公开(公告)号：EP2720247A2

公开(公告)日：2014-04-16

申请号：EP12194475.5

申请日：2012-11-27

Applicant: Ion Technology Solutions, LLC

Inventor： Jerez, Manuel A. ,  Borges, Carlos F.

IPC: H01J37/08 ,  H01J37/04 ,  H01J27/08

CPC classification number: H01J27/00 ,  H01J27/022 ,  H01J27/08 ,  H01J37/04 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082

Abstract: The arc chamber (13) has a bottom liner (34) spaced from the base (26) of the housing (25) and side liners (36) spaced from the side walls (27) to direct gas entering from an inlet port (32) along the base (26) and up the side walls (27) of the housing (25). The bottom liner (34) has notches (35) at two side edges to direct the gas upwardly into the arc chamber (13) and the side liners (36) have slots (3) to direct the gas horizontally into the arc chamber (13) to create a uniform distribution of the gas for gas ionization in the arc chamber.

Abstract translation: 电弧室（13）具有与壳体（25）的基部（26）间隔开的底部衬套（34​​）和与侧壁（27）间隔开的侧衬套（36），以引导从入口端口（32）进入的气体 ）沿壳体（25）的侧壁（27）延伸。 底部衬套（34​​）在两个侧边缘处具有凹口（35），以将气体向上引导到电弧室（13）中，并且侧衬套（36）具有槽（3）以将气体水平地引导到电弧室（13） ）以在电弧室中产生用于气体电离的气体的均匀分布。

公开(公告)号：EP2720247A3

公开(公告)日：2014-04-30

申请号：EP12194475.5

申请日：2012-11-27

Applicant: Ion Technology Solutions, LLC

Inventor： Jerez, Manuel A. ,  Borges, Carlos F.

IPC: H01J37/08 ,  H01J37/04 ,  H01J27/08

CPC classification number: H01J27/00 ,  H01J27/022 ,  H01J27/08 ,  H01J37/04 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082

Abstract: The arc chamber (13) has a bottom liner (34) spaced from the base (26) of the housing (25) and side liners (36) spaced from the side walls (27) to direct gas entering from an inlet port (32) along the base (26) and up the side walls (27) of the housing (25). The bottom liner (34) has notches (35) at two side edges to direct the gas upwardly into the arc chamber (13) and the side liners (36) have slots (3) to direct the gas horizontally into the arc chamber (13) to create a uniform distribution of the gas for gas ionization in the arc chamber.

公开(公告)号：WO2015187639A3

公开(公告)日：2017-05-04

申请号：PCT/US2015033698

申请日：2015-06-02

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Inventor： KOO BON-WOONG ,  LEAVITT CHRISTOPHER J ,  FRONTIERO JOHN A ,  MILLER TIMOTHY J ,  RADOVANOV SVETLANA B

IPC: H01L21/265

CPC classification number: C23C14/564 ,  C23C14/14 ,  C23C14/48 ,  H01J27/00 ,  H01J37/3171

Abstract: A method of processing a workpiece is disclosed, where the plasma chamber is first coated using a conditioning gas and optionally, a co-gas. The conditioning gas, which is disposed within a conditioning gas container may comprise a hydride of the desired dopant species and a filler gas, where the filler gas is a hydride of a Group 4 or Group 5 element. The remainder of the conditioning gas container may comprise hydrogen gas. Following this conditioning process, a feedgas, which comprises fluorine and the desired dopant species, is introduced to the plasma chamber and ionized. Ions are then extracted from the plasma chamber and accelerated toward the workpiece, where they are implanted without being first mass analyzed. In some embodiments, the desired dopant species may be boron.

Abstract translation: 公开了一种处理工件的方法，其中等离子体室首先使用调节气体和任选的辅助气体进行涂覆。 设置在调节气体容器内的调节气体可以包括期望的掺杂剂物质的氢化物和填充气体，其中填充气体是第4族或第5族元素的氢化物。 调节气体容器的其余部分可以包含氢气。 在该调节过程之后，将包含氟和期望的掺杂剂物质的原料气引入等离子体室并离子化。 然后离子从等离子体腔室中提取出来，并朝工件加速，在那里它们被植入而不用首先进行质量分析。 在一些实施例中，期望的掺杂剂物质可以是硼。

公开(公告)号：WO2008061173A3

公开(公告)日：2008-08-21

申请号：PCT/US2007084772

申请日：2007-11-15

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  CHEN CHIPING ,  BEMIS THOMAS M ,  BHATT RONAK J ,  ZHOU JING

Inventor： CHEN CHIPING ,  BEMIS THOMAS M ,  BHATT RONAK J ,  ZHOU JING

IPC: G21K5/04 ,  H01J3/00 ,  H01J21/18 ,  H01J27/00 ,  H05H5/02

CPC classification number: G21K5/04 ,  H01J25/60 ,  H01J27/00 ,  H01J37/08 ,  H01J2237/061 ,  H01J2237/063 ,  H01J2237/31701 ,  H05H15/00

Abstract: A high-brightness, space-charge-dominated circular charged-p article beam system includes a flat circular emitter that emits charge particles to form a space-charge-dominated circular charged-particle beam. The space-charge-dominated circular charged-particle beam is emitted from the flat circular emitter with a uniform density and having a current emission being space-charge-limited, obeying the Child-Langmuir law. A diode includes at least one electrode at the flat circular emitter and at least one additional electrode that accelerates the charged particles. A beam tunnel is coupled electrically to at least one of the additional electrodes. An applied axisymmetric magnetic field focuses the space-charge-dominated circular charged-particle beam. A depressed collector collects the space-charge-dominated circular charged-particle beam.

Abstract translation: 高亮度，空间电荷主导的圆形带电p物体光束系统包括发射电荷粒子以形成空间电荷主导的圆形带电粒子束的扁平圆形发射体。 以空间电荷为主的圆形带电粒子束由均匀密度的扁平圆形发射体发射，并且具有空间电荷限制的电流发射，遵循儿童 - 朗缪尔定律。 二极管包括在扁平圆形发射器处的至少一个电极和加速带电粒子的至少一个附加电极。 电子束隧道电连接到至少一个附加电极。 应用的轴对称磁场聚焦空间电荷主导的圆形带电粒子束。 一个凹陷的收集器收集空间电荷主导的圆形带电粒子束。

公开(公告)号：WO2011123477A1

公开(公告)日：2011-10-06

申请号：PCT/US2011/030405

申请日：2011-03-29

Applicant: LANE, Glenn

Inventor： LANE, Glenn

IPC: H01B1/00

CPC classification number: H01J27/00 ,  H05H1/54

Abstract: A closed plasma channel superconductor which is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas or vapor plasma, the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments include a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.

Abstract translation: 封闭的等离子体通道超导体，其由细长的近端真空管道组成，其包括具有纵向轴线并且限定用于容纳电离气体或蒸汽等离子体的传输空间的圆柱形壁，所述等离子体部件基本上分离成与 所述纵轴响应于所述传动空间内产生的静磁场。 每个通道沿传输空间的整个长度建立。 至少一个通道主要由自由电子组成，其提供通过其传输能量的最小电阻的路径。 通过适当波长的光源的光电效应建立和维持电离以产生最导电的电传输介质。 各种实施例包括用于传输交流电的混合系统，或者通过圆柱形壁的多极EM场，以及通过分层通道的直流或带电粒子。

公开(公告)号：US08916834B2

公开(公告)日：2014-12-23

申请号：US14305681

申请日：2014-06-16

Applicant: Glenn Lane Family Limited Liability Limited Partnership

Inventor： Glenn E. Lane

IPC: B01J19/08 ,  B03C1/00 ,  H01J27/00

CPC classification number: H01J27/00 ,  H05H1/54

Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.

公开(公告)号：US08658986B1

公开(公告)日：2014-02-25

申请号：US13649652

申请日：2012-10-11

Applicant: Manuel A. Jerez ,  Carlos F. M. Borges

Inventor： Manuel A. Jerez ,  Carlos F. M. Borges

IPC: H01J27/00

CPC classification number: H01J27/00 ,  H01J27/08 ,  H01J37/08 ,  H01J2237/31701

Abstract: The second repeller assembly includes a flat plate and two sleeves through which the legs of a filament pass in electrically insulated manner. The clamp assembly for the filament includes a pair of strap assemblies with three straps each for electrically connecting the clamps and filament to an electrical feed. The straps are in contact with opposite flat sides of a terminal pin.

Abstract translation: 第二推斥器组件包括平板和两个套筒，细丝的腿通过该套筒以电绝缘的方式穿过。 用于灯丝的夹具组件包括一对带组件，其具有三个带子，用于将夹具和灯丝电连接到电源。 带子与端子销的相对的平坦侧面接触。

公开(公告)号：US20110186436A1

公开(公告)日：2011-08-04

申请号：US13078999

申请日：2011-04-03

Applicant: Igor V. Novosselov ,  Peter C. Ariessohn ,  Evan D. Dengler ,  Michelle Hickner

Inventor： Igor V. Novosselov ,  Peter C. Ariessohn ,  Evan D. Dengler ,  Michelle Hickner

IPC: G01N1/28 ,  H01J49/26 ,  H01J27/00 ,  B01D15/08 ,  G01N30/00 ,  G01J3/00 ,  G01J1/58 ,  G01N27/62 ,  G01N27/447 ,  G01N33/00

CPC classification number: B01D15/08 ,  G01J1/58 ,  G01J3/00 ,  G01N1/28 ,  G01N27/447 ,  G01N27/62 ,  G01N30/00 ,  G01N33/00 ,  H01J27/00 ,  H01J49/26 ,  Y02A50/25

Abstract: Devices, apparatus and methods are disclosed for non-contact pneumatic sampling and sampling of surfaces, persons, articles of clothing, buildings, furnishings, vehicles, baggage, packages, mail, and the like, for contaminating aerosols indicative of a hazard or a benefit, where the contaminating aerosols are chemical, radiological, biological, toxic, or infectious in character. In a first device, a central orifice for pulling a suction gas stream is surrounded by a peripheral array of convergingly-directed gas jets, forming a virtual sampling chamber. The gas jets are configured to deliver millisecond pneumatic pulses that erode particles from solid surfaces at a distance. In another aspect of the invention, a suction gas stream is split using an air-to-air concentrator so that a particle-enriched gas flow is directed to a particle trap and any particles immobilized in the particle trap (including any adsorbed vapors associated with the particles) are selectively analyzed to detect trace residues associated with explosives.

Abstract translation: 公开的装置，装置和方法用于表面，人员，衣物，建筑物，家具，车辆，行李，包装，邮件等的非接触式气体取样和取样，用于污染指示危险或益处的气溶胶 污染气溶胶在化学，放射学，生物学，毒性或传染性方面。 在第一装置中，用于拉动吸入气流的中心孔被收敛的气体射流的外围阵列包围，形成虚拟取样室。 气体喷射器被配置为传送毫秒的气动脉冲，其从一定距离的实体表面侵蚀颗粒。 在本发明的另一方面，使用空气 - 空气浓缩器分离吸入气体流，使得富含颗粒的气体流被引导到颗粒捕获器，并且固定在颗粒捕获器中的任何颗粒（包括与 颗粒）被选择性分析以检测与爆炸物相关的痕量残留物。

公开(公告)号：US06869574B2

公开(公告)日：2005-03-22

申请号：US10091539

申请日：2002-03-07

Applicant: Hisao Hojoh ,  Masatoshi Ono ,  Morinobu Endo ,  Tetsuo Uchiyama

Inventor： Hisao Hojoh ,  Masatoshi Ono ,  Morinobu Endo ,  Tetsuo Uchiyama

IPC: H01J27/00 ,  B01J19/08

CPC classification number: H01J37/08 ,  H01J27/00 ,  H01J37/065 ,  H01J37/073 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/06316 ,  H01J2237/0807

Abstract: A charged particle generating method in which mode is changeable between an ion generation mode and an electron generation mode. In the ion generation mode, a raw material is supplied to a tip end of a charged particle generating electrode through a raw-material passage formed in the charged particle generating electrode. A first electric field, in which the charged particle generating electrode is positive and the charged particle extract electrode is negative, is generated to emit ions from the raw material at the charged particle generating electrode. In the electron generation mode, supplying the raw material from the raw-material supply section is stopped. A second electric field, in which the charged particle generating electrode is negative and the charged particle extract electrode is positive, is generated to emit electrons from the raw material at the charged particle generating electrode.

Abstract translation: 一种带电粒子产生方法，其中模式可在离子产生模式和电子生成模式之间变化。 在离子产生模式中，通过形成在带电粒子产生电极中的原料通道将原料供给到带电粒子产生电极的末端。 产生其中带电粒子产生电极为正的并且带电粒子提取电极为负的第一电场，以从带电粒子产生电极的原料发射离子。 在电子生成模式中，停止从原料供给部供给原料。 产生其中带电粒子产生电极为负并且带电粒子提取电极为正的第二电场，以从带电粒子产生电极的原料发射电子。

公开(公告)号：US20180087148A1

公开(公告)日：2018-03-29

申请号：US15809216

申请日：2017-11-10

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Christopher J. Leavitt ,  John A. Frontiero ,  Timothy J. Miller ,  Svetlana B. Radovanov

IPC: C23C14/56 ,  C23C14/14 ,  C23C14/48 ,  H01J37/317

CPC classification number: C23C14/564 ,  C23C14/14 ,  C23C14/48 ,  H01J27/00 ,  H01J37/3171 ,  H01J37/3178 ,  H01J37/32412

Abstract: A method of processing a workpiece is disclosed, where the plasma chamber is first coated using a conditioning gas and optionally, a co-gas. The conditioning gas, which is disposed within a conditioning gas container may comprise a hydride of the desired dopant species and a filler gas, where the filler gas is a hydride of a Group 4 or Group 5 element. The remainder of the conditioning gas container may comprise hydrogen gas. Following this conditioning process, a feedgas, which comprises fluorine and the desired dopant species, is introduced to the plasma chamber and ionized. Ions are then extracted from the plasma chamber and accelerated toward the workpiece, where they are implanted without being first mass analyzed. In some embodiments, the desired dopant species may be boron.