公开(公告)号：NL2005080C

公开(公告)日：2012-01-17

申请号：NL2005080

申请日：2010-07-14

Applicant: UNIV DELFT TECH

Inventor： KRUIT PIETER ,  HOOGENBOOM JACOB PIETER ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: H01J37/22 ,  H01J37/256 ,  H01J37/28

CPC classification number: H01J37/22 ,  G01N21/62 ,  G01N2021/625 ,  H01J37/226 ,  H01J37/228 ,  H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/204 ,  H01J2237/2445 ,  H01J2237/2482 ,  H01J2237/2808

公开(公告)号：NL1040131A

公开(公告)日：2014-01-07

申请号：NL1040131

申请日：2013-03-27

Applicant: UNIV DELFT TECH

Inventor： HOOGENBOOM JACOB PIETER ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: G02B21/00 ,  G02B21/33 ,  H01J37/22 ,  H01J37/28

公开(公告)号：NL1040131C2

公开(公告)日：2014-01-28

申请号：NL1040131

申请日：2013-03-27

Applicant: UNIV DELFT TECH

Inventor： HOOGENBOOM JACOB PIETER ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: G02B21/00 ,  G02B21/33 ,  H01J37/22 ,  H01J37/28

公开(公告)号：NL1039512C

公开(公告)日：2013-10-03

申请号：NL1039512

申请日：2012-04-02

Applicant: UNIV DELFT TECH

Inventor： HOOGENBOOM JACOB PIETER ,  KRUIT PIETER ,  LIV M SC NALAN ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: H01J37/22

CPC classification number: H01J37/222 ,  G01C21/32 ,  G01C21/3484 ,  H01J37/22 ,  H01J37/226 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/24475 ,  H01J2237/2806

Abstract: An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.

公开(公告)号：NL2005080C2

公开(公告)日：2012-01-17

申请号：NL2005080

申请日：2010-07-14

Applicant: UNIV DELFT TECH

Inventor： KRUIT PIETER ,  HOOGENBOOM JACOB PIETER ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: H01J37/22 ,  H01J37/256 ,  H01J37/28

公开(公告)号：NL1040131C

公开(公告)日：2014-01-28

申请号：NL1040131

申请日：2013-03-27

Applicant: UNIV DELFT TECH

Inventor： HOOGENBOOM JACOB PIETER ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: G02B21/00 ,  G02B21/33 ,  H01J37/22 ,  H01J37/28

CPC classification number: G02B21/0004 ,  G02B21/0088 ,  G02B21/33 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2608

公开(公告)号：NL1039512C2

公开(公告)日：2013-10-03

申请号：NL1039512

申请日：2012-04-02

Applicant: UNIV DELFT TECH

Inventor： HOOGENBOOM JACOB PIETER ,  KRUIT PIETER ,  LIV M SC NALAN ,  ZONNEVYLLE AERNOUT CHRISTIAAN

IPC: H01J37/22

Abstract: An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.