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公开(公告)号:US20190285474A1
公开(公告)日:2019-09-19
申请号:US16359911
申请日:2019-03-20
Applicant: IMEC
Inventor: Nicolaas Tack , Andy Lambrechts , Luc Haspeslagh
Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non-monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
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公开(公告)号:US10365221B2
公开(公告)日:2019-07-30
申请号:US15925596
申请日:2018-03-19
Inventor: Haibo Li , Wenhua Luo , Gan Li , Yuejiao Gu , Guangfeng Zhang , Pengfei Yang
Abstract: Aspects of Raman spectrum plane imaging device(s), belonging to the technical field of Raman spectra, are disclosed. In one example, a Raman spectrum plane imaging device may comprise a laser generation apparatus capable of adjusting an output wavelength, a light filtering apparatus, and a planar array detector. Laser light beams emitted by such laser generation apparatus may irradiate on a surface of a sample in a planar illuminating manner. According to systems herein, Raman scattered light generated by the sample under the excitation of the laser light beams is incident on the light filtering apparatus and is imaged on the planar array detector after selectively passing through the light filtering apparatus, to be received by the planar array detector. In some implementations, the light filtering apparatus may comprise an F-P interference device and a band-pass light filter.
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公开(公告)号:US10359551B2
公开(公告)日:2019-07-23
申请号:US13964169
申请日:2013-08-12
Applicant: Axsun Technologies, Inc.
Inventor: Mark E. Kuznetsov , Ranko Galeb
Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example. When metal is added to the optical coating, the non-reflected portion of the light is absorbed by the metal and is not transmitted to the substrate or outside the cavity. Hybrid metal-dielectric coatings have broader and more uniform spectral reflection. Tunable lasers with performance enhanced by the hybrid metal-dielectric coatings can be used in optical coherence tomography and spectroscopic analysis applications.
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公开(公告)号:US20190196294A1
公开(公告)日:2019-06-27
申请号:US15855242
申请日:2017-12-27
Applicant: Elenion Technologies, LLC
Inventor: Yang Liu , Yangjin Ma , Ran Ding , Thomas Wetteland Baehr-Jones , Saeed Fathololoumi , Kishore Padmaraju
Abstract: Conventionally, wavelength locking and monitoring has been achieved used various components, including calibrated etalon filters, gratings, and arrays of color filters, which offer fairly bulky solutions that require complicated controls. An improved on-chip wavelength monitor comprises: a combination comb filter comprising a plurality of comb filters, each for receiving a test beams, and each comb filter including a substantially different FSR, e.g. 10× to 20× the next closest FSR. A controller dithers a phase tuning section of each comb filter to generate a maximum or minimum output in a corresponding photodetector indicative of the wavelength of the test signal.
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公开(公告)号:US10323985B2
公开(公告)日:2019-06-18
申请号:US15793800
申请日:2017-10-25
Applicant: TruTag Technologies, Inc.
Inventor: Ron R. Nissim , Timothy Learmonth , Mark Hsu , Hod Finkelstein
Abstract: A system for determining a calibrated spectral measurement includes a tunable Fabry-Perot etalon, a detector, and a processor. The tunable Fabry-Perot etalon has a settable gap. The detector measures light intensity. The processor is configured to determine the calibrated spectral measurement. The calibrated spectral measurement is based at least in part on a measurement set of detected light intensities for a plurality of settable gaps and a reconstruction matrix. The reconstruction matrix is based at least in part on calibration measurements. For a calibration measurement, a settable gap is selected and a set of input monochromatic source wavelengths is used to measure responses at a detector after transmission through the Fabry-Perot etalon. Each input monochromatic source wavelength is also measured using a radiometer to scale detector measurements.
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公开(公告)号:US20190170576A1
公开(公告)日:2019-06-06
申请号:US16313721
申请日:2017-06-30
Inventor: Nicolas GUERINEAU , Etienne LE COARER , Yann FERREC , Florence DE LA BARRIERE
Abstract: A spectral imager, including: a photodetector including a plurality of photosensitive sites exposed on a photosensitive surface; a collimating lens including an intermediate focal plane; an array of interferometers including two main waves, each including a cavity defined by two faces; an array of microlenses arranged in a plane parallel to the photosensitive surface, each microlens paired with an interferometer to form an optical pair, including an image focal plane coinciding with the photosensitive surface and facing a section of the photosensitive surface.
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公开(公告)号:US20190154507A1
公开(公告)日:2019-05-23
申请号:US16259007
申请日:2019-01-28
Applicant: Seiko Epson Corporation
Inventor: Tsugio GOMI
CPC classification number: G01J3/46 , B41F33/0036 , G01J3/26 , G01J3/50 , G01J3/524
Abstract: A measuring device is a measuring device that performs colorimetry of an evaluation patch formed on a medium and a paper white patch that is a portion exposed by the medium. The measuring device has a light source portion that irradiates the medium with an illumination light, a measurement portion that acquires an amount of light from the medium as a measurement value, a memory that holds a paper white standard value that is a reference measurement value of the paper white patch, and a colorimetry unit that corrects a measurement value of the evaluation patch based on the measurement value of the paper white patch and the paper white standard value. Even in a case where a measurement position is changed, a reflectance of the evaluation patch is accurately calculated and a chromaticity of the evaluation patch can be accurately acquired.
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公开(公告)号:US20190154503A1
公开(公告)日:2019-05-23
申请号:US16181783
申请日:2018-11-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Youngzoon YOON , Hyochul KIM , Younggeun ROH
CPC classification number: G01J3/2803 , A61B5/0075 , A61B5/1455 , A61B5/6832 , A61B5/7203 , A61B5/7221 , A61B2562/0233 , A61B2562/046 , A61B2562/185 , G01J3/10 , G01J3/26 , G01J2003/2873
Abstract: An optical signal processing apparatus may acquire a plurality of image signals using an optical signal output from a light source toward a target, and may determine a characteristic of a target by using the obtained plurality of image signals. The obtained image signal may be obtained from a plurality of sensor arrays including a plurality of image sensors.
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公开(公告)号:US10288484B2
公开(公告)日:2019-05-14
申请号:US16004942
申请日:2018-06-11
Applicant: Cymer, LLC
Inventor: Zhongquan Zhao , Brian Edward King , Thomas Patrick Duffey
IPC: G01J1/42 , G01J3/50 , G01J3/02 , G01J3/26 , G01J11/00 , G03F7/20 , H01S4/00 , H01S3/23 , G01J1/04 , H01S3/08 , H01S3/225 , H01S3/00
Abstract: A metrology system is used for measuring a spectral feature of a pulsed light beam. The metrology system includes: a beam homogenizer in the path of the pulsed light beam, the beam homogenizer having an array of wavefront modification cells, with each cell having a surface area that matches a size of at least one of the spatial modes of the light beam; an optical frequency separation apparatus in the path of the pulsed light beam exiting the beam homogenizer, wherein the optical frequency separation apparatus is configured to interact with the pulsed light beam and to output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; and at least one sensor that receives and senses the output spatial components.
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公开(公告)号:US10288483B2
公开(公告)日:2019-05-14
申请号:US15651935
申请日:2017-07-17
Applicant: Cymer, LLC
Inventor: Brian Edward King
Abstract: A method is performed for estimating the optical spectrum of a light beam. The method includes: projecting the light beam onto distinct spatial areas of a spectrometer, wherein each spatial area receives a different filtered version of the optical spectrum; detecting a characteristic of the projected light beam at each of the distinct spatial areas of the spectrometer; receiving a two-dimensional matrix in which each entry of the matrix provides a relationship between one or more spatial areas and each spectral feature, wherein the two-dimensional matrix is related to the input-output relationship of the spectrometer; and estimating the optical spectrum of the light beam based on an analysis that uses both the detected light beam characteristics and the received two-dimensional matrix.
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