公开(公告)号：US4650511A

公开(公告)日：1987-03-17

申请号：US739876

申请日：1985-05-31

Applicant: Kazuo Koya ,  Yoshiharu Konya

Inventor： Kazuo Koya ,  Yoshiharu Konya

IPC: C03B19/14 ,  C03B37/014 ,  C03C13/04 ,  C03C23/00 ,  G02B6/00 ,  C03B29/00

CPC classification number: C03C23/0085 ,  C03B19/1453 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16

Abstract: The invention provides an efficient method for the dehydration, i.e. removal of silicon-bonded hydroxy groups, of a porous silica body before vitrification as a precursor of quartz glass-made optical fibers obtained by the flame hydrolysis of a silicon compound and deposition of fine silica particles formed therefrom. The problems and disadvantages accompanying the use of conventional dehydrating agents can be solved in the invention by heating the hydroxy-containing porous silica body at 1000.degree. to 1300.degree. C. in an atmosphere containing thionyl fluoride or sulfuryl fluoride as the dehydrating agent which is also effective as a dechlorinating agent so that the optical fibers prepared from the quartz glass material of the invention are highly transparent and resistant against hydrogen-containing atmosphere at elevated temperatures.

Abstract translation: 本发明提供了一种有效的方法，用于在玻璃化之前将多孔二氧化硅体脱水，即除去与硅键合的羟基，作为通过硅化合物的火焰水解获得的石英玻璃制成的光纤的前体和沉积细二氧化硅 由此形成的颗粒。 使用常规脱水剂的问题和缺点可以在本发明中通过在含有亚硫酰氟或硫酰氟的气氛中在1000℃至1300℃下加热含羟基的多孔二氧化硅作为脱水剂来解决，该脱水剂也是 作为脱氯剂有效，使得由本发明的石英玻璃材料制备的光纤是高度透明的并且在高温下对含氢气氛具有抗性。

公开(公告)号：US4162908A

公开(公告)日：1979-07-31

申请号：US874965

申请日：1978-02-03

Applicant: Karlheinz Rau ,  Fritz Simmat ,  Albert Muhlich ,  Norbert Treber

Inventor： Karlheinz Rau ,  Fritz Simmat ,  Albert Muhlich ,  Norbert Treber

IPC: C03B37/014 ,  C03B37/018 ,  C03C3/06 ,  C03C17/00 ,  C03C17/02 ,  C03C25/02

CPC classification number: C03B37/01426 ,  C03B37/01413 ,  C03B37/01823 ,  C03C3/06 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2207/85 ,  C03C2201/12 ,  C03C2203/40 ,  Y10S65/16

Abstract: An improvement in a method for producing a synthetic hydroxyl ion-free quartz glass wherein a hydrogen free silicon compound is heated in a hydrogen-free gas stream while the gas stream is passed through an induction coupled plasma burner, the gas stream containing elemental and/or bound oxygen and the oxidation product is deposited on a refractory support as a vitreous mass, the improvement lying in including in the gas stream a gaseous hydrogen-free, thermally decomposable compound which yields fluorine in an amount of at least 500 gms. per kilogram of silica to be produced; an apparatus for producing a synthetic OH ion-free quartz glass comprising an induction coupled plasma burner which burner has disposed thereabout 3 concentric quartz glass tubes disposed in stepped configuration of which the outermost tube is the longest and the innermost tube is the shortest. The apparatus includes means for passing through the innermost tube a hydrogen-free gas stream containing elemental oxygen and/or bound oxygen together with a gaseous hydrogen free thermally decomposable compound which yields fluorine. The apparatus further contains means for passing a separating gas such as oxygen through the space defined by the innermost tube and the middle tube and the middle tube and the outermost tube.

Abstract translation: 一种制备合成的无羟基离子的石英玻璃的方法的改进，其中在气流通过感应耦合等离子体燃烧器的同时，在无氢气体气流中加热无氢硅化合物，所述气流含有元素和/ 或结合氧，并且氧化产物作为玻璃体堆积在耐火载体上，其改进在于在气流中包含无气态的可热分解化合物，其产生至少500gms的量的氟。 每千克生产的二氧化硅; 一种用于生产合成的无OH离子的石英玻璃的装置，包括感应耦合等离子体燃烧器，该燃烧器设置在三个同心的石英玻璃管上，该同心石英玻璃管以阶梯状构造，其中最外面的管是最长的并且最内的管是最短的。 该装置包括用于通过最内管将含有元素氧和/或结合氧的无氢气体气流与产生氟的无氢气的可热分解化合物通过的装置。 该装置还包括用于使诸如氧的分离气体通过由最内管和中管以及中管和最外管限定的空间的装置。

公开(公告)号：US20240034667A1

公开(公告)日：2024-02-01

申请号：US18377484

申请日：2023-10-06

Applicant: CORNING INCORPORATED

Inventor： Steven Bruce Dawes ,  Douglas Hull Jennings ,  Pushkar Tandon

IPC: C03C3/06 ,  C03B19/14 ,  C03B37/014 ,  C03B19/06 ,  C03B25/02 ,  C03B37/012 ,  C03B37/018 ,  G02B6/036

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B37/01453 ,  C03B37/01446 ,  C03B19/066 ,  C03B25/02 ,  C03B37/01282 ,  C03B37/014 ,  C03B37/01853 ,  G02B6/036 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2201/20 ,  C03B2201/075

Abstract: A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 μm and about 0.25 μm. The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogen-containing gas in the closed system at a temperature of less than about 1200° C.

公开(公告)号：US11795097B2

公开(公告)日：2023-10-24

申请号：US16869076

申请日：2020-05-07

Applicant: FURUKAWA ELECTRIC CO., LTD.

Inventor： Keiichi Aiso ,  Tomohiro Gonda

IPC: C03B37/014 ,  C03B37/012 ,  C03B37/018 ,  C03B37/025

CPC classification number: C03B37/01446 ,  C03B37/014 ,  C03B37/018 ,  C03B37/01228 ,  C03B37/01231 ,  C03B37/01248 ,  C03B37/01257 ,  C03B37/01413 ,  C03B37/01466 ,  C03B37/025 ,  C03B2201/075 ,  C03B2201/50 ,  C03B2207/34

Abstract: A method of producing an optical fiber preform includes a silica glass body forming step of forming a silica glass body to be at least a portion of a core portion. The method includes an alkali-metal-doped silica glass body forming step of forming an alkali-metal-doped silica glass body doped with an alkali metal around the silica glass body such that the alkali-metal-doped silica glass body contacts the silica glass body. The method further includes a diffusing step of diffusing the alkali metal from the alkali-metal-doped silica glass body to the silica glass body by a heat treatment.

公开(公告)号：US09919946B2

公开(公告)日：2018-03-20

申请号：US15412283

申请日：2017-01-23

Applicant: Corning Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan de Paor ,  Pushkar Tandon ,  Li Yang

IPC: G02B6/02 ,  C03B37/014 ,  C03B37/012 ,  C03B37/027 ,  G02B6/036

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

公开(公告)号：US20170362115A1

公开(公告)日：2017-12-21

申请号：US15529583

申请日：2015-11-24

Applicant: Corning Incorporated

Inventor： Steven Bruce Dawes ,  Douglas Hull Jennings ,  Pushkar Tandon

IPC: C03C3/06 ,  C03B37/014 ,  C03B25/02 ,  C03B19/14 ,  C03B37/012 ,  G02B6/036 ,  C03B37/018

CPC classification number: C03C3/06 ,  C03B19/066 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B37/01282 ,  C03B37/014 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/01853 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/42 ,  G02B6/036

Abstract: A method of forming an optical element is provided. The method includes producing silica-based soot particles using chemical vapor deposition, the silica-based soot particles having an average particle size of between about 0.05 μm and about 0.25 μm. The method also includes forming a soot compact from the silica-based soot particles and doping the soot compact with a halogen in a closed system by contacting the silica-based soot compact with a halogencontaining gas in the closed system at a temperature of less than about 1200° C.

公开(公告)号：US09834468B2

公开(公告)日：2017-12-05

申请号：US14769382

申请日：2014-02-19

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Bodo Kuehn

IPC: F21V9/00 ,  G02B5/02 ,  G02C7/10 ,  G02F1/361 ,  G03B11/00 ,  C03C3/06 ,  C03B19/14 ,  C03B32/00 ,  G02B1/00 ,  G02B1/02 ,  C03B32/02 ,  C03C4/04 ,  C03C15/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B32/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03C4/04 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2203/54 ,  C03C2204/00 ,  G02B1/00 ,  G02B1/02 ,  Y02P40/57

Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193 nm when measured using the applied wavelength of 193 nm and a second measured value M633 nm when measured using a measured wavelength of 633 nm. The ratio M193 nm/M633 nm is less than 1.7.

公开(公告)号：US20170129800A1

公开(公告)日：2017-05-11

申请号：US15412283

申请日：2017-01-23

Applicant: Cornng Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan dePaor ,  Pushkar Tandon ,  Li Yang

IPC: C03B37/014 ,  C03B37/027 ,  G02B6/036 ,  C03B37/012

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

公开(公告)号：US09611169B2

公开(公告)日：2017-04-04

申请号：US14958024

申请日：2015-12-03

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03B19/14 ,  C03B25/02 ,  C03C3/112 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

Abstract: A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

公开(公告)号：US09568818B2

公开(公告)日：2017-02-14

申请号：US14862707

申请日：2015-09-23

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Stefan Ochs ,  Klaus Becker

IPC: C03C3/06 ,  G03F1/22 ,  C03B19/06 ,  C03C3/04 ,  C03B19/14 ,  C03C23/00 ,  C03B32/00 ,  G03F7/00

CPC classification number: G03F1/22 ,  C03B19/06 ,  C03B19/14 ,  C03B19/1453 ,  C03B19/1461 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/04 ,  C03C3/06 ,  C03C21/007 ,  C03C23/00 ,  C03C23/007 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54 ,  G03F1/24 ,  G03F1/60 ,  G03F7/00

Abstract: A method for producing a silica glass blank co-doped with titanium and fluorine for use in EUV lithography includes (a) producing a TiO2—SiO2 soot body by flame hydrolysis of silicon- and titanium-containing precursor substances, (b) fluorinating the TiO2—SiO2 soot body to form a fluorine-doped TiO2—SiO2 soot body, (c) treating the fluorine-doped TiO2—SiO2 soot body in a water vapor-containing atmosphere to form a conditioned soot body, and (d) vitrifying the conditioned soot body to form the blank. The blank has an internal transmission of at least 60% in the wavelength range of 400 to 700 nm at a sample thickness of 10 mm, a mean OH content in the range of 10 to 100 wt. ppm and a mean fluorine content in the range of 2,500 to 10,000 wt. ppm. Titanium is present in the blank in the oxidation forms Ti3+ and Ti4+.

Abstract translation: 用于EUV光刻的共同掺杂钛和氟的二氧化硅玻璃毛坯的制造方法包括（a）通过含硅和钛的前体物质的火焰水解制备TiO 2 -SiO 2烟炱体，（b）氟化TiO 2 -SiO2烟灰体，形成氟掺杂的TiO 2 -SiO 2烟炱体，（c）在含水蒸气的气氛中处理氟掺杂的TiO 2 -SiO 2烟炱体以形成调节的烟灰体，（d） 烟灰体形成空白。 空白样品厚度为10mm时，在400〜700nm的波长范围内具有至少60％的内透射率，10〜100wt。范围内的平均OH含量。 ppm，平均氟含量在2500至10,000重量％的范围内。 ppm。 钛在氧化形式Ti3 +和Ti4 +中存在于坯料中。