中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

4 records (took 0.027 seconds)

    MEMS DEVICE AND PROCESS
    1.
    发明申请
    MEMS DEVICE AND PROCESS 审中-公开
    MEMS器件和工艺

    公开(公告)号：WO2014045041A1

    公开(公告)日：2014-03-27

    申请号：PCT/GB2013/052459

    申请日：2013-09-19

    Applicant: WOLFSON MICROELECTRONICS PLC

    Inventor： HOEKSTRA, Tsjerk ,  JENKINS, Colin Robert

    IPC: H04R19/00

    CPC classification number: H04R1/08 ,  B81B3/0021 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R19/005 ,  H04R2201/003

    Abstract: This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic shock. The application describes a MEMS transducer (400) having at least one membrane layer (101) supported so as to define a flexible membrane. A strengthening layer (401; 701) is mechanically coupled to the membrane layer and is disposed around the majority of a peripheral area of the flexible membrane but does not extend over the whole flexible membrane. The strengthening layer, which in some embodiments may be formed from the same material as the membrane electrode (102) being disposed in the peripheral area helps reduce stress in membrane at locations that otherwise may be highly stressed in acoustic shock situations. The membrane may be supported over a substrate cavity and the strengthening layer may be provided in an area of the membrane that could make contact with the edge (202) of the substrate cavity.

    Abstract translation: 本申请涉及MEMS器件，特别是MEMS电容式换能器，以及用于形成这样的MEMS换能器的方法，其提供对声学冲击的增强的鲁棒性和弹性。 该应用描述了具有至少一个膜层（101）被支撑以限定柔性膜的MEMS换能器（400）。 加强层（401; 701）机械耦合到膜层并且围绕柔性膜的周边区域的大部分设置，但不延伸遍布整个柔性膜。 在一些实施例中，加强层可以由与设置在周边区域中的膜电极（102）相同的材料形成，有助于在声学冲击情况下可能会受到高应力的位置减小膜中的应力。 膜可以被支撑在衬底空腔上，并且加强层可以设置在可以与衬底腔的边缘（202）接触的膜的区域中。

    MEMS DEVICE AND PROCESS
    2.
    发明申请
    MEMS DEVICE AND PROCESS 审中-公开
    MEMS器件和工艺

    公开(公告)号：WO2015001325A1

    公开(公告)日：2015-01-08

    申请号：PCT/GB2014/051985

    申请日：2014-06-30

    Applicant: WOLFSON MICROELECTRONICS PLC

    Inventor： JENKINS, Colin Robert ,  HOEKSTRA, Tsjerk ,  CARGILL, Scott

    IPC: H04R19/00 ,  B81B3/00 ,  H04R7/10

    CPC classification number: B81B3/0072 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  H04R7/10 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

    Abstract: The application describes improvements to (MEMS) transducers (100) having a flexible membrane (301) with a membrane electrode (302), especially where the membrane is crystalline or polycrystalline and the membrane electrode is metal or a metal alloy. Such transducers may typically include a back-plate having at least one back-plate layer (304) coupled to a back-plate electrode (303), with a plurality of holes (314) in the back-plate electrode corresponding to a plurality back-plate holes (312) through the back-plate. In embodiments of the invention the membrane electrode has at least one opening (313) in the membrane electrode wherein, at least part of the area of the opening corresponds to the area of at least one back-plate hole, in a direction normal to the membrane, and there is no hole in the flexible membrane at said opening in the membrane electrode. There may be a plurality of such openings. The openings effectively allow a reduction in the amount of membrane electrode material, e.g. metal, that may undergo plastic deformation and permanently deform the membrane. The openings are at least partly aligned with the back-plate holes to minimise any loss of capacitance.

    Abstract translation: 该应用描述了具有具有膜电极（302）的柔性膜（301）的（MEMS）换能器（100）的改进，特别是在膜是结晶或多晶的情况下，膜电极是金属或金属合金。 这样的换能器通常可以包括背板，其具有耦合到背板电极（303）的至少一个背板层（304），背板电极中的多个孔（314）对应于多个背面 通过背板的板孔（312）。 在本发明的实施例中，膜电极在膜电极中具有至少一个开口（313），其中至少一部分开口区域对应于至少一个背板孔的面积，沿垂直于 膜，并且在膜电极的所述开口处的柔性膜中没有孔。 可以有多个这样的开口。 这些开口有效地允许膜电极材料的量的减少，例如， 金属，可能会发生塑性变形并使膜永久变形。 这些开口至少部分地与背板孔对准，以最小化电容的任何损失。

    MEMS DEVICE AND PROCESS
    3.
    发明申请
    MEMS DEVICE AND PROCESS 审中-公开
    MEMS器件和工艺

    公开(公告)号：WO2014045040A1

    公开(公告)日：2014-03-27

    申请号：PCT/GB2013/052458

    申请日：2013-09-19

    Applicant: WOLFSON MICROELECTRONICS PLC

    Inventor： JENKINS, Colin Robert ,  HOEKSTRA, Tsjerk ,  BOYD, Euan

    IPC: H04R19/00

    CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B3/0075 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00158 ,  H01L41/09 ,  H01L41/0926 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/16151 ,  H01L2924/16152 ,  H04R1/222 ,  H04R23/006 ,  H04R2201/003 ,  Y10T29/49005 ,  H01L2924/00014

    Abstract: This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic shock. The application describes atransducer structure havinga flexible membrane (101) supported between a first volume (109) and a second volume (110). The transducer structure comprises at least one variable vent structure (401) in communication with at least one of said first and second volumes, said variable vent structure comprising at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.

    Abstract translation: 本申请涉及MEMS器件，特别是MEMS电容式换能器，以及用于形成这样的MEMS换能器的方法，其提供对声学冲击的增强的鲁棒性和弹性。 本申请描述了具有支撑在第一容积（109）和第二容积（110）之间的柔性膜（101）的传感器结构。 换能器结构包括与所述第一和第二体积中的至少一个连通的至少一个可变排气结构（401），所述可变排气结构包括至少一个可移动部分，所述至少一个可移动部分可响应于可移动部分上的压差而移动，因此 以改变通过排气结构的流动路径的尺寸。 可变通气口可以通过膜形成，并且可移动部分可以是由一个或多个通道限定的膜，其可偏离膜的表面偏转。 可变排气口优选在正常的压差范围内封闭，但是在高压差下打开以提供膜上方和下方的空气体积的更快速均衡。

Patent Agency Ranking