公开(公告)号：US20090236540A1

公开(公告)日：2009-09-24

申请号：US12393580

申请日：2009-02-26

Applicant: Eiichi SEYA ,  Takashi Nagamatsu

Inventor： Eiichi SEYA ,  Takashi Nagamatsu

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/20264

Abstract: A sample stage for electron microscope according to an embodiment of the invention includes at least two actuators capable of expanding and contracting or capable of swinging for moving a target sample in a predetermined direction. With a coordination of the two actuators, various controls are available by combining the operations of the two actuators. Accordingly, a stage mechanism capable of reducing a stop drift as well as moving a stage can be provided.

Abstract translation: 根据本发明的实施例的用于电子显微镜的样品台包括至少两个致动器，所述至少两个致动器能够沿预定方向伸展和收缩或能够摆动以移动目标样品。 通过两个致动器的协调，可以通过组合两个致动器的操作来获得各种控制。 因此，可以提供能够减少停止漂移以及移动平台的平台机构。

公开(公告)号：US20090218509A1

公开(公告)日：2009-09-03

申请号：US12370242

申请日：2009-02-12

Applicant: Hiroyuki Ito ,  Yuko Sasaki ,  Tadashi Otaka

Inventor： Hiroyuki Ito ,  Yuko Sasaki ,  Tadashi Otaka

IPC: G21K5/10

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/30 ,  H01J2237/0216 ,  H01J2237/20214 ,  H01J2237/20221

Abstract: A charged particle beam apparatus can be constructed with a smaller size (resulting in a small installation space) and a lower cost, suppress vibration, operate at higher speed, and be reliable in inspection. The charged particle beam apparatus is largely effective when a wafer having a large diameter is used. The charged particle beam apparatus includes: a plurality of inspection mechanisms, each of which is mounted on a vacuum chamber and has a charged particle beam mechanism for performing at least an inspection on the sample; a single-shaft transfer mechanism that moves the sample between the inspection mechanisms in the direction of an axis of the single-shaft transfer mechanism; and a rotary stage that mounts the sample thereon and has a rotational axis on the single-shaft transfer mechanism. The single-shaft transfer mechanism moves the sample between the inspection mechanisms in order that the sample is placed under any of the inspection mechanisms. The rotary stage positions the sample such that a target portion of the sample can be inspected by the inspection mechanism under which the sample is placed, and the inspection mechanisms inspect the sample.

Abstract translation: 带电粒子束装置可以以较小的尺寸（导致小的安装空间）和较低的成本，抑制振动，更高的速度运行并且可靠地进行检查。 当使用具有大直径的晶片时，带电粒子束装置很有效。 带电粒子束装置包括：多个检查机构，每个检查机构安装在真空室上，并具有至少对样品进行检查的带电粒子束机构; 单轴传送机构，其在所述检查机构之间沿所述单轴传送机构的轴线的方向移动所述样本; 以及将样品安装在其上并在单轴传送机构上具有旋转轴的旋转台。 单轴传送机构将样品移动到检查机构之间，以便将样品放置在任何检查机构下。 旋转台定位样品，使得样品的目标部分可以通过放置样品的检查机构进行检查，检查机构检查样品。

公开(公告)号：US07323695B2

公开(公告)日：2008-01-29

申请号：US11098878

申请日：2005-04-05

Applicant: John W. Vanderpot ,  John D. Pollock ,  Donald W. Berrian

Inventor： John W. Vanderpot ,  John D. Pollock ,  Donald W. Berrian

IPC: G01F23/00

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

Abstract: A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationary reference. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

Abstract translation: 提供了一种用于扫描工件的往复驱动系统，方法和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于固定基准往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。

公开(公告)号：US20070194235A1

公开(公告)日：2007-08-23

申请号：US11783780

申请日：2007-04-12

Applicant: Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

Inventor： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC: G01N23/00

CPC classification number: H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.

Abstract translation: 本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到检查室23-1中; 在所述检查室中保持真空; 将所述检查室与振动隔离; 通过至少一个自由度的阶段26-1连续地移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。 因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

公开(公告)号：US07135691B2

公开(公告)日：2006-11-14

申请号：US11098942

申请日：2005-04-05

Applicant: John W. Vanderpot ,  John D. Pollock ,  Donald W. Berrian

Inventor： John W. Vanderpot ,  John D. Pollock ,  Donald W. Berrian

IPC: B65H1/00

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

Abstract: A reciprocating drive system and apparatus for scanning a workpiece through an ion beam are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to the ion beam. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

Abstract translation: 提供了一种用于通过离子束扫描工件的往复驱动系统和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于离子束往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。

公开(公告)号：US07087906B2

公开(公告)日：2006-08-08

申请号：US10937137

申请日：2004-09-08

Applicant: Andrew J. Hazelton

Inventor： Andrew J. Hazelton

IPC: G01F23/00

CPC classification number: H01J37/02 ,  G03F7/709 ,  H01J2237/0216

Abstract: Embodiments of the present invention are directed to apparatus and methods of attenuating vibration, particularly for modern stepper machines and other types of vibration sensitive equipment. The attenuation system exhibits good vibration attenuation in the axial or support direction, and exhibits low or substantially zero lateral stiffness to prevent transmission of any vibrations between any of various portions of the machine. In one embodiment, an apparatus for attenuating transmission of lateral vibration between a first mass and a second mass comprises a vibration attenuation device including at least one bellows oriented along a support axis. The at least one bellows is connected between the first mass and the second mass and has an interior volume pressurized with a fluid to an internal fluid pressure which is greater than a zero-stiffness pressure such that the vibration attenuation device exhibits a negative lateral stiffness. A positive stiffness device is coupled between the first mass and the second mass. The positive stiffness device has a positive lateral stiffness which may be substantially equal to or greater than the negative lateral stiffness in magnitude.

公开(公告)号：US20050232748A1

公开(公告)日：2005-10-20

申请号：US11098878

申请日：2005-04-05

Applicant: John Vanderpot ,  John Pollock ,  Donald Berrian

Inventor： John Vanderpot ,  John Pollock ,  Donald Berrian

IPC: A61N5/00 ,  B65H1/00 ,  H01J37/317 ,  H01L21/00 ,  H01L21/687

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

Abstract: A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationary reference. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the Workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

Abstract translation: 提供了一种用于扫描工件的往复驱动系统，方法和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于固定基准往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。

公开(公告)号：US20050230643A1

公开(公告)日：2005-10-20

申请号：US11098942

申请日：2005-04-05

Applicant: John Vanderpot ,  John Pollock ,  Donald Berrian

Inventor： John Vanderpot ,  John Pollock ,  Donald Berrian

IPC: A61N5/00 ,  B65H1/00 ,  H01J37/317 ,  H01L21/00 ,  H01L21/687

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/0216 ,  H01J2237/20228 ,  H01J2237/20292 ,  H01J2237/31703 ,  H01L21/67069 ,  H01L21/67259 ,  H01L21/68764 ,  H01L21/68792

Abstract: A reciprocating drive system and apparatus for scanning a workpiece through an ion beam are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to the ion beam. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.

Abstract translation: 提供了一种用于通过离子束扫描工件的往复驱动系统和装置，其中包括可操作以围绕第一轴线单独旋转的转子和定子的马达可操作以相对于离子束往复平移工件。 由转子可旋转地驱动的轴沿着第一轴线延伸，并且扫描臂可操作地联接到轴，其中扫描臂可操作以在其上支撑工件。 电动机的轴的周期性旋转可操作以旋转扫描臂，其中沿着第一扫描路径扫描工件穿过离子束，其中定子充当转子的旋转的反作用质量。 控制器还可操作以控制转子和定子之间的电磁力，其中通常确定转子和定子的旋转位置。

公开(公告)号：US20050121611A1

公开(公告)日：2005-06-09

申请号：US11037084

申请日：2005-01-19

Applicant: Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

Inventor： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC: G01N23/225 ,  G01Q30/02 ,  H01J37/06 ,  H01J37/073 ,  H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  G01N23/00 ,  G21K7/00

CPC classification number: H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.

Abstract translation: 本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到检查室23-1中; 在所述检查室中保持真空; 将所述检查室与振动隔离; 通过至少一个自由度的阶段26-1连续地移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。 因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

公开(公告)号：US06798553B1

公开(公告)日：2004-09-28

申请号：US10096292

申请日：2002-03-12

Applicant: Michael A. Scobey ,  Lucien P. Ghislain ,  Dennis J. Derickson ,  Loren F. Stokes

Inventor： Michael A. Scobey ,  Lucien P. Ghislain ,  Dennis J. Derickson ,  Loren F. Stokes

IPC: G02F103

CPC classification number: G02B5/288 ,  C23C14/34 ,  C23C14/3464 ,  C23C14/54 ,  G01J3/26 ,  G02B5/281 ,  G02B6/29358 ,  G02B6/29398 ,  G02B6/3863 ,  H01J37/3405 ,  H01J2237/0216

Abstract: Optical filter elements and optical systems comprise optically mismatched etalons and optically mismatched stacked, optically coupled etalons that are directly optically coupled, at least one of the etalons or stacked, optically coupled etalons comprising first and second selectively transparent thin film mirror coatings on opposite surfaces of a bulk optic. The optically mismatched etalons can be configured to selectively pass single passbands. The disclosed optical systems optionally comprise other devices optically coupled to the optically mismatched etalons and optionally mismatched stacked, optically coupled etalons.

Abstract translation: 光学滤光器元件和光学系统包括光学不匹配的标准具和光学不匹配的层叠的光学耦合的标准具，其直接光学耦合，至少一个标准具或层叠的光学耦合标准具，包括第一和第二选择性透明的薄膜镜面涂层 大量光学元件。 光学不匹配的标准具可以被配置为选择性地通过单个通带。 所公开的光学系统可选地包括光学耦合到光学不匹配的标准具和任选错配的堆叠的光学耦合标准具的其它器件。