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    Streak tube with connection lead to reduce voltage propagation differences
    111.
    发明授权
    Streak tube with connection lead to reduce voltage propagation differences 有权
    带连接导线的条纹管，以减少电压传播差异

    公开(公告)号：US09368315B2

    公开(公告)日：2016-06-14

    申请号：US14354942

    申请日：2012-08-07

    Applicant: Katsuyuki Kinoshita

    Inventor： Katsuyuki Kinoshita

    IPC: H01J31/42 ,  H01J29/08 ,  H01J31/50 ,  G01J11/00 ,  H01J29/74 ,  H01J29/92

    CPC classification number: H01J31/42 ,  G01J11/00 ,  G01J2011/005 ,  H01J29/08 ,  H01J29/74 ,  H01J29/92 ,  H01J31/50

    Abstract: A steak tube has a container with an entrance plate and an output plate, a photocathode disposed in the container and configured to emit electrons according to light to be measured, the light having been incident through the entrance plate, and a sweep electrode disposed in the container, having a pair of deflection plates for generating an electric field and a connection lead connected to each deflection plate, and configured to sweep the electrons in a sweep direction along the output plate. An opposing of edges of the deflection plate in a direction of the output plate are formed so as to extend in a direction from the entrance plate to the output plate, the connection lead has a first connection portion electrically connected to the deflection plate, and the first connection portion is connected to the opposing of edges.

    Abstract translation: 牛排管具有容器，该容器具有入口板和输出板，光电阴极设置在容器中并且被配置为根据被测量的光发射电子，入射到入射板的光和设置在其中的扫掠电极 容器，具有用于产生电场的一对偏转板和连接到每个偏转板的连接引线，并且被配置为沿着输出板沿扫掠方向扫掠电子。 沿着输出板的方向偏转板的边缘相对地形成为从从入口板向输出板的方向延伸，连接引线具有电连接到偏转板的第一连接部分，并且 第一连接部分连接到边缘的相对侧。

    Waveform reconstruction device, waveform reconstruction system, and waveform reconstruction method
    112.
    发明授权
    Waveform reconstruction device, waveform reconstruction system, and waveform reconstruction method 有权
    波形重建装置，波形重建系统和波形重建方法

    公开(公告)号：US09337922B2

    公开(公告)日：2016-05-10

    申请号：US14379806

    申请日：2013-02-06

    Applicant: OSAKA UNIVERSITY

    Inventor： Tsuyoshi Konishi ,  Koji Takahashi ,  Tomotaka Nagashima

    IPC: H04B10/00 ,  H04B10/079 ,  G01J11/00 ,  H04B10/25

    CPC classification number: H04B10/07955 ,  G01J11/00 ,  H04B10/25

    Abstract: A waveform reconstruction device (140) includes: a phase-spectrum calculation unit (143) which (i) simulates, for each intensity of an input optical signal assumed to have a given phase spectrum, propagation of the input optical signal through an optical transmission medium, to calculate a power spectrum of an output optical signal, and (ii) performs iterations of simulating the propagation while changing the given phase spectrum to reduce differences between calculated power spectra and measured power spectra of the input optical signal having the intensities, to search for a phase spectrum of the input optical signal; and a waveform reconstruction unit (144) which reconstructs a time waveform of the input optical signal using the phase spectrum found through the search, wherein the phase-spectrum calculation unit (143) changes the given phase spectrum or simulates the propagation, based on a nonlinear optical effect or a dispersion effect.

    Abstract translation: 波形重建装置（140）包括：相位谱计算单元（143），其对（假定具有给定相位谱的输入光信号的每个强度）模拟通过光传输的输入光信号的传播 介质，以计算输出光信号的功率谱，以及（ii）在改变给定相位频谱的同时进行模拟传播的迭代，以减少计算的功率谱与具有强度的输入光信号的测量功率谱之间的差异，以便 搜索输入光信号的相位谱; 以及波形重建单元（144），其使用通过搜索找到的相位频谱来重构输入光信号的时间波形，其中相位频谱计算单元（143）基于相位谱计算单元（143）改变给定的相位谱或模拟传播， 非线性光学效应或分散效应。

    Calibration of time-of-flight measurement using stray reflections
    113.
    发明授权
    Calibration of time-of-flight measurement using stray reflections 有权
    使用杂散反射校准飞行时间测量

    公开(公告)号：US09335220B2

    公开(公告)日：2016-05-10

    申请号：US14302447

    申请日：2014-06-12

    Applicant: PrimeSense Ltd.

    Inventor： Alexander Shpunt ,  Raviv Erlich

    IPC: G01J11/00 ,  G01S7/481 ,  G01S7/497 ,  G01S17/89 ,  G02B5/18 ,  G02B26/10

    CPC classification number: G01J11/00 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/89 ,  G02B5/1814 ,  G02B26/101

    Abstract: Sensing apparatus includes a transmitter, which emits a beam comprising optical pulses toward a scene, and a receiver, which receives reflections of the optical pulses and outputs electrical pulses in response thereto. Processing circuitry is coupled to the receiver so as to receive, in response to each of at least some of the optical pulses emitted by the transmitter, a first electrical pulse output by the receiver at a first time due to stray reflection within the apparatus and a second electrical pulse output by the receiver at a second time due to the beam reflected from the scene, and to generate a measure of a time of flight of the optical pulses to and from points in the scene by taking a difference between the respective first and second times of output of the first and second electrical pulses.

    Abstract translation: 感测装置包括发射包含朝向场景的光脉冲的波束的发射器，以及接收器，其接收光脉冲的反射并响应于该脉冲输出电脉冲。 处理电路耦合到接收器，以便响应于由发射机发射的至少一些光脉冲中的每一个，由于设备内的杂散反射而在第一时间接收由接收器输出的第一电脉冲，以及 由于从场景反射的光束在第二时间由接收器输出的第二电脉冲，并且通过取各自的第一和第二和第 第二和第二电脉冲的第二次输出。

    Device and Method for Characterizing an Ultrashort Laser Pulse
    114.
    发明申请
    Device and Method for Characterizing an Ultrashort Laser Pulse 有权
    用于表征超短脉冲激光脉冲的装置和方法

    公开(公告)号：US20160116338A1

    公开(公告)日：2016-04-28

    申请号：US14920260

    申请日：2015-10-22

    Applicant: Deutsches Elektronen-Synchrotron DESY

    Inventor： Matthew STREETER ,  Jens OSTERHOFF

    IPC: G01J3/457 ,  G01J3/02 ,  H01S3/00

    CPC classification number: G01J3/457 ,  G01J3/0205 ,  G01J11/00 ,  H01S3/0014 ,  H01S3/005 ,  H01S3/0092

    Abstract: The invention relates to a device (2) and to a method for characterizing an ultrashort laser pulse. Furthermore, the invention relates to use of a self-contained optical assembly in a device (2) for characterizing an ultrashort laser pulse. The device (2) comprises an imaging optical element (4) configured to image the incident laser pulse (6) in a direction of a straight line (L). A first optical element (10) is configured to apply predetermined varying group delay dispersion on the line focused laser pulse. A non-linear optical element (14) is configured to generate a second harmonic laser pulse (30). An optical grating (20) generates a diffraction of the second harmonic laser pulse, which is imaged on a flat sensor (24). A processing unit (36) determines a best fit for the captured image thereby calculating a frequency spectrum and a spectral phase of the laser pulse.

    Abstract translation: 本发明涉及一种用于表征超短激光脉冲的装置（2）和方法。 此外，本发明涉及在用于表征超短激光脉冲的装置（2）中使用独立的光学组件。 装置（2）包括成像光学元件（4），被配置为沿着直线（L）的方向成像入射激光脉冲（6）。 第一光学元件（10）被配置为在线聚焦激光脉冲上施加预定的变化组延迟色散。 非线性光学元件（14）被配置为产生二次谐波激光脉冲（30）。 光栅（20）产生成像在平面传感器（24）上的二次谐波激光脉冲的衍射。 处理单元（36）确定捕获图像的最佳拟合，从而计算激光脉冲的频谱和频谱相位。

    Verification of laser projector safety system operation
    116.
    发明授权
    Verification of laser projector safety system operation 有权
    激光投影机安全系统运行验证

    公开(公告)号：US09268204B2

    公开(公告)日：2016-02-23

    申请号：US14332280

    申请日：2014-07-15

    Applicant: X-Laser LLC

    Inventor： Daniel Goldsmith ,  Adam Raugh

    IPC: G03B21/14 ,  G03B21/20 ,  G01J1/42 ,  G01J11/00 ,  G03B43/00 ,  G02B26/10 ,  G02B27/48 ,  H04N3/22 ,  H04N9/31 ,  H01S3/00

    CPC classification number: G03B21/2033 ,  G01J1/0228 ,  G01J1/4257 ,  G01J11/00 ,  G02B26/10 ,  G02B26/101 ,  G02B27/48 ,  G03B21/14 ,  G03B43/00 ,  H01S3/00 ,  H04N3/22 ,  H04N9/3129

    Abstract: In a general aspect, a method can include receiving a first projection pattern, where the first projection pattern is configured to violate a first parameter of a safety system of a laser projection system. The method can also include displaying the first projection pattern with the laser projection system and verifying proper implementation of the first parameter by the safety system based on visual appearance of the displayed first projection pattern. The method can further include receiving a second projection pattern, where the second projection pattern is configured to violate a second parameter of the safety system of the laser projection system and the second parameter is different than the first parameter. The method can further include displaying the second projection pattern with the laser projection system and verifying proper implementation of the second parameter by the safety system based on visual appearance of the displayed second projection pattern.

    Abstract translation: 在一般方面，一种方法可以包括接收第一投影图案，其中第一投影图案被配置为违反激光投影系统的安全系统的第一参数。 该方法还可以包括用激光投影系统显示第一投影图案，并且基于所显示的第一投影图案的视觉外观来验证安全系统对第一参数的适当实现。 该方法还可以包括接收第二投影图案，其中第二投影图案被配置为违反激光投影系统的安全系统的第二参数，并且第二参数不同于第一参数。 该方法还可以包括利用激光投影系统显示第二投影图案，并且基于所显示的第二投影图案的视觉外观来验证安全系统对第二参数的适当实现。

    CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE
    118.
    发明申请
    CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE 有权
    光电传感器在激光源中的校准

    公开(公告)号：US20160011057A1

    公开(公告)日：2016-01-14

    申请号：US14330526

    申请日：2014-07-14

    Applicant: ASML Netherlands B.V.

    Inventor： Rong Liu ,  Robert J. Rafac ,  David Wayne Myers ,  Robert A. Bergstedt ,  Paul Alexander McKenzie

    IPC: G01J11/00 ,  G01J1/42 ,  H05G2/00

    CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0295 ,  G01J1/4257 ,  G01J1/429 ,  G01J2001/4238 ,  G02B27/0025 ,  H01S5/042 ,  H05G2/008

    Abstract: In a laser-produced plasma (LPP) extreme ultraviolet (EUV) system, laser pulses are used to produce EUV light. To determine the energy of individual laser pulses, a photoelectromagnetic (PEM) detector is calibrated to a power meter using a calibration coefficient. When measuring a unitary laser beam comprising pulses of a single wavelength, the calibration coefficient is calculated based on a burst of the pulses. A combined laser beam has main pulses of a first wavelength alternating with pre-pulses pulses of a second wavelength. To calculate the energy of the main pulses in the combined laser beam, the calibration coefficient calculated for a unitary laser beam of the main pulses is used. To calculate the energy of the pre-pulses in the combined laser beam, a new calibration coefficient is calculated. When the calculated energy values drift beyond a pre-defined threshold, the calibration coefficients are recalculated.

    Abstract translation: 在激光产生的等离子体（LPP）极紫外（EUV）系统中，使用激光脉冲来产生EUV光。 为了确定单个激光脉冲的能量，使用校准系数将光电（PEM）检测器校准到功率计。 当测量包括单个波长的脉冲的单一激光束时，基于脉冲的脉冲串来计算校准系数。 组合的激光束具有与第二波长的预脉冲脉冲交替的第一波长的主脉冲。 为了计算组合激光束中主脉冲的能量，使用为主脉冲的单一激光束计算的校准系数。 为了计算组合激光束中预脉冲的能量，计算出新的校准系数。 当计算出的能量值漂移超过预先定义的阈值时，重新计算校准系数。

    Estimation of Spectral Feature of Pulsed Light Beam
    120.
    发明申请
    Estimation of Spectral Feature of Pulsed Light Beam 有权
    脉冲光束光谱特征估计

    公开(公告)号：US20150355025A1

    公开(公告)日：2015-12-10

    申请号：US14488684

    申请日：2014-09-17

    Applicant: Cymer, LLC ,  ASML Netherlands B.V.

    Inventor： Thomas P. Duffey ,  Herman Philip Godfried

    IPC: G01J3/28 ,  G03F7/20 ,  G01J9/00

    CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

    Abstract: A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

    Abstract translation: 描述了一种用于估计由光源产生并指向光刻设备的晶片的脉冲光束的光谱特征的方法。 该方法包括接收光束脉冲的一组N个光谱; 将接收到的N光谱保存到保存的集合; 转换保存集中的光谱，形成一组变换光谱; 对变换的光谱进行平均以形成平均光谱; 以及基于所述平均光谱估计所述脉冲光束的光谱特征。

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