Methods of fabricating MEMS and microfluidic devices using latent masking technique
    91.
    发明授权
    Methods of fabricating MEMS and microfluidic devices using latent masking technique 有权
    使用潜屏蔽技术制造MEMS和微流体器件的方法

    公开(公告)号:US06780336B2

    公开(公告)日:2004-08-24

    申请号:US10004463

    申请日:2001-11-02

    CPC classification number: B05B5/00 H01J49/0018 H01J49/167 Y10S438/942

    Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

    Abstract translation: 公开了本发明的三个基本和三个派生方面。 三个基本方面各自公开了可以整合到完整过程中的过程序列。 第一方面,被指定为“潜屏蔽”,定义了在固定材料(例如氧化硅)中的掩模,该掩模在定义之后被保持为静止,而执行中间处理操作。 然后将潜在氧化物图案用于掩模蚀刻。 指定为“同时多级蚀刻(SMILE)”的第二方面提供了一种处理顺序,其中在蚀刻到下面的材料中第一图案可相对于第二图案被赋予高级开始,使得第一图案可以是 蚀刻成更深,更浅或与第二图案相同的深度。 指定为“延迟LOCOS”的第三方面提供了在过程的一个阶段定义接触孔图案的方法,然后在稍后阶段使用限定的图案来打开接触孔。 第四方面提供了一个整合三个基本方面来制造液相色谱(LC)/电喷雾离子化(ESI)装置的方法。 第五方面提供了一种结合两个基本方面来制造ESI装置的过程序列。 第六方面提供了一种结合两个基本方面来制造LC器件的过程序列。 与先前公开的制造方法相比,所描述的工艺改进提供了增加的制造产量和设计自由度。

    Spray gun with data device and method of control
    92.
    发明授权
    Spray gun with data device and method of control 有权
    喷枪配有数据设备和控制方法

    公开(公告)号:US06758423B1

    公开(公告)日:2004-07-06

    申请号:US09612847

    申请日:2000-07-10

    Abstract: A system and method of storing and reading parameter data associated with an electrostatic spray gun power supply is provided. The method includes, for example, the steps of reading parameter data associated with a power supply for a particular spray gun from a database and storing the parameter data in a memory device associated with the spray gun. The parameter data may include the drive current parameter information, for example, and additionally, spray gun type identification information. The memory device is preferably integral with the spray gun or a cable connector that connects to the spray gun. The data or information can be in the form of analog or digital information. After reading the spray gun power supply parameter data, the spray gun controller appropriately operates and monitors the spray gun to ensure that the spray gun power supply is performing properly.

    Abstract translation: 提供了一种存储和读取与静电喷枪电源相关的参数数据的系统和方法。 该方法包括例如从数据库读取与特定喷枪的电源相关联的参数数据并将参数数据存储在与喷枪相关联的存储设备中的步骤。 参数数据例如可以包括驱动电流参数信息,另外还可以包括喷枪型识别信息。 存储装置优选与喷枪或连接到喷枪的电缆连接器成一体。 数据或信息可以是模拟或数字信息的形式。 在读取喷枪电源参数数据后,喷枪控制器适当地操作和监视喷枪,以确保喷枪电源正常运行。

    Method and device for determining the layer thickness distribution in a paint layer
    93.
    发明授权
    Method and device for determining the layer thickness distribution in a paint layer 有权
    用于确定涂层中层厚度分布的方法和装置

    公开(公告)号:US06745158B1

    公开(公告)日:2004-06-01

    申请号:US09630150

    申请日:2000-07-31

    CPC classification number: B05B12/00 B05B5/00 G05B17/02

    Abstract: A method for determining a layer thickness distribution in a paint layer produced during paint spraying after inputting specific spraying parameters into an electrostatically based paint spraying device. A data processing device sets up and uses a phenomenological mathematical model of a quasi-stationary three-dimensional spray pattern. Specific parameters, such as an angle of rotation of electrodes and a rate of movement of the spraying device are input into the phenomenological model as fixed input parameters. In addition, real physical input parameters such as paint volume, directing air data and a voltage value, whose influence on the spraying result is not accurately known, are fed to an artificial neural network. The neural network having been previously trained using real input data such as a configuration of the spraying device, a paint type, operating parameters, and measured values of the layer thickness distribution. The neural network carries out a conversion of the input parameters into model input parameters which are fed to the phenomenological model. Spray patterns formed by the phenomenological model are integrated in a further functional unit as a function of movement data of the spraying device which are contained in the input parameters to form the overall paint layer which is output.

    Abstract translation: 一种用于确定在将特定喷涂参数输入静电喷涂装置之后在喷漆期间产生的涂料层中的层厚度分布的方法。 数据处理设备建立并使用准静态三维喷雾模式的现象学数学模型。 诸如电极的旋转角度和喷射装置的移动速度的特定参数被输入到作为固定输入参数的现象模型中。 另外,对喷雾结果影响不明确的实际物理输入参数如油漆体积,引导空气数据和电压值被馈送到人造神经网络。 已经使用诸如喷涂装置的配置,涂料类型,操作参数和层厚度分布的测量值的实际输入数据训练过的神经网络。 神经网络将输入参数转换为输入到现象模型的模型输入参数。 由现象学模型形成的喷雾图形,与作为输入参数中包含的喷涂装置的运动数据的函数集成在另一功能单元中,形成输出的整个油漆层。

    Methods of fabricating microelectromechanical and microfluidic devices

    公开(公告)号:US20020113034A1

    公开(公告)日:2002-08-22

    申请号:US10004463

    申请日:2001-11-02

    Applicant: Kionix, Inc.

    CPC classification number: B05B5/00 H01J49/0018 H01J49/167 Y10S438/942

    Abstract: Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as nulllatent maskingnull, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as nullsimultaneous multi-level etching (SMILE)null, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as nulldelayed LOCOSnull, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

    Metal atomization spray nozzle
    96.
    发明授权
    Metal atomization spray nozzle 失效
    金属雾化喷嘴

    公开(公告)号:US5261611A

    公开(公告)日:1993-11-16

    申请号:US914464

    申请日:1992-07-17

    CPC classification number: B05B5/00

    Abstract: A spray nozzle for a magnetohydrodynamic atomization apparatus has a feed passage for molten metal and a pair of spray electrodes mounted in the feed passage. The electrodes, diverging surfaces which define a nozzle throat and diverge at an acute angle from the throat. Current passes through molten metal when fed through the throat which creates the Lorentz force necessary to provide atomization of the molten metal.

    Abstract translation: 用于磁流体动力学雾化装置的喷嘴具有用于熔融金属的进料通道和安装在进料通道中的一对喷射电极。 电极,发散表面限定了一个喷嘴喉部,并与喉部呈锐角分离。 当通过喉管进入时,电流通过熔融金属,这产生了提供熔融金属雾化所需的洛伦兹力。

    Dielectric particle injector for material processing
    97.
    发明授权
    Dielectric particle injector for material processing 失效
    用于材料加工的介质颗粒注射器

    公开(公告)号:US5162969A

    公开(公告)日:1992-11-10

    申请号:US766617

    申请日:1991-09-26

    Inventor: Philip L. Leung

    CPC classification number: B05B5/00

    Abstract: A device for use as an electrostatic particle or droplet injector is disclosed which is capable of injecting dielectric particles or droplets. The device operates by first charging the dielectric particles or droplets using ultraviolet light induced photoelectrons from a low work function material plate supporting the dielectric particles or droplets, and then ejecting the charged particles or droplets from the plate by utilizing an electrostatic force. The ejected particles or droplets are mostly negatively charged in the preferred embodiment; however, in an alternate embodiment, an ion source is used instead of ultraviolet light to eject positively charged dielectric particles or droplets.

    Abstract translation: 公开了用作静电颗粒或液滴喷射器的装置,其能够注入电介质颗粒或液滴。 该装置通过首先使用来自支撑电介质颗粒或液滴的低功函数材料板的紫外光诱导光电子来对电介质颗粒或液滴进行充电,然后通过利用静电力从板上喷射带电粒子或液滴。 在优选实施例中,喷射的颗粒或液滴大部分是带负电荷的; 然而,在替代实施例中,使用离子源代替紫外光以喷射带正电的介电颗粒或液滴。

    Magnetic field-generating nozzle for atomizing a molten metal stream
into a particle spray
    98.
    发明授权
    Magnetic field-generating nozzle for atomizing a molten metal stream into a particle spray 失效
    用于将熔融金属流雾化成颗粒喷雾的磁场产生喷嘴

    公开(公告)号:US4925103A

    公开(公告)日:1990-05-15

    申请号:US322433

    申请日:1989-03-13

    Abstract: A molten metal spray-depositing apparatus employs a magnetic field-generating nozzle for atomizing a molten metal stream into a spray of metal particles. The magnetic driving field generated by the magnetic atomizing nozzle generates eddy currents which produce an induced field in the metal stream opposing the driving field and creating a torque which causes the stream to break up upon exiting the driving field. The nozzle has one of two configurations for generating one of two generic magnetic field geometries. In one configuration the nozzle utilizes a pair of spaced magnetic poles, such as provided by Helmholtz coils, for generating a transverse magnetic field geometry across the stream. In the other configuration the nozzle employs a solenoid coil for generating a solenoidal magnetic field geometry parallel to the stream. Preferably, the magnetic field of each geometry is a high frequency AC field since better coupling between the field and stream occurs and more eddy currents are induced at higher frequency.

    Abstract translation: 熔融金属喷镀装置采用磁场产生喷嘴将熔融金属流雾化成金属颗粒喷雾。 由磁性雾化喷嘴产生的磁驱动场产生涡流,该涡电流在与驱动场相对的金属流中产生感应场,并产生使流在离开驱动场时分裂的转矩。 喷嘴具有用于产生两个通用磁场几何形状之一的两种配置之一。 在一种配置中,喷嘴利用一对间隔的磁极,例如由亥姆霍兹线圈提供的磁极,用于在整个流上产生横向磁场几何。 在另一种配置中,喷嘴采用螺线管线圈来产生平行于流的螺线管磁场几何。 优选地,每个几何形状的磁场是高频AC场,因为场和流之间的更好的耦合发生,并且在较高频率下引起更多的涡流。

    Method for producing a multicoat paint system

    公开(公告)号:US09868134B2

    公开(公告)日:2018-01-16

    申请号:US15027408

    申请日:2014-11-18

    CPC classification number: B05D1/04 B05B5/00 B05D7/577

    Abstract: The present invention relates to a method for producing a multicoat paint system on a metallic substrate, in which a basecoat or a plurality of directly successive basecoats are produced directly on a metallic substrate coated with a cured electrocoat, a clearcoat is produced directly on the one basecoat or the uppermost of the plurality of basecoats, and then the one or more basecoats and the clearcoat are jointly cured, and wherein at least one basecoat material used for production of the basecoats comprises at least one aqueous dispersion comprising at least one copolymer (CP), said copolymer (CP) being preparable by initially charging an aqueous dispersion of at least one polyurethane, and then polymerizing a mixture of olefinically unsaturated monomers in the presence of the polyurethane from (i), in which a water-soluble initiator is used, the olefinically unsaturated monomers are metered in such that a concentration of 6.0% by weight, based on the total amount of olefinically unsaturated monomers used for polymerization, in the reaction solution is not exceeded over the entire reaction time, and the mixture of the olefinically unsaturated monomers comprises at least one polyolefinically unsaturated monomer, and comprises at least one linear hydroxy-functional reaction product (R) having an acid number less than 20 mg KOH/g, the preparation of which involves using at least one compound (v) containing two functional groups (v.1) and an aliphatic or araliphatic hydrocarbyl radical (v.2) which is arranged between the functional groups and has 12 to 70 carbon atoms.

    Method for electrostatically coating objects and application device

    公开(公告)号:US09795986B2

    公开(公告)日:2017-10-24

    申请号:US13880863

    申请日:2011-10-28

    CPC classification number: B05D1/007 B05B5/00 B05B5/087 B05B5/10 B05B14/42

    Abstract: An electrical field is generated between an application device and an object to be coated. At least one corona electrode associated with the application device is connected to ground, and at least one counter electrode associated with the object is connected at least at intervals to a positive potential. A system for electrostatically coating objects having an application device coating material, and an electrical field device having a high-voltage source which generates an electrical field between the application device and an object to be coated. The field device comprises at least one corona electrode associated with the application device, and at least one counter electrode associated with the object, wherein, during the operation of the device, the at least one corona electrode is connected to ground, and the at least one counter electrode is connected at least at intervals to a positive potential.

Patent Agency Ranking