公开(公告)号：US11932529B2

公开(公告)日：2024-03-19

申请号：US16814001

申请日：2020-03-10

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Patrick Ian Oden ,  James Carl Baker ,  Sandra Zheng ,  William C. McDonald

IPC: B81B3/00 ,  G02B26/08 ,  G03F7/00 ,  G03F7/16

CPC classification number: B81B3/001 ,  G02B26/0833 ,  G03F7/0035 ,  G03F7/16 ,  B81B2201/042 ,  B81C2201/0157

Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.

公开(公告)号：US20180290880A1

公开(公告)日：2018-10-11

申请号：US15481704

申请日：2017-04-07

Applicant: Texas Instruments Incorporated

Inventor： Patrick Ian Oden ,  James Carl Baker ,  Sandra Zheng ,  William C. McDonald

IPC: B81B3/00 ,  B81C1/00

Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.

公开(公告)号：US20200207608A1

公开(公告)日：2020-07-02

申请号：US16814001

申请日：2020-03-10

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Patrick Ian Oden ,  James Carl Baker ,  Sandra Zheng ,  William C. McDonald

IPC: B81B3/00 ,  G02B26/08

Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.

公开(公告)号：US10589980B2

公开(公告)日：2020-03-17

申请号：US15481704

申请日：2017-04-07

Applicant: Texas Instruments Incorporated

Inventor： Patrick Ian Oden ,  James Carl Baker ,  Sandra Zheng ,  William C. McDonald

IPC: B81B3/00 ,  G02B26/08

Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.