公开(公告)号：WO2015001325A1

公开(公告)日：2015-01-08

申请号：PCT/GB2014/051985

申请日：2014-06-30

Applicant: WOLFSON MICROELECTRONICS PLC

Inventor： JENKINS, Colin Robert ,  HOEKSTRA, Tsjerk ,  CARGILL, Scott

IPC: H04R19/00 ,  B81B3/00 ,  H04R7/10

CPC classification number: B81B3/0072 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  H04R7/10 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimise any loss of capacitance.

Abstract translation: 该应用描述了具有具有膜电极（302）的柔性膜（301）的（MEMS）换能器（100）的改进，特别是在膜是结晶或多晶的情况下，膜电极是金属或金属合金。 这样的换能器通常可以包括背板，其具有耦合到背板电极（303）的至少一个背板层（304），背板电极中的多个孔（314）对应于多个背面 通过背板的板孔（312）。 在本发明的实施例中，膜电极在膜电极中具有至少一个开口（313），其中至少一部分开口区域对应于至少一个背板孔的面积，沿垂直于 膜，并且在膜电极的所述开口处的柔性膜中没有孔。 可以有多个这样的开口。 这些开口有效地允许膜电极材料的量的减少，例如， 金属，可能会发生塑性变形并使膜永久变形。 这些开口至少部分地与背板孔对准，以最小化电容的任何损失。