SCANNED WRITING OF AN EXPOSURE PATTERN ON A SUBSTRATE
    92.
    发明申请
    SCANNED WRITING OF AN EXPOSURE PATTERN ON A SUBSTRATE 有权
    在基板上扫描曝光图案

    公开(公告)号:US20100195073A1

    公开(公告)日:2010-08-05

    申请号:US12669253

    申请日:2008-07-15

    CPC classification number: H01J3/14 G03F7/70383 G03F7/70466

    Abstract: An exposure pattern is written on a substrate, by scanning a light spot along a trajectory over the substrate and switching it on and off according to a desired pattern. Respective spot sizes of the light for illuminating the substrate in respective parts of the trajectory according to a geometry of the pattern. Respective pitch values between successive ones of the parts of the trajectory are selected, in relation to the spot size selected for the respective parts. The light spot is scanned over the substrate along the trajectory, with the selected pitch values between the trajectory parts and a position dependent spot size along the trajectory. In an embodiment a helical trajectory is used.

    Abstract translation: 通过沿着基板上的轨迹扫描光点并根据期望的图案将其打开和关闭来将曝光图案写入基板。 用于根据图案的几何形状在轨迹的各个部分中照射基底的光的各个斑点尺寸。 相对于为各个部分选择的光斑尺寸,选择轨迹的连续部分之间的相对间距值。 沿着轨迹将光点扫描在基板上,轨迹部分之间的所选间距值和沿着轨迹的位置相关光点尺寸。 在一个实施例中,使用螺旋轨迹。

    ELECTRO-OPTICAL RADIATION COLLECTOR FOR ARC FLASH DETECTION
    93.
    发明申请
    ELECTRO-OPTICAL RADIATION COLLECTOR FOR ARC FLASH DETECTION 有权
    用于电弧闪光检测的电光放电收集器

    公开(公告)号:US20100072352A1

    公开(公告)日:2010-03-25

    申请号:US12562202

    申请日:2009-09-18

    CPC classification number: H02H1/0023 H01J3/14

    Abstract: An electro-optical (EO) radiation collector for collecting and/or transmitting EO radiation (which may include EO radiation in the visible wavelengths) for transmission to an EO sensor. The EO radiation collector may be used with an arc flash detection device or other protective system, such as an intelligent electronic device (IED). The arc flash detection device may detect an arc flash event based upon EO radiation collected by and/or transmitted from the EO radiation collector. The EO radiation collector may receive an EO conductor cable, an end of which may be configured to receive EO radiation. A portion of the EO radiation received by the EO radiation collector may be transmitted into the EO conductor cable and transmitted to the arc flash detection device. The EO radiation collector may be adapted to receive a second EO conductor cable, which may be used to provide redundant EO transmission and/or self-test capabilities.

    Abstract translation: 用于收集和/或传输EO辐射(其可以包括可见波长中的EO辐射)的电光(EO)辐射收集器,用于传输到EO传感器。 EO辐射收集器可以与电弧闪光检测装置或诸如智能电子装置(IED)的其它保护系统一起使用。 电弧闪光检测装置可以基于由EO辐射收集器收集的和/或从其发射的EO辐射来检测电弧闪光事件。 EO辐射收集器可以接收EO导体电缆,其端部可被配置为接收EO辐射。 由EO辐射收集器接收的EO辐射的一部分可以传输到EO导体电缆中并传输到电弧闪光检测装置。 EO辐射收集器可以适于接收可用于提供冗余EO传输和/或自检能力的第二EO导体电缆。

    PROTON BEAM POSITIONING VERIFICATION METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
    94.
    发明申请
    PROTON BEAM POSITIONING VERIFICATION METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM 有权
    原子光束定位验证方法和连接使用充电颗粒癌治疗系统的设备

    公开(公告)号:US20100059687A1

    公开(公告)日:2010-03-11

    申请号:US12618718

    申请日:2009-11-14

    Inventor: Vladimir Balakin

    Abstract: The invention comprises a proton beam positioning method and apparatus used in conjunction with multi-axis charged particle radiation therapy of cancerous tumors. The proton beam verification system allows for monitoring of the actual proton beam position in real-time without destruction of the proton beam. The system includes a coating or thin layer substantially in contact with a foil covering the end of an exit nozzle or is a layer located after the x- and y-axis proton beam scanning controllers and before the patient. The coating yields a measurable spectroscopic response, spatially viewable by the detector, as a result of transmission by the proton beam. The proton beam position is monitored by the detector and compared to the calibration and/or treatment plan to verify accurate proton delivery to the tumor and/or as a proton beam shutoff safety indicator.

    Abstract translation: 本发明包括与癌肿瘤的多轴带电粒子放射治疗结合使用的质子束定位方法和装置。 质子束验证系统允许实时监测实际的质子束位置,而不破坏质子束。 该系统包括基本上与覆盖出口喷嘴的端部的箔接触的涂层或薄层,或者是位于x轴和y轴质子束扫描控制器之后且位于患者之前的层。 作为质子束传输的结果,涂层产生可测量的光谱响应,由检测器空间可见。 质子束位置由检测器监测,并与校准和/或治疗计划进行比较,以验证对肿瘤的精确质子传递和/或作为质子束截止安全指示剂。

    TANDEM ACCELERATOR METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
    95.
    发明申请
    TANDEM ACCELERATOR METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM 有权
    与加载颗粒癌治疗系统连接使用的加速器方法和装置

    公开(公告)号:US20100059686A1

    公开(公告)日:2010-03-11

    申请号:US12614733

    申请日:2009-11-09

    Inventor: Vladimir Balakin

    Abstract: The invention comprises a tandem accelerator method and apparatus, which is part of an ion beam injection system used in conjunction with multi-axis charged particle radiation therapy of cancerous tumors. The negative ion beam source includes an injection system vacuum system and a synchrotron vacuum system separated by a foil, where negative ions are converted to positive ions. The foil is sealed to the edges of the vacuum tube providing for a higher partial pressure in the injection system vacuum chamber and a lower pressure in the synchrotron vacuum system. Having the foil physically separating the vacuum chamber into two pressure regions allows for fewer and/or smaller pumps to maintain the lower pressure system in the synchrotron as the inlet hydrogen gas is extracted in a separate contained and isolated space by the injection partial vacuum system.

    Abstract translation: 本发明包括串联加速器方法和装置,其是与癌性肿瘤的多轴带电粒子放射治疗结合使用的离子束注射系统的一部分。 负离子束源包括注射系统真空系统和由箔分离的同步加速器真空系统,其中负离子转化为正离子。 箔片密封到真空管的边缘,在注射系统真空室中提供较高的分压,并且在同步加速器真空系统中具有较低的压力。 将真空室物理分离成两个压力区域的箔允许更少和/或更小的泵维持同步加速器中的较低压力系统,因为入口氢气通过注射部分真空系统在单独的包含和隔离的空间中提取。

    Ion Transfer Arrangement with Spatially Alternating DC and Viscous Ion Flow
    96.
    发明申请
    Ion Transfer Arrangement with Spatially Alternating DC and Viscous Ion Flow 有权
    离子转移布置与空间交替DC和粘性离子流

    公开(公告)号:US20100038533A1

    公开(公告)日:2010-02-18

    申请号:US12513954

    申请日:2007-11-07

    CPC classification number: H01J49/062 H01J3/14

    Abstract: A method of transporting gas and entrained ions between higher and lower pressure regions of a mass spectrometer comprises providing an ion transfer conduit 60 between the higher and lower pressure regions. The ion transfer conduit 60 includes an electrode assembly 300 which defines an ion transfer channel. The electrode assembly 300 has a first set of ring electrodes 305 of a first width D1, and a second set of ring electrodes of a second width D2 (≧D1) and interleaved with the first ring electrodes 305. A DC voltage of magnitude V1 and a first polarity is supplied to the first ring electrodes 205 and a DC voltage of magnitude V2 which may be less than or equal to the magnitude of V1 but with an opposed polarity is applied to the second ring electrodes 310. The pressure of the ion transfer conduit 60 is controlled so as to maintain viscous flow of gas and ions within the ion transfer channel.

    Abstract translation: 在质谱仪的较高压力区域和较低压力区域之间输送气体和夹带离子的方法包括在较高压力区域和较低压力区域之间提供离子转移导管60。 离子传递管道60包括限定离子传递通道的电极组件300。 电极组件300具有第一组宽度为D1的环形电极305和第二组宽度D2(≧D1)的第二组环形电极,并与第一环形电极305交错。 将第一极性提供给第一环形电极205,并且可以将小于或等于V1的大小但具有相对极性的幅度为V2的DC电压施加到第二环形电极310.离子转移的压力 管道60被控制以便保持气体和离子在离子传递通道内的粘性流动。

    Efficient Atmospheric Pressure Interface for Mass Spectrometers and Method
    97.
    发明申请
    Efficient Atmospheric Pressure Interface for Mass Spectrometers and Method 有权
    用于质谱仪和方法的高效大气压力界面

    公开(公告)号:US20100038532A1

    公开(公告)日:2010-02-18

    申请号:US12513944

    申请日:2007-11-07

    CPC classification number: H01J49/062 H01J3/14

    Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.

    Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括离子传递管道60.导管60具有朝向较高压力室40的入口开口和朝向较低压力室开口的出口70。 导管60还具有围绕离子传递通道115的至少一个侧壁。侧壁包括在侧壁的纵向方向上形成的多个孔140,以允许来自离子传递通道115内的气体流 到导管60的侧壁外侧的较低压力区域。

    Method for Controlling Electron Beam in Multi-Microcolumn and Multi-Microcolumn Using The Same
    98.
    发明申请
    Method for Controlling Electron Beam in Multi-Microcolumn and Multi-Microcolumn Using The Same 有权
    用于控制多微柱和多微柱中的电子束的方法

    公开(公告)号:US20100019166A1

    公开(公告)日:2010-01-28

    申请号:US11571695

    申请日:2005-07-05

    Abstract: Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage is uniformly or differentially applied to each electron emitter or extractor. The same control voltage or different voltages are applied to a region at coordinates in a control division area of each extractor to deflect the electron beams. Lens layers not corresponding to the extractors are collectively or individually controlled so as to efficiently control the electron beams of the unit microcolumn. Further, a multi-microcolumn using the method is provided.

    Abstract translation: 提供了一种用于控制多微柱中的电子束的方法,其中具有电子发射器,透镜和偏转器的单元微柱以n×m矩阵排列。 电压均匀或差分施加到每个电子发射器或提取器。 将相同的控制电压或不同的电压施加到每个提取器的控制分割区域中的坐标处的区域以偏转电子束。 不对应于提取器的透镜层被集体地或单独地控制,以便有效地控制单元微柱的电子束。 此外,提供了使用该方法的多微柱。

    ELONGATED LIFETIME X-RAY METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM
    99.
    发明申请
    ELONGATED LIFETIME X-RAY METHOD AND APPARATUS USED IN CONJUNCTION WITH A CHARGED PARTICLE CANCER THERAPY SYSTEM 有权
    连续使用充电颗粒癌治疗系统的长寿命X射线法和装置

    公开(公告)号:US20100008469A1

    公开(公告)日:2010-01-14

    申请号:US12492515

    申请日:2009-06-26

    Inventor: Vladimir Balakin

    Abstract: The system uses an X-ray imaging system having an elongated lifetime. Further, the system uses an X-ray beam that lies in substantially the same path as a charged particle beam path of a particle beam cancer therapy system. The system creates an electron beam that strikes an X-ray generation source located proximate to the charged particle beam path. By generating the X-rays near the charged particle beam path, an X-ray path running collinear, in parallel with, and/or substantially in contact with the charged particle beam path is created. The system then collects X-ray images of localized body tissue region about a cancerous tumor. Since, the X-ray path is essentially the charged particle beam path, the generated image is usable for precisely target the tumor with a charged particle beam.

    Abstract translation: 该系统使用具有延长寿命的X射线成像系统。 此外,该系统使用位于与粒子束癌治疗系统的带电粒子束路径基本相同的路径中的X射线束。 该系统产生电子束,该电子束撞击位于带电粒子束路径附近的X射线产生源。 通过在带电粒子束路径附近产生X射线,产生与带电粒子束路径并联并且/或基本上与带电粒子束路径接触的X射线路径。 然后系统收集关于癌性肿瘤的局部的身体组织区域的X射线图像。 由于X射线路径基本上是带电粒子束路径,所以生成的图像可用于用带电粒子束精确地靶向肿瘤。

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