公开(公告)号：US12051559B2

公开(公告)日：2024-07-30

申请号：US17695843

申请日：2022-03-16

Applicant: FUJIFILM CORPORATION

Inventor： Masayoshi Matsuura

IPC: H01J35/14 ,  A61B6/02 ,  H01J35/06 ,  H01J35/08

CPC classification number: H01J35/14 ,  A61B6/025 ,  H01J35/064 ,  H01J35/08

Abstract: A radiation tube attachment member includes: a common substrate that supports one end side of each of a plurality of radiation tubes and holds the plurality of radiation tubes in a state in which the plurality of radiation tubes are arranged; and a positioning portion that is provided in the common substrate and locates a focus of each of the plurality of radiation tubes at which radiation is emitted at a target position.

公开(公告)号：US11963286B2

公开(公告)日：2024-04-16

申请号：US17725152

申请日：2022-04-20

Applicant: Excillum AB

Inventor： Björn Hansson ,  Per Takman ,  Yuli Wang ,  Shiho Tanaka

IPC: H05G2/00 ,  H01J35/08 ,  H01J35/14

CPC classification number: H05G2/006 ,  H01J35/08 ,  H01J35/14 ,  H01J35/153 ,  H01J2235/082

Abstract: An X-ray source including: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to include a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target includes an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.

公开(公告)号：US20240055216A1

公开(公告)日：2024-02-15

申请号：US18268934

申请日：2021-12-21

Applicant: Helmut Fischer GmbH Institut fuer Elektronik und Messtechnik

Inventor： Martin Leibfritz

IPC: H01J35/14 ,  G01N23/223 ,  H01J35/08

CPC classification number: H01J35/153 ,  G01N23/223 ,  H01J35/08

Abstract: The invention relates to an x-ray source (100; 100a; 100b; 100c), comprising an electron source (110) for providing electrons (e) in the form of an electron beam (es) and a target element (120), on which the electrons (e) of the electron beam (es) of the electron source (110) are able to impinge, and at least one deflection device (140) enabling the electron beam (es) to be deflected from a propagation direction produced by the electron source (110), wherein the at least one deflection device (140) is configured to deflect the electron beam (es) at least intermittently with a trajectory (180) incident on the target element (120), but outside a center of the target element (120) or a region (150) of the target element (120) on which the electron beam (es) is incident in the case of a propagation direction without deflection, or wherein the at least one deflection device (140) is configured to deflect the electron beam (es) at least intermittently in such a way that the electron beam (es) is not incident on the target element (120).

公开(公告)号：US20190131102A1

公开(公告)日：2019-05-02

申请号：US15996274

申请日：2018-06-01

Applicant: TRIBO LABS

Inventor： Carlos G. Camara ,  Mark G. Valentine ,  Zachary J. Gamlieli ,  Benjamin A. Lucas ,  David M. Kamkar ,  Pedro Cortes, JR. ,  Vasish Narayan M. ,  Gilberto Jimenez ,  Daniel E. Cuadra

IPC: H01J35/08 ,  H01J35/06 ,  H01J35/02 ,  H01J35/18 ,  H05G2/00 ,  H01J35/20

CPC classification number: H01J35/08 ,  H01J35/02 ,  H01J35/06 ,  H01J35/18 ,  H01J35/186 ,  H01J35/20 ,  H05G2/00

Abstract: An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized to generate x-rays within the housing, which may pass through a window of the housing. Various contact rods may be used as part of the tribocharging process.

公开(公告)号：US10062539B2

公开(公告)日：2018-08-28

申请号：US15000523

申请日：2016-01-19

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yoshihiro Yanagisawa ,  Shuji Yamada ,  Takao Ogura ,  Nobuhiro Ito

IPC: H01J35/08 ,  H01J35/16

CPC classification number: H01J35/08 ,  H01J35/16 ,  H01J35/186 ,  H01J2235/081 ,  H01J2235/083

Abstract: Provided is an anode capable of keeping the X-ray dose steady in an X-ray generating tube by preventing a crack in a connecting electrode layer, which electrically connects a target layer and an anode member. The anode includes a first bonding boundary where the connecting electrode layer, which electrically connects the target layer and the anode member, is bonded to a supporting substrate of a target, and a second bonding boundary where the connecting electrode layer is bonded to the anode member in which the connecting electrode layer is formed so that the first bonding boundary and the second bonding boundary are on the same side with respect to the connecting electrode layer.

公开(公告)号：US10014149B2

公开(公告)日：2018-07-03

申请号：US14762477

申请日：2013-11-05

Applicant: Futaba Corporation ,  HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Nakamura ,  Norimasa Kosugi ,  Naoki Okumura ,  Yoshitaka Sato ,  Akira Matsumoto ,  Yoshihisa Marushima ,  Kazuhito Nakamura

IPC: H01J35/18 ,  H05G1/06 ,  H01J35/06 ,  H01J35/08 ,  H01J35/16

CPC classification number: H01J35/18 ,  H01J35/06 ,  H01J35/08 ,  H01J35/116 ,  H01J35/16 ,  H05G1/06

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is sandwiched between a filament and an electric field control electrode to each of which a negative high voltage is applied. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and enables stable operation to be maintained, without occurrence of a trouble of failure in maintaining a desired X-ray amount.

公开(公告)号：US09953798B2

公开(公告)日：2018-04-24

申请号：US15377133

申请日：2016-12-13

Applicant: Airdrie Partners I, LP

Inventor： Thomas A Case ,  Josh Star-Lack ,  Brian Patrick Wilfley

IPC: H01J35/14 ,  H01J27/14 ,  H01J27/02 ,  H01J35/08 ,  H01J35/06

CPC classification number: H01J35/14 ,  H01J35/06 ,  H01J35/08 ,  H01J2235/087

Abstract: The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a predetermined plane. A cathode can be provided for emitting charged particles and an anode for accelerating the charged particles along an axis of travel. The present invention also pertains to a method for generating a particle beam that has a uniform profile in a predetermined plane comprising inducing emission of charged particles from an emitter, accelerating those particles along and toward an axis of beam travel, generating a magnetic field with a component aligned with the axis of beam travel but different in the predetermined plane than at the emitter, and modifying the beam profile.

公开(公告)号：US09941091B2

公开(公告)日：2018-04-10

申请号：US15074859

申请日：2016-03-18

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Jin-Woo Jeong ,  Yoon-Ho Song

IPC: H01J35/00 ,  H01J35/06 ,  H01J35/08

CPC classification number: H01J35/065 ,  H01J35/08

Abstract: An X-ray tube includes a cathode including an emitter emitting an electron beam, an anode at which a target material is disposed, the target material emitting an X-ray by colliding with the electron beam, and an insulating spacer isolating the anode, wherein the cathode or the anode is disposed between the emitter and the insulating spacer.

公开(公告)号：US20180068821A1

公开(公告)日：2018-03-08

申请号：US15256692

申请日：2016-09-05

Applicant: Mark F. Eaton

Inventor： Mark F. Eaton

IPC: H01J35/08 ,  H01J35/06 ,  H01J29/08 ,  G03F7/20

CPC classification number: H01J35/08 ,  G03F7/7005 ,  G21K1/067 ,  G21K2201/067 ,  H01J29/085 ,  H01J35/06 ,  H01J35/112 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/086

Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.

公开(公告)号：US09911569B2

公开(公告)日：2018-03-06

申请号：US14993163

申请日：2016-01-12

Applicant: Malvern Panalytical B.V.

Inventor： J. van der Borst ,  Bart Filmer ,  Ben Hageluken ,  Jos Schalley ,  Romulus Mihalca

IPC: H01J35/18 ,  H01J35/08 ,  H01J9/14 ,  H01J35/12

CPC classification number: H01J35/08 ,  H01J9/14 ,  H01J35/12 ,  H01J2235/084 ,  H01J2235/1204 ,  H01J2235/1262

Abstract: A method of manufacturing an X-ray tube component, includes diffusion bonding or brazing an anode of rhodium, molybdenum or tungsten to a heat spreader of molybdenum, tungsten, or a composite of molybdenum and/or tungsten. Suitable joint materials for diffusion bonding include gold; suitable joint materials for brazing include an alloy of silver and copper, an alloy of silver, copper and palladium, an alloy of gold and copper or an alloy of gold, copper and nickel. The resulting tube component delivers reliable behaviors and the joint can withstand high temperatures, high temperature gradients, fast temperature changes, extremely high radiation and extremely high electric field, while maintaining good high vacuum properties.