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公开(公告)号：US12044627B2
公开(公告)日：2024-07-23
申请号：US17597319
申请日：2019-07-24
Applicant: Hitachi High-Tech Corporation
Inventor： Masaya Yamamoto , Toshifumi Honda , Masami Makuuchi , Nobuhiro Obara , Shunichi Matsumoto
CPC classification number: G01N21/8901 , G01N21/9505 , G02B21/0032 , G02B21/0036 , G01N2201/103
Abstract: This defect inspection device for emitting illumination light onto a moving and rotating sample and inspecting for sample defects by scanning the sample in a spiral shape or concentric circle shapes comprises: an illumination and detection unit comprising an emission optical system and a detection optical system; a rotary stage for rotating the sample; a rectilinear stage for rectilinearly moving the rotary stage; and a controller for controlling the illumination and detection unit, rotary stage, and rectilinear stage. On the linear path of the rectilinear stage are a scanning start position where illumination light is emitted onto the sample and scanning is started and a sample delivery position where movement of the sample to the scanning start position starts. When the sample arrives at the scanning start position, the defect inspection device starts emitting the illumination light onto the sample without waiting for the rotation speed of the rotary stage to rise to a specified rotation speed for scanning and raises the rotation speed of the rotary stage to the specified rotation speed while scanning the sample.
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112.发明公开公开(公告)号：US20240201105A1
公开(公告)日：2024-06-20
申请号：US18143257
申请日：2023-05-04
Applicant: EPIR, Inc.
Inventor： Issac L. Chang , Sushant Sonde , Silviu Velicu , Yong Chang
CPC classification number: G01N21/9505 , G01N1/42 , G01N2201/06113 , G01N2201/0636 , G01N2201/103
Abstract: A method of contactless, non-destructive contamination-free 2-dimensional mapping of the cutoff wavelength (or bandgap) and the minority carrier lifetime, which is measured through photo-excited excess free carrier absorption decay method, in semiconductor thin film materials and wafers, including typical semiconductor wafers such as Si, Ge, GaAs, and GaSb as well as narrow gap semiconductors such as InSb, type II superlattices (T2SLs) and HgCdTe, at variable temperatures from room temperature down to 2K, utilizing a three-chamber arrangement in which the external chamber and cold chamber are held at ultra-high vacuum and the innermost (sample) chamber is held at cryogenic temperature to cool wafer or thin film samples through gaseous thermal transfer media to cryogenic temperatures down to 1.9 K under pumping. To achieve full-range wafer mapping, the measurement and sensing components for transmitted and reflected light, including infrared probing beam sources, such as long-wavelength infrared lasers, fast HgCdTe detectors, or detector liner or 2-dimensional arrays mounted in liquid nitrogen dewars or thermoelectric (TE)-cooled detector housings, excitation lasers with a wavelength shorter than the bandgap of the sample to be measured, a broadband infrared source with focusing mirror, light grating with mirror and its other accessories including the motion execution and control components, and a linear LWIR array in a liquid nitrogen Dewar, are positioned outside all three chambers and can be moved through a carriage mounting to create the radial component of the mapping motion domain. The rotation of the sample holder is controlled through a drive gear located inside the sample chamber and creates the angular component of the mapping motion domain.
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113.发明公开公开(公告)号：US20240019243A1
公开(公告)日：2024-01-18
申请号：US18476919
申请日：2023-09-28
Applicant: The Boeing Company , FemtoMetrix, Inc.
Inventor： Jeffrey H. Hunt , Jianing Shi , John Paul Changala
CPC classification number: G01B11/24 , G01J3/10 , G01J3/108 , G01J3/44 , G01N21/636 , G01N21/65 , G01J2003/102 , G01N2021/638 , G01N2021/655 , G01N2201/103 , G01N2201/105
Abstract: Surface sensing methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The methods include exposing a sampled location of the scanned surface to a visible light beam and exposing the sampled location to a tunable infrared beam such that the tunable infrared beam is at least partially coincident with the visible light beam. The methods also include varying a frequency of the tunable infrared beam an inducing optical resonance within an imaged structure that extends at least partially within the sampled location. The methods further include receiving at least a portion of an emitted light beam from the sampled location and scanning the visible light beam and the runnable infrared beam across the scanned portion of the scanned surface. The methods also include generating an image of the scanned portion of the scanned surface based upon the receiving and the scanning.
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公开(公告)号：US11808563B2
公开(公告)日：2023-11-07
申请号：US17942813
申请日：2022-09-12
Applicant: The Boeing Company , FemtoMetrix, Inc.
Inventor： Jeffrey H. Hunt , Jianing Shi , John Paul Changala
CPC classification number: G01B11/24 , G01J3/10 , G01J3/108 , G01J3/44 , G01N21/636 , G01N21/65 , G01J2003/102 , G01N2021/638 , G01N2021/655 , G01N2201/103 , G01N2201/105
Abstract: Surface sensing methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The methods include exposing a sampled location of the scanned surface to a visible light beam and exposing the sampled location to a tunable infrared beam such that the tunable infrared beam is at least partially coincident with the visible light beam. The methods also include varying a frequency of the tunable infrared beam an inducing optical resonance within an imaged structure that extends at least partially within the sampled location. The methods further include receiving at least a portion of an emitted light beam from the sampled location and scanning the visible light beam and the runnable infrared beam across the scanned portion of the scanned surface. The methods also include generating an image of the scanned portion of the scanned surface based upon the receiving and the scanning.
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115.发明申请公开(公告)号：US20190212132A1
公开(公告)日：2019-07-11
申请号：US16352569
申请日：2019-03-13
Applicant: The Boeing Company , FemtoMetrix, Inc.
Inventor： Jeffrey H. Hunt , Jianing Shi , John Paul Changala
CPC classification number: G01B11/24 , G01J3/10 , G01J3/108 , G01J3/44 , G01J2003/102 , G01N21/636 , G01N21/65 , G01N2021/638 , G01N2021/655 , G01N2201/103 , G01N2201/105
Abstract: Surface sensing methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The methods include exposing a sampled location of the scanned surface to a visible light beam and exposing the sampled location to a tunable infrared beam such that the tunable infrared beam is at least partially coincident with the visible light beam. The methods also include varying a frequency of the tunable infrared beam an inducing optical resonance within an imaged structure that extends at least partially within the sampled location. The methods further include receiving at least a portion of an emitted light beam from the sampled location and scanning the visible light beam and the runnable infrared beam across the scanned portion of the scanned surface. The methods also include generating an image of the scanned portion of the scanned surface based upon the receiving and the scanning.
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Patent Agency Ranking
公开(公告)号：US09823196B2
公开(公告)日：2017-11-21
申请号：US14371890
申请日：2013-01-09
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor： Reinhold Wimberger-Friedl , Johan Lub , Pieter Jan Van Der Zaag
CPC classification number: G01N21/6486 , B01J2219/00576 , B01J2219/00605 , B01J2219/00711 , B01J2219/00722 , C12Q1/6874 , C12Q2523/319 , C12Q2525/186 , C12Q2565/601 , G01N21/6428 , G01N21/6458 , G01N21/648 , G01N2021/6439 , G01N2201/06113 , G01N2201/103
Abstract: The present invention relates to DNA sequencing with reagent cycling on the wiregrid. The sequencing approach suggested with which allows to use a single fluid with no washing steps. Based on strong optical confinement and of excitation light and of cleavage light, the sequencing reaction can be read-out without washing the surface. Stepwise sequencing is achieved by using nucleotides with optically cleavable blocking moietys. After read-out the built in nucleotide is deblocked by cleavage light through the same substrate. This ensures that only bound nucleotides will be unblocked.
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公开(公告)号：US09784700B2
公开(公告)日：2017-10-10
申请号：US14611668
申请日：2015-02-02
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masahiro Sakuta
IPC: G01N23/22 , G06F1/16 , G06F3/033 , G06F3/048 , G01N23/223 , G06F3/0354 , G06F3/01 , G06F3/041 , G06F3/0484
CPC classification number: G01N23/223 , G01N2201/103 , G01N2201/125 , G01N2223/076 , G01N2223/304 , G01N2223/306 , G01N2223/408 , G01N2223/427 , G06F1/1692 , G06F3/017 , G06F3/03547 , G06F3/03548 , G06F3/0416 , G06F3/0484 , G06F3/04842 , G06F3/04845 , G06F3/04847 , G06F2203/04104
Abstract: A fluorescent X-ray analyzer includes a sample stage, an X-ray source that irradiates a sample with primary X-rays, a detector that detects secondary X-rays generated from the sample, a position adjustment mechanism that adjusts relative positions of the sample stage and the primary X-rays, an observation mechanism that obtains an observation image of the sample, and a computer having a display unit and an input unit. The computer has a function of, in response to a pointer being moved from a central region of the observation screen to a certain position by dragging the input unit while maintaining a state in which an input element of the input unit is held, moving the sample stage in a movement direction and at a movement speed corresponding to a direction and a distance of the certain position relative to the central region.
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公开(公告)号：US09423397B2
公开(公告)日：2016-08-23
申请号：US14194437
申请日：2014-02-28
Applicant: iNDx Lifecare, Inc.
Inventor： Reuven Duer
IPC: G01N21/00 , G01N33/543 , G02B6/42 , B01L3/00 , G01N21/64
CPC classification number: G01N33/54373 , B01L3/502715 , B01L2300/0636 , B01L2300/0654 , B01L2300/0816 , B01L2300/0819 , C12Q1/6825 , G01N21/6428 , G01N21/6454 , G01N21/648 , G01N33/56988 , G01N2021/6439 , G01N2201/0696 , G01N2201/08 , G01N2201/103 , G02B6/4226 , Y10T436/143333
Abstract: The invention provides methods and devices for generating optical pulses in one or more waveguides using a spatially scanning light source. A detection system, methods of use thereof and kits for detecting a biologically active analyte molecule are also provided. The system includes a scanning light source, a substrate comprising a plurality of waveguides and a plurality of optical sensing sites in optical communication with one or more waveguide of the substrate, a detector that is coupled to and in optical communication with the substrate, and means for spatially translating a light beam emitted from said scanning light source such that the light beam is coupled to and in optical communication with the waveguides of the substrate at some point along its scanning path. The use of a scanning light source allows the coupling of light into the waveguides of the substrate in a simple and cost-effective manner.
Abstract translation: 本发明提供了使用空间扫描光源在一个或多个波导中产生光脉冲的方法和装置。 还提供了检测系统，其使用方法和用于检测生物活性分析物分子的试剂盒。 该系统包括扫描光源，包括多个波导的基板和与基板的一个或多个波导光学通信的多个光学感测位置，耦合到基板并与光学连接的检测器，以及装置 用于空间地平移从所述扫描光源发射的光束，使得所述光束在沿其扫描路径的某点处耦合到所述衬底的波导并与所述衬底的波导光通信。 使用扫描光源允许以简单且成本有效的方式将光耦合到衬底的波导中。
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公开(公告)号：US20160238533A1
公开(公告)日：2016-08-18
申请号：US15025464
申请日：2014-09-30
Applicant: RENISHAW PLC
Inventor： Thomas Anthony MASON
IPC: G01N21/65
CPC classification number: G01N21/65 , G01J3/0208 , G01J3/0237 , G01J3/0248 , G01J3/2803 , G01J3/2823 , G01J3/44 , G01J2003/2826 , G01N2201/025 , G01N2201/06113 , G01N2201/103 , G01N2201/11 , G01N2201/117 , G01N2201/122
Abstract: This invention concerns spectroscopy apparatus comprising a light source arranged to generate a light profile on a sample, a photodetector having at least one photodetector element for detecting characteristic light generated from interaction of the sample with light from the light source, a support for supporting the sample, the support movable relative to the light profile, and a processing unit. The processing unit is arranged to associate a spectral value recorded by the photodetector element at a particular time with a point on the sample predicted to have generated the characteristic light recorded by the photodetector element at the particular time based on relative motion anticipated to have occurred between the support and the light profile.
Abstract translation: 本发明涉及光谱装置，其包括被配置为在样品上产生光分布的光源，具有至少一个光电探测元件的光电检测器，该光电检测元件用于检测由样品与来自光源的光的相互作用产生的特征光;支撑样品 ，相对于光轮廓可移动的支撑件，以及处理单元。 处理单元被布置为将由特定时间的光电检测器元件记录的光谱值与预测的样品上的点相关联，以在特定时间基于由光电检测器元件记录的特征光，基于预期发生在 支持和光线。
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公开(公告)号：US09404843B2
公开(公告)日：2016-08-02
申请号：US14510330
申请日：2014-10-09
Applicant: Caterpillar Inc.
Inventor： Jacob P. Fabrizius , Trent A. Simpson , Robert E. Sharp , Benjamin J. Rasmussen , Jarrod D. Moss
CPC classification number: G01N3/56 , G01B11/22 , G01M5/0033 , G01M15/02 , G01M15/042 , G01N21/9515 , G01N2201/103
Abstract: A method of determining wear of a worn surface of a machine component includes providing a scanning device at a distance from the worn surface. The method also includes moving at least one of the scanning device and the worn surface relative to the other and generating a set of data points via the scanning device. Each data point of the set of data points is indicative of a depth of a corresponding point on the worn surface relative to a reference plane. The method further includes determining a maximum depth of the worn surface based on the set of data points and comparing the maximum depth to a reference value to determine a next step in a remanufacturing process of the machine component.
Abstract translation: 确定机器部件的磨损表面的磨损的方法包括提供距磨损表面一定距离的扫描装置。 该方法还包括相对于另一扫描装置和磨损表面中的至少一个移动并经由扫描装置产生一组数据点。 数据点集合中的每个数据点表示磨损表面上相对于参考平面的对应点的深度。 该方法还包括基于该组数据点确定磨损表面的最大深度，并将最大深度与参考值进行比较，以确定机器部件的再制造过程中的下一步骤。
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