , H01S5/14 , H01S5/183 , H01S5/22 , H01S5/34 , H01S5/40
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y20/00 , H01S5/1228 , H01S5/143 , H01S5/3412 , H01S5/4031 , H01S5/4043 , H01S5/4087
Abstract: PROBLEM TO BE SOLVED: To actualize an optical gain spectrum continued over a wavelength range larger than 75 nanometers depending on a semiconductor optical waveguide and a threshold driving current. SOLUTION: This quantum dot laser includes at least one quantum dot layer consisting of a quantum dot group optically coupled to the optical waveguide with at least two nonuniformly expanding optical transition energy sequences, and at least one quantum well for actualizing the carrier confinement of a current injected into the quantum dot layer. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题:根据半导体光波导和阈值驱动电流,实现在大于75纳米的波长范围上继续的光增益谱。 解决方案:该量子点激光器包括至少一个量子点层,其由光学耦合到具有至少两个不均匀扩展的光跃迁能量序列的光波导的量子点组,以及用于实现载流子限制的至少一个量子阱 的电流注入量子点层。 版权所有(C)2009,JPO&INPIT
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公开(公告)号:WO02071562A9
公开(公告)日:2004-04-22
申请号:PCT/US0206221
申请日:2002-03-01
Applicant: STC UNM
Inventor: HUANG XIAODONG , STINTZ ANDREAS , MALLOY KEVIN J , LIU GUANGTIAN , LESTER LUKE , CHENG JULIAN
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y20/00 , H01S5/0421 , H01S5/0425 , H01S5/18311 , H01S5/1833 , H01S5/18341 , H01S5/1835 , H01S5/18358 , H01S5/18372 , H01S5/18383 , H01S5/18397 , H01S5/305 , H01S5/3054 , H01S5/3412 , Y10S977/951
Abstract: A quantum dot vertical cavity surface-emitting laser has a low threshold gain. Top and bottom mirrors have a low mirror loss, with at least one of the mirrors being laterally oxidized to form semiconductor/oxide mirror pairs. In one embodiment, mode control layers reduce the optical field intensity in contact layers, reducing optical absorption. In one embodiment, delamination features are included to inhibit the tendency of laterally oxidized mirrors form delaminating.
Abstract translation: 量子点垂直腔面发射激光器具有低阈值增益。 顶部和底部反射镜具有低的反射镜损耗,其中至少一个反射镜被横向氧化以形成半导体/氧化物反射镜对。 在一个实施例中,模式控制层减少接触层中的光场强度,减少光吸收。 在一个实施例中,包括分层特征以抑制横向氧化镜形成分层的倾向。
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公开(公告)号:WO02058200A9
公开(公告)日:2003-05-30
申请号:PCT/US0131256
申请日:2001-10-05
Applicant: STC UNM
Inventor: STINTZ ANDREAS , VARANGIS PETROS N , MALLOY KEVIN J , LESTER LUKE F , NEWELL TIMOTHY C , LI HUA
IPC: H01S5/343 , H01S5/12 , H01S5/125 , H01S5/14 , H01S5/183 , H01S5/22 , H01S5/34 , H01S5/40 , H01S5/00
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y20/00 , H01S5/1228 , H01S5/143 , H01S5/3412 , H01S5/4031 , H01S5/4043 , H01S5/4087
Abstract: A quantum dot active region is disclosed in which quantum dot layers are formed using a self-assembled growth technique. In one embodiment, growth parameters are selected to control the dot density and dot size distribution to achieve desired optical gain spectrum characteristics. In one embodiment, the distribution in dot size and the sequence of optical transition energy values associated with the quantum confined states of the dots are selected to facilitate forming a continuous optical gain spectrum over an extended wavelength range. In another embodiment, the optical gain is selected to increase the saturated ground state gain for wavelengths of 1260 nanometers and greater. In other embodiments, the quantum dots are used as the active region in laser devices, including tunable lasers and monolithic multi-wavelength laser arrays.
Abstract translation: 公开了量子点活性区域,其中量子点层使用自组装生长技术形成。 在一个实施例中,选择生长参数以控制点密度和点尺寸分布以实现期望的光学增益谱特性。 在一个实施例中,选择点尺寸分布和与点的量子限制状态相关联的光学跃迁能量值的顺序以有助于在扩展的波长范围上形成连续的光增益谱。 在另一个实施例中,选择光增益以增加1260纳米和更大波长的饱和基态增益。 在其他实施例中,量子点被用作激光器件中的有源区域,包括可调谐激光器和单片多波长激光器阵列。
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公开(公告)号:CA2424468A1
公开(公告)日:2002-03-28
申请号:CA2424468
申请日:2001-09-21
Applicant: STC UNM
Inventor: LI HUA , NEWELL TIMOTHY C , VARANGIS PETROS N , STINTZ ANDREAS , LESTER LUKE F , MALLOY KEVIN J
Abstract: Quantum dot active region structures are disclosed. In a preferred embodimen t, the distribution in dot size and the sequence of optical transition energy values associated with the quantum confined states of the dots are selected to facilitate forming a continuous optical gain spectrum over an extended wavelength range. In one embodiment, the quantum dots are self-assembled quantum dots with a length-to-width ratio of at least three along the growth plane. In one embodiment, the quantum dots are formed in quantum wells for improved carrier confinement. In other embodiments, the quantum dots are use d as the active region in laser devices, including tunable lasers and monolith ic multi-wavelength laser arrays.
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公开(公告)号:CA2424468C
公开(公告)日:2008-04-01
申请号:CA2424468
申请日:2001-09-21
Applicant: STC UNM
Inventor: NEWELL TIMOTHY C , STINTZ ANDREAS , LI HUA , MALLOY KEVIN J , LESTER LUKE F , VARANGIS PETROS N
Abstract: Quantum dot active region structures are disclosed. In a preferred embodiment, the distribution in dot size and the sequence of optical transition energy values associated with the quantum confined states of the dots are selected to facilitate forming a continuous optical gain spectrum over an extended wavelength range. In one embodiment, the quantum dots are self-assembled quantum dots with a length-to-width ratio of at least three along the growth plane. In one embodiment, the quantum dots are formed in quantum wells for improved carrier confinement. In other embodiments, the quantum dots are used as the active region in laser devices, including tunable lasers and monolithic multi-wavelength laser arrays.
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公开(公告)号:CA2423782A1
公开(公告)日:2002-07-25
申请号:CA2423782
申请日:2001-10-05
Applicant: STC UNM
Inventor: VARANGIS PETROS N , LI HUA , NEWELL TIMOTHY C , LESTER LUKE F , MALLOY KEVIN J , STINTZ ANDREAS
IPC: H01S5/343 , H01S5/12 , H01S5/125 , H01S5/14 , H01S5/183 , H01S5/22 , H01S5/34 , H01S5/40 , H01S5/00
Abstract: A quantum dot active region is disclosed in which quantum dot layers are formed using a self-assembled growth technique. In one embodiment, growth parameters are selected to control the dot density and dot size distribution to achieve desired optical gain spectrum characteristics. In one embodiment, the distribution in dot size and the sequence of optical transition energy values associated with the quantum confined states of the dots are selected to facilitate forming a continuous optical gain spectrum over an extended wavelength range. In another embodiment, the optical gain is selected to increase the saturated ground state gain for wavelengths of 1260 nanometers and greater. In other embodiments, the quantum dots are used as the active region in laser devices, including tunable lasers and monolithic multi- wavelength laser arrays.
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公开(公告)号:WO2005041366A2
公开(公告)日:2005-05-06
申请号:PCT/US2004035293
申请日:2004-10-22
Applicant: STC UNM , GRAY ALLEN L , STINTZ ANDREAS , MALLOY KEVIN J , LESTER LUKE F , VARANGIS PETROS M
Inventor: GRAY ALLEN L , STINTZ ANDREAS , MALLOY KEVIN J , LESTER LUKE F , VARANGIS PETROS M
CPC classification number: B82Y10/00 , B82Y20/00 , H01L21/02392 , H01L21/02433 , H01L21/02463 , H01L21/02505 , H01L21/02513 , H01L21/02546 , H01S5/2201 , H01S5/3412 , H01S5/34366 , H01S2304/02
Abstract: Symmetric quantum dots are embedded in quantum wells. The symmetry is achieved by using slightly off-axis substrates and/or overpressure during the quantum dot growth. The quantum dot structure can be used in a variety of applications, including semiconductor lasers.
Abstract translation: 对称量子点嵌入在量子阱中。 通过在量子点生长期间使用稍微离轴的衬底和/或超压实现对称性。 量子点结构可用于各种应用,包括半导体激光器。
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