Sloped electrode element for a torsional spatial light modulator
    1.
    发明授权
    Sloped electrode element for a torsional spatial light modulator 有权
    用于扭转空间光调制器的倾斜电极元件

    公开(公告)号:US09448484B2

    公开(公告)日:2016-09-20

    申请号:US14531877

    申请日:2014-11-03

    CPC classification number: G03F7/36 B81B3/00 G02B26/0841 G03F7/16 G03F7/20

    Abstract: A method of forming a micro-electromechanical systems (MEMS) pixel, such as a DMD-type pixel, by depositing a photoresist spacer layer upon a substrate. The photoresist spacer layer is exposed to a grey-scale lithographic mask to shape an upper surface of the photoresist spacer layer. A control member is formed upon the shaped spacer layer, and has a sloped portion configured to maximize energy density. An image member is configured to be positioned as a function of the control member to form a spatial light modulator (SLM).

    Abstract translation: 通过在衬底上沉积光致抗蚀剂隔离层来形成诸如DMD型像素的微机电系统(MEMS)像素的方法。 将光致抗蚀剂间隔层暴露于灰度级光刻掩模以形成光致抗蚀剂间隔层的上表面。 控制构件形成在成形间隔层上,并且具有被配置为使能量密度最大化的倾斜部分。 图像构件被配置为根据控制构件定位以形成空间光调制器(SLM)。

    ISOLATED PROTRUSION/RECESSION FEATURES IN MICROELECTROMECHANICAL SYSTEMS

    公开(公告)号:US20200207608A1

    公开(公告)日:2020-07-02

    申请号:US16814001

    申请日:2020-03-10

    Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.

    Isolated Protrusion/Recession Features in a Micro Electro Mechanical System

    公开(公告)号:US20180290880A1

    公开(公告)日:2018-10-11

    申请号:US15481704

    申请日:2017-04-07

    Abstract: In described examples, a microelectromechanical system (MEMS) includes a first element and a second element. The first element is mounted on a substrate and has a first contact surface. The second element is mounted on the substrate and has a second contact surface that protrudes from the second element to form an acute contact surface. The first element and/or the second element is/are operable to move in: a first direction, such that the first contact surface comes in contact with the second contact surface; and a second direction, such that the second contact surface separates from the first contact surface.

    SLOPED ELECTRODE ELEMENT FOR A TORSIONAL SPATIAL LIGHT MODULATOR
    10.
    发明申请
    SLOPED ELECTRODE ELEMENT FOR A TORSIONAL SPATIAL LIGHT MODULATOR 有权
    用于扭转空间光调制器的斜面电极元件

    公开(公告)号:US20160124311A1

    公开(公告)日:2016-05-05

    申请号:US14531877

    申请日:2014-11-03

    CPC classification number: G03F7/36 B81B3/00 G02B26/0841 G03F7/16 G03F7/20

    Abstract: A method of forming a micro-electromechanical systems (MEMS) pixel, such as a DMD-type pixel, by depositing a photoresist spacer layer upon a substrate. The photoresist spacer layer is exposed to a grey-scale lithographic mask to shape an upper surface of the photoresist spacer layer. A control member is formed upon the shaped spacer layer, and has a sloped portion configured to maximize energy density. An image member is configured to be positioned as a function of the control member to form a spatial light modulator (SLM).

    Abstract translation: 通过在衬底上沉积光致抗蚀剂隔离层来形成诸如DMD型像素的微机电系统(MEMS)像素的方法。 将光致抗蚀剂间隔层暴露于灰度级光刻掩模以形成光致抗蚀剂间隔层的上表面。 控制构件形成在成形间隔层上,并且具有被配置为使能量密度最大化的倾斜部分。 图像构件被配置为根据控制构件定位以形成空间光调制器(SLM)。

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