公开(公告)号：US07635658B2

公开(公告)日：2009-12-22

申请号：US11583619

申请日：2006-10-19

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

IPC: C03C3/06 ,  C03C15/00 ,  C03B19/06 ,  C03B37/00 ,  C03B37/014

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US07585598B2

公开(公告)日：2009-09-08

申请号：US11634270

申请日：2006-12-06

Applicant: Shigeru Maida ,  Motoyuki Yamada

Inventor： Shigeru Maida ,  Motoyuki Yamada

IPC: G03F1/00 ,  C03C3/06 ,  G02B1/00

CPC classification number: C03B19/1407 ,  B82Y10/00 ,  B82Y40/00 ,  C03B19/1415 ,  C03B19/1446 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  G03F1/24 ,  G03F1/60 ,  G21K2201/067

Abstract: A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that it provides a high surface accuracy as required for EUV lithographic members, typically EUV lithographic photomask substrates.

Abstract translation: 在二氧化钛浓度梯度小于或等于0.01重量％/重量的情况下，含有3-12重量％的二氧化钛的二氧化钛掺杂的石英玻璃，并且对于440nm波长具有至多30％的表观透射率，厚度为6.35mm 具有这样的同质性，其提供了EUV光刻元件（通常为EUV光刻光掩模基板）所需的高表面精度。

公开(公告)号：US20090180174A1

公开(公告)日：2009-07-16

申请号：US12352067

申请日：2009-01-12

Applicant: Tetsuya Haruna ,  Manabu Ishikawa

Inventor： Tetsuya Haruna ,  Manabu Ishikawa

IPC: H01S3/091 ,  C03B37/01 ,  G02B6/02 ,  H01S3/14

CPC classification number: C03C3/06 ,  C03B37/01807 ,  C03B37/01853 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/36 ,  C03C4/12 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/28 ,  C03C2201/36 ,  C03C2203/44 ,  H01S3/06716 ,  H01S3/176

Abstract: A first step, in which P2O5-containing glass is deposited inside a silica glass pipe, and a second step, in which a Cl2-containing gas is introduced into the pipe and the P2O5-containing glass is dehydrated by heating the pipe, are repeated alternately. A third step, in which glass that does not contain P2O5 is deposited on the inside of the silica glass pipe, may further be provided such that the first step, the second step, and the third step are repeatedly performed in this order. A rare-earth-doped optical fiber, which has a attenuation of 15 dB/km or less at a wavelength of 1200 nm, comprises a core region and a cladding region enclosing the core region, wherein the core region includes phosphorus of 3 wt % or more, aluminum of 0.3 wt % or more, a rare-earth element of 500 wtppm or more, and chlorine of 0.03 wt % or more, and the cladding region has a refractive index that is lower than the refractive index of the core region.

Abstract translation: 第一步，其中含有P2O5的玻璃沉积在石英玻璃管内，第二步是将含有Cl 2的气体引入到管中并且含P2O5的玻璃通过加热管而被脱水 交替。 可以进一步设置第三步骤，其中不含P2O5的玻璃沉积在石英玻璃管的内部，可以进一步设置使得第一步骤，第二步骤和第三步骤以该顺序重复进行。 在1200nm的波长下具有15dB / km以下的衰减的稀土掺杂光纤包括芯区域和包围芯区域的包层区域，其中芯区域包含3重量％的磷， 以上，0.3重量％以上的铝，500重量ppm以上的稀土元素和0.03重量％以上的氯，并且包层区域的折射率低于芯部区域的折射率 。

公开(公告)号：US07506521B2

公开(公告)日：2009-03-24

申请号：US11148504

申请日：2005-06-08

Applicant: Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Susan Lee Schiefelbein

Inventor： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Susan Lee Schiefelbein

IPC: C03B20/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  G03F7/70958

Abstract: Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.

Abstract translation: 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造该材料的烟灰 - 玻璃工艺包括在H 2 O和/或O 2存在下固化烟灰预制件的步骤。

公开(公告)号：US07469559B2

公开(公告)日：2008-12-30

申请号：US11004027

申请日：2004-12-02

Applicant: Laura J Ball ,  Bruno P M Baney ,  Dana C Bookbinder ,  Keith L House ,  Rostislav R Khrapko ,  Susan L Schiefelbein ,  Lisa A Moore

Inventor： Laura J Ball ,  Bruno P M Baney ,  Dana C Bookbinder ,  Keith L House ,  Rostislav R Khrapko ,  Susan L Schiefelbein ,  Lisa A Moore

IPC: C03C13/04

CPC classification number: C03C3/06 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01426 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01892 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/26 ,  C03B2207/30 ,  C03B2207/90 ,  C03C25/602 ,  C03C25/607 ,  C03C25/68 ,  C03C2201/11 ,  C03C2201/23 ,  C03C2201/50 ,  C03C2203/50 ,  G02B6/02

Abstract: A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.

Abstract translation: 公开了一种通过将碱金属扩散到玻璃制品的表面中形成掺杂碱金属氧化物的光纤的方法。 石英玻璃制品可以是管或棒的形式，或者是管或棒的集合。 含有碱金属的二氧化硅玻璃制品和可能已经无意地扩散到玻璃制品中的杂质被蚀刻到足以除去杂质的深度。 石英玻璃制品可以进一步加工以形成完整的光纤预型件。 当预成型件被拉入光纤时，表现出低的衰减。

公开(公告)号：US20080131794A1

公开(公告)日：2008-06-05

申请号：US11981434

申请日：2007-10-31

Applicant: Dana Craig Bookbinder ,  Michael Lucien Genier ,  Lisa Anne Moore

Inventor： Dana Craig Bookbinder ,  Michael Lucien Genier ,  Lisa Anne Moore

IPC: G02B13/14 ,  C03C3/112 ,  G02B6/10 ,  G03F1/00 ,  H01J5/04

CPC classification number: G02B6/102 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/22 ,  C03C3/06 ,  C03C13/047 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2201/50 ,  G03F1/60 ,  G03F7/70958 ,  H01J61/302

Abstract: An optical member comprising OD-doped silica glass, optionally doped with fluorine. The optical member is particularly advantageous for use in connection with radiation having a wavelength shorter than about 248 nm. In certain embodiments the optical member can be advantageously used for wavelength as short as about 157 nm.

Abstract translation: 一种光学部件，包括掺杂有掺杂二氧化硅的石英玻璃，任选掺杂氟。 光学构件特别有利于与波长短于约248nm的辐射结合使用。 在某些实施方案中，光学构件可有利地用于短至约157nm的波长。

公开(公告)号：US20080057291A1

公开(公告)日：2008-03-06

申请号：US11514997

申请日：2006-09-05

Applicant: Yoshiaki Ikuta ,  Shinya Kikugawa

Inventor： Yoshiaki Ikuta ,  Shinya Kikugawa

IPC: B32B3/00

CPC classification number: C03B19/1453 ,  C03B2201/03 ,  C03B2201/12 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  Y10T428/166 ,  Y10T428/249969 ,  Y10T428/252

Abstract: For a substrate having fine convexoconcave patterns on its surface, the dimensions of the convexoconcave patterns in a vertical direction of a quartz glass substrate are controlled to be uniform with extreme accuracy and over the entire substrate surface.The quartz glass substrate is made to have a fictive temperature distribution of at most 40° C. and a halogen concentration of less than 400 ppm, and the etching rate of the surface of the quartz glass substrate is made uniform, whereby the dimensions of the convexoconcave patterns in a vertical direction of the quartz glass substrate are controlled to be uniform with good accuracy and over the entire substrate surface.

Abstract translation: 对于在其表面上具有细凹凸图案的基板，石英玻璃基板的垂直方向上的凸凹图案的尺寸被控制为以极高的精度和整个基板表面均匀。 使石英玻璃基板具有至多40℃的假想温度分布和小于400ppm的卤素浓度，并且使石英玻璃基板的表面的蚀刻速率均匀，由此， 在石英玻璃基板的垂直方向上的凸凹图案被控制为具有良好的精度和整个基板表面的均匀。

公开(公告)号：US20070297735A1

公开(公告)日：2007-12-27

申请号：US11801472

申请日：2007-05-10

Applicant: Rostislav Radievich Khrapko ,  Hazel B. Matthews

Inventor： Rostislav Radievich Khrapko ,  Hazel B. Matthews

IPC: G02B6/036 ,  G02B6/02

CPC classification number: G02B6/02 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/01807 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2203/26 ,  C03B2203/29 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/50 ,  G02B6/02014 ,  G02B6/02266

Abstract: Disclosed is an optical fiber having a silica-based core comprising an alkali metal oxide selected from the group consisting of K2O, Na2O, LiO2, Rb2O, Cs2O and mixtures thereof in an average concentration in said core between about 50 and 500 ppm by weight, said core further comprising chlorine and fluorine, wherein the average concentration of fluorine in said core is greater than the average concentration of alkali metal oxide in said core and the average concentration of chlorine in said core is greater than the average concentration of alkali metal oxide in said core; and a silica-based cladding surrounding and directly adjacent the core. By appropriately selecting the concentration of alkali metal oxide dopant in the core and the cladding, a low loss optical fiber may be obtained.

Abstract translation: 公开了一种光纤，其具有二氧化硅基核，其包含选自K 2 O 2，Na 2 O，LiO 2 O 2的碱金属氧化物， 其中所述核心中的平均浓度为约50-500ppm（重量），所述核心还包含氯和/或 氟，其中所述芯中的氟的平均浓度大于所述芯中的碱金属氧化物的平均浓度，并且所述芯中的平均氯浓度大于所述芯中碱金属氧化物的平均浓度; 以及围绕并直接邻近芯的二氧化硅基包层。 通过适当地选择芯和包层中的碱金属氧化物掺杂剂的浓度，可以获得低损耗光纤。

公开(公告)号：US20060218971A1

公开(公告)日：2006-10-05

申请号：US11350286

申请日：2006-02-09

Applicant: Rolf Martin ,  Gordon von der Goenna ,  Ute Natura

Inventor： Rolf Martin ,  Gordon von der Goenna ,  Ute Natura

IPC: C03B19/06 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/20 ,  C03B2201/21 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  G03F1/60 ,  Y02P40/57

Abstract: The invention relates to a synthetic quartz glass that can be produced by direct precipitation by means of flame hydrolysis of a silicon precursor, especially a chlorine-containing silicon precursor, which quartz glass when irradiated with laser pulses at a wavelength of 193 nm at an energy density (H) of up to H=1.5 mJ/cm2 and at a repetition frequency of the laser pulses of up to R=4 kHz is characterized by the following properties: in the range of energy densities of up to 1.5 mJ/cm2, the equilibrium absorption of quartz glass rises sublinearly with the energy density for all repetition frequencies of the laser pulses; the dependency of the equilibrium absorption on the repetition frequency of the laser pulses is sublinear; and the relationship of equilibrium absorption and energy density (H) can be described as a function of H1.7; the H2 content being at least 0.2·1018 molecules/cm3. Other aspects of the invention relate to a process for producing such a synthetic quartz glass.

Abstract translation: 本发明涉及一种合成石英玻璃，其可以通过使用硅前体，特别是含氯的硅前体进行火焰水解直接沉淀来制备，该石英玻璃在能量为193nm的激光脉冲下照射时， 高达H = 1.5mJ / cm 2的密度（H）和高达R = 4kHz的激光脉冲的重复频率的特征在于以下特性：在能量密度范围内 高达1.5mJ / cm 2，石英玻璃的平衡吸收与激光脉冲的所有重复频率的能量密度成线性上升; 平衡吸收对激光脉冲重复频率的依赖性是亚线性的; 平衡吸收和能量密度（H）的关系可以描述为H <1.7的函数; H 2含量为至少0.2×10 18分子/ cm 3。 本发明的其它方面涉及一种生产这种合成石英玻璃的方法。

公开(公告)号：US07064093B2

公开(公告)日：2006-06-20

申请号：US10310276

申请日：2002-12-05

Applicant: Bodo Kühn ,  Bruno Uebbing

Inventor： Bodo Kühn ,  Bruno Uebbing

IPC: C03C3/06

CPC classification number: C03B19/1453 ,  C03B19/1415 ,  C03B2201/07 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/44 ,  C03C2203/52

Abstract: The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties: A glass structure essentially free of oxygen defect sites; a H2 content in the range of 3×1017 molecules/cm3 to 2.0×1018 molecules/cm3; an OH content in the range of 500 weight ppm to 1000 weight ppm; a SiH group content of less than 2×1017 molecules/cm3; a chlorine content in the range of 60 weight ppm to 120 weight ppm; a refractive index inhomogeneity, Δn, of less than 2 ppm; and a stress birefringence of less than 2 nm/cm. For utilization according to the invention, the quartz glass blank—in respect of its minimum and maximum hydrogen content, CH2min and CH2max, as well as its OH content COH—is in accordance with the scaling laws (2), (3) and (4), and P standing for the pulse number and ε for the energy density: CH2min[molecules/cm3]=1.0×108ε2P ,   (2) CH2max[molecules/cm3]=2×1019ε,   (3) COH[weight ppm]=1700ε[mJ/cm2]0.4±50 .   (4)