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公开(公告)号：US10529546B2
公开(公告)日：2020-01-07
申请号：US14975415
申请日：2015-12-18
Inventor： John Chambers , Peter Maschwitz
Abstract: A method of extracting and accelerating ions is provided. The method includes providing a ion source. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice, the first and second hollow cathodes being disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The method further includes generating a plasma using the first hollow cathode and the second hollow cathode. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counter-electrode. The method further includes extracting and accelerating ions. Each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions.
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公开(公告)号：US10529532B2
公开(公告)日：2020-01-07
申请号：US16381512
申请日：2019-04-11
Applicant: ULVAC, INC.
Inventor： Takumi Yuze , Toshihiro Terasawa , Naruyasu Sasaki
IPC: H01J37/08 , H01J27/08 , H01J49/10 , H01J37/30 , H01J37/317 , H01J27/02 , H01L21/265
Abstract: An ion source having an ion generation container configured to generate ions by reacting ionized gas introduced into the container via a tubular gas introduction pipe with an ion source material emitted in the container. The gas introduction pipe is configured to introduce the ionized gas into an inner space of the gas introduction pipe via a gas supply pipe. In the inner space of the gas introduction pipe, a detachable cooling trap member is disposed and includes a cooling trap portion configured to cool and trap a byproduct produced in the ion generation container. The cooling trap portion is disposed near a supply-side leading end of the gas supply pipe in the inner space of the gas introduction pipe and is not contact with an interior wall face of the gas introduction pipe.
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公开(公告)号：US10483095B2
公开(公告)日：2019-11-19
申请号：US14975415
申请日：2015-12-18
Inventor： John Chambers , Peter Maschwitz
Abstract: A method of extracting and accelerating ions is provided. The method includes providing a ion source. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice, the first and second hollow cathodes being disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The method further includes generating a plasma using the first hollow cathode and the second hollow cathode. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counter-electrode. The method further includes extracting and accelerating ions. Each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions.
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104.发明授权公开(公告)号：US09934928B2
公开(公告)日：2018-04-03
申请号：US14713573
申请日：2015-05-15
Inventor： Shengwu Chang , Jeff Burgess , William Leavitt , Michael St Peter , Matt Mosher , Joe Olson , Frank Sinclair
CPC classification number: H01J27/08 , H01J3/04 , H01J5/02 , H01J9/18 , H01J9/385 , H01J27/024 , H01J37/08
Abstract: Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.
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公开(公告)号：US09659755B2
公开(公告)日：2017-05-23
申请号：US15155504
申请日：2016-05-16
Inventor： Masateru Sato
CPC classification number: H01J37/32669 , H01J37/32055 , H01J37/3233 , H01J37/32357 , H01J37/32422 , H01J37/3244 , H01J37/32458 , H01J37/32541 , H01J37/3255 , H01J2237/3365
Abstract: A plasma generator includes: an arc chamber having a plasma generation region in which plasma is generated in the inside thereof; a magnetic field generator configured to apply a magnetic field to the plasma generation region; and a cathode configured to extend in an axial direction along an applying direction of the magnetic field applied to the plasma generation region and provided with a cathode cap that emits thermal electrons at a front end thereof. The cathode cap protrudes toward the inside of the arc chamber in the axial direction and has a shape of which a width in the radial direction perpendicular to the axial direction becomes smaller toward the inside of the arc chamber.
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Patent Agency Ranking
公开(公告)号：US20150179385A1
公开(公告)日：2015-06-25
申请号：US14582696
申请日：2014-12-24
Applicant: SEN Corporation
Inventor： Masateru Sato
CPC classification number: H01J27/08 , H01J27/022 , H01J37/08 , H01J37/3171 , H01J2237/061 , H01J2237/082
Abstract: An ion generator includes: an arc chamber; a repeller that includes a repeller plate provided within the arc chamber and a repeller extension portion inserted through a through hole communicating the inside and the outside of the arc chamber; and a supporting structure that is provided outside the arc chamber and that supports the repeller so that a gap is ensured between the repeller extension portion and an inner wall of the through hole. The supporting structure includes a cover member that forms, outside the arc chamber, a small chamber communicating with the gap, and an insulation member that electrically insulates the arc chamber and the repeller from each other.
Abstract translation: 离子发生器包括：电弧室; 包括设置在所述电弧室内的推斥板的推斥器和通过连通所述电弧室的内部和外部的通孔插入的推斥板延伸部; 以及支撑结构，其设置在电弧室外部并且支撑推斥板，使得在排斥器延伸部分和通孔的内壁之间保证间隙。 支撑结构包括在电弧室外形成与间隙连通的小室的盖构件和使电弧室和排斥体彼此电绝缘的绝缘构件。
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公开(公告)号：US20150083931A1
公开(公告)日：2015-03-26
申请号：US14386040
申请日：2013-03-21
Applicant: Sharp Kabushiki Kaisha
Inventor： Noriko Temporin , Shohgo Yukawa , Makoto Kitahira , Shigeyuki Harada
IPC: H01J27/08
Abstract: A discharge electrode 5 for generating ions and a high-voltage generating circuit unit 2 that supplies the discharge electrode 5 with a high voltage are housed in a housing 3. A discharge opening 12 for discharging the generated ions is formed in the housing 3. The housing 3 is covered by an exterior case 15. The exterior case 15 is connected to the high-voltage generating circuit unit 2 and functions as an induction electrode. A passage opening 33 leading to the discharge opening 12 is formed in the exterior case 15. An insulating sheet 36 covers the periphery of the passage opening 33 in the exterior case 15 facing a space into which the ions are discharged so that the discharged ions do not attach to the exterior case 15. Decrease in the amount of discharged ions can be prevented while using a peripheral component of the discharge electrode 5 as the induction electrode.
Abstract translation: 用于产生离子的放电电极5和向放电电极5提供高电压的高压发生电路单元2容纳在壳体3中。在壳体3中形成用于放电所产生的离子的放电开口12。 壳体3被外部壳体15覆盖。外部壳体15连接到高压发生电路单元2并用作感应电极。 在外部壳体15上形成有通向排出口12的通道开口33.绝缘片36覆盖外部壳体15中的通道开口33的周边，面向离开的空间，排出的离子 不附接到外壳15.使用放电电极5的周边部件作为感应电极时，可以防止放电离子的量的减少。
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公开(公告)号：US08890070B2
公开(公告)日：2014-11-18
申请号：US13990581
申请日：2011-08-29
Applicant: Yoshinari Fukada
Inventor： Yoshinari Fukada
Abstract: In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of the discharge electrode 44 is performed by repulsive force of a corona discharge generated by supplying a high voltage to the fixed end 44a. Therefore, in comparison with a discharge electrode composed of a bundle of thin wires, it is possible to significantly reduce dust emission from the free end 44b of the discharge electrode 44, and to further improve the ion generator 30 in maintenance interval. Since the discharge electrode 44 is compose of one wire, it is possible to reduce the discharge electrode 44 in size, easily observe the state of the discharge electrode 44, and simplify its maintenance. Since the discharge electrode 44 performs a turning motion, it is possible to transport the generated air ions EI to a wide area of a packaging film 10, and to enhance ionizing efficiency.
Abstract translation: 在离子发生器中，将由一根导线构成的柔性放电电极44设置在基座43上，放电电极44的自由端44b围绕放电电极44的固定端44a的转动运动通过排斥力 通过向固定端44a提供高电压而产生的电晕放电。 因此，与由一束细线组成的放电电极相比，可以显着地减少来自放电电极44的自由端44b的灰尘的发射，并且在维护间隔中进一步改善离子发生器30。 由于放电电极44由一根导线组成，所以可以减小放电电极44的尺寸，容易观察放电电极44的状态，并简化其维护。 由于放电电极44进行转动运动，所以可以将产生的空气离子EI输送到包装膜10的广泛区域，并且提高电离效率。
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公开(公告)号：US08822912B2
公开(公告)日：2014-09-02
申请号：US13720677
申请日：2012-12-19
Applicant: Schlumberger Technology Corporation
Inventor： Jani Reijonen , Irina Molodetsky , Kenneth E. Stephenson
CPC classification number: H01J27/08
Abstract: An ion source includes a cathode to emit electrons, a cathode grid downstream of the cathode, a reflector electrode downstream of the cathode grid, reflector grid radially inward of the reflector electrode, and an extractor electrode downstream of the reflector electrode, the extractor electrode and cathode grid defining an ionization region therebetween. The cathode and the cathode grid have a first voltage difference such the electrons are accelerated through the cathode grid and into the ionization region on a trajectory toward the extractor electrode. The reflector grid and the extractor electrode have a second voltage difference less than the first voltage difference such that the electrons slow as they near the extractor electrode and are repelled on a trajectory toward the reflector electrode. The reflector electrode has a negative potential such that the electrons are repelled away from the reflector electrode and into the ionization region.
Abstract translation: 离子源包括发射电子的阴极，阴极下游的阴极栅极，阴极栅极下游的反射器电极，反射器电极的径向内侧的反射器栅极和反射器电极下游的提取器电极，提取器电极和 阴极栅极限定其间的电离区域。 阴极和阴极栅极具有第一电压差，使得电子通过阴极栅极加速并进入到提取器电极的轨迹上的电离区域。 反射器栅格和提取器电极具有小于第一电压差的第二电压差，使得电子随着它们靠近提取器电极而减慢并且在朝向反射器电极的轨迹上被排斥。 反射器电极具有负电位，使得电子被反射离开反射器电极并进入电离区域。
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公开(公告)号：US20140145581A1
公开(公告)日：2014-05-29
申请号：US13689148
申请日：2012-11-29
Applicant: Manuel A. Jerez , Carlos F. Borges
Inventor： Manuel A. Jerez , Carlos F. Borges
CPC classification number: H01J27/08 , H01J37/08 , H01J37/3171 , H01J2237/002 , H01J2237/045 , H01J2237/083
Abstract: The support and electrode assemblies of the ion implanter are cooled by circulating a coolant through these parts during operation. The support for the arc chamber includes a one piece block of aluminum through which coolant passes and a hollow rectangular post on which the arc chamber sits with a space therebetween.
Abstract translation: 离子注入机的支撑和电极组件在运行期间通过这些部件循环冷却。 电弧室的支撑件包括一块铝制的冷却剂通过的块和一个中空的矩形柱，电弧室在其上放置一个空间。
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