公开(公告)号：US3879597A

公开(公告)日：1975-04-22

申请号：US49810074

申请日：1974-08-16

Applicant: INT PLASMA CORP

Inventor： BERSIN RICHARD L ,  SINGLETON MICHAEL J

IPC: H01L21/302 ,  H01J37/32 ,  H01J65/04 ,  H01L21/3065 ,  H05H1/46 ,  B23K9/00

CPC classification number: H01J37/32009 ,  H01J65/044 ,  H05H1/46 ,  Y10S422/906

Abstract: There is disclosed a device for plasma etching which includes a quartz cylinder surrounded by a coil of electrodes connected to a source of radio frequency energy, and having within it a concentric cylinder or perforated aluminum or other electrically conductive metal.

Abstract translation: 公开了一种用于等离子体蚀刻的装置，其包括被连接到射频能量源的电极线圈围绕的石英圆柱体，并且在其内部具有同心圆筒或穿孔铝或其它导电金属。

公开(公告)号：US3814983A

公开(公告)日：1974-06-04

申请号：US22403872

申请日：1972-02-07

Applicant: WEISSFLOCH C ,  BOSISIO R ,  WERTHEIMER M

Inventor： WEISSFLOCH C ,  WERTHEIMER M ,  BOSISIO R

IPC: G21K5/10 ,  H01J37/32 ,  H01J65/04 ,  H05H1/24 ,  H05H1/46 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J37/32192 ,  G21K5/10 ,  H01J37/32211 ,  H01J65/044 ,  H05H1/46 ,  H05H2001/4622

Abstract: Apparatus for generating plasmas using electromagnetic energy in the microwave frequency range, having a source of microwave energy, a slow wave structure, conveying means for conveying microwave energy from the source to the slow wave structure, a plasma container and means for maintaining conditions of pressure and gas flow in the container. There is also provided a novel transparent radiation shield for use with such an apparatus. In another embodiment, there is also provided a slow wave structure and microwave energization means so that a region adjacent the structure will contain a predominance of degenerate pi /2 mode or near degenerate pi /2 mode electric field energy. Methods are also disclosed for treating various types of material to alter their properties using the above-described apparatus.

Abstract translation: 用于使用微波频率范围内的电磁能量产生等离子体的装置，具有微波能量源，慢波结构，用于将微波能量从源传送到慢波结构的输送装置，等离子体容器和用于保持压力条件的装置 并且气体在容器中流动。 还提供了一种用于这种装置的新颖的透明辐射屏蔽。 在另一个实施例中，还提供了一种慢波结构和微波激励装置，使得邻近该结构的区域将包含退化的π/ 2模式或接近退化的π/ 2模式电场能量的优势。 还公开了使用上述装置处理各种类型的材料以改变其性质的方法。

公开(公告)号：US3648100A

公开(公告)日：1972-03-07

申请号：US3648100D

申请日：1969-03-24

Applicant: WESTINGHOUSE ELECTRIC CORP

Inventor： GOLDIE HARRY ,  GOLDMAN MICHAEL A ,  KLEIN GERALD I

IPC: H01J65/04 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J65/044

Abstract: A gaseous pulsed illuminator utilizing a halogen gas. No electrodes are required to strike the discharge and accordingly highly reactive gases having short luminous decay times may be employed. The excitation power is a radiofrequency source coupled through a waveguide or other RF transmission line.

Abstract translation: 利用卤素气体的气体脉冲照明器。 不需要电极来进行放电，因此可以采用具有短的发光衰减时间的高反应性气体。 激励功率是通过波导或其它RF传输线耦合的射频源。

公开(公告)号：US3641389A

公开(公告)日：1972-02-08

申请号：US3641389D

申请日：1969-11-05

Applicant: VARIAN ASSOCIATES

Inventor： LEIDIGH WILLIAM J

IPC: H01J65/04 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J65/044

Abstract: A high-power microwave plasma discharge lamp is disclosed. The lamp includes a ceramic tube filled with gas and closed at one end by a window transparent to the optical radiation output of the lamp. The ceramic tube extends through a cavity resonator excited with microwave energy for exciting a plasma discharge within the lamp.

Abstract translation: 公开了一种高功率微波等离子体放电灯。 该灯包括填充有气体的陶瓷管，并且在一端由对于光的光辐射输出透明的窗口封闭。 陶瓷管延伸通过用微波能量激发的腔谐振器，以激发灯内的等离子体放电。

公开(公告)号：US3493805A

公开(公告)日：1970-02-03

申请号：US3493805D

申请日：1967-11-01

Applicant: NASA

Inventor： BASS ARNOLD M

IPC: H01J65/04 ,  H01J5/16 ,  H01J61/40

CPC classification number: H01J65/044

公开(公告)号：US20230360902A1

公开(公告)日：2023-11-09

申请号：US18028996

申请日：2021-10-20

Applicant: United Kingdom Research and Innovation

Inventor： Alex Robinson ,  Matthew Gear

IPC: H01J65/04 ,  H01J61/10 ,  H01J61/06 ,  H01J61/02 ,  H01J61/16 ,  B01D53/00 ,  B01D53/50 ,  B01D53/56 ,  B01D53/60 ,  B01D53/44 ,  C02F1/32

CPC classification number: H01J65/044 ,  H01J61/10 ,  H01J61/06 ,  H01J61/025 ,  H01J61/16 ,  B01D53/007 ,  B01D53/50 ,  B01D53/56 ,  B01D53/60 ,  B01D53/44 ,  C02F1/325 ,  B01D2258/02 ,  B01D2259/804 ,  B01D2259/806 ,  B01D2257/302 ,  B01D2257/404 ,  B01D2257/708 ,  C02F2201/3221 ,  C02F2201/326 ,  C02F2101/30

Abstract: There is provided a photoreactor for the remediation of gaseous emissions and/or contaminated water using ultraviolet (UV) or vacuum ultraviolet (VUV). There is also provided an emission source for generating UV and/or VUV, the source comprising: a microwave generator; a chamber arranged to receive microwaves generated by the microwave generator, the chamber comprising: a gas comprising species for forming excimers; a resonator arranged to receive the microwaves in the chamber and generate a plasma; a first electrode spaced apart from the resonator; and a voltage source configured to generate an electric field between the resonator and the first electrode, wherein, on application of the electric field, the electric field drives electrons and/or ions from the plasma to generate excimers and produce vacuum ultraviolet or ultraviolet emission. There are also provided methods of generating UV and/or VUV, and methods of remediating fluids.

公开(公告)号：US20230162968A1

公开(公告)日：2023-05-25

申请号：US17968444

申请日：2022-10-18

Applicant: Roland Gesche ,  Sundarajan Mutialu ,  Joachim Scherer

Inventor： Roland Gesche ,  Sundarajan Mutialu ,  Joachim Scherer

IPC: H01J65/04 ,  H01J61/32

CPC classification number: H01J65/044 ,  H01J61/322 ,  H01J2893/0063

Abstract: A plasma light with at least one non-rotating light bulb is disclosed. The light includes a conducting cavity structure with a radiation source input port and a light bulb. The geometry of the cavity is designed to generate electrical fields with time-dependent geometrical designed orientation within parts of the light bulb, while the direction of the radiation fields from the radiation source port caused by a microwave generator to the input port fields is stationary.

公开(公告)号：US09502149B2

公开(公告)日：2016-11-22

申请号：US14456062

申请日：2014-08-11

Applicant: Nordson Corporation

Inventor： James M. Borsuk ,  Gregory W. Harrell ,  James M. Khoury ,  Edward C. McGhee ,  James C. Smith ,  Hallie Smith-Petee

IPC: G21K5/00 ,  G21K5/04 ,  G21K1/00 ,  H01J65/04 ,  H05B41/24

CPC classification number: G21K5/04 ,  G21K1/00 ,  H01J65/044 ,  H05B41/24 ,  H05B41/2806 ,  Y02B20/22

Abstract: A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

Abstract translation: 用于照射衬底的UV系统包括具有带有内部的外壳的灯头。 UV灯泡位于内部，并能够通过RF能量激发时发出紫外线能量。 UV系统还包括能够产生RF能量的固态RF源。 RF能量被传输到UV灯泡，这导致UV灯泡点燃并从灯头的内部发射UV能量。

公开(公告)号：US20160143093A1

公开(公告)日：2016-05-19

申请号：US14900954

申请日：2014-06-26

Applicant: Alberto PIZZETTI ,  Roberto GEMMA ,  Gianni CERZOSO ,  Raoul CANGEMI

Inventor： Gianni Cerzoso ,  Raoul Cangemi

IPC: H05B6/64

CPC classification number: H05B6/6444 ,  H01J65/044 ,  H05B6/6402 ,  H05B6/804

Abstract: Illuminating microwave heater, comprising at least o le magnetron radiating microwaves in a first chamber, impermeable, reflecting and shielding the microwaves; said first chamber being filled with ionized gas and comprising internally at least a second chamber, permeable to microwaves, adapted to contain liquid to feed into the radiators and heat absorbing tubes; said liquid being heated by friction, when radiated by the microwaves; said illuminating microwave heater comprising pipes connected to said at least one second chamber by means of devices adapted to prevent the microwaves from escaping from the first chamber; said ionized gas in plasma state when excited by the microwaves being adapted to generate light illuminating said first chamber at least internally.

Abstract translation: 照明微波加热器，包括在第一室中至少辐射微波的不可渗透的微波加热器，反射和屏蔽微波; 所述第一室充满电离气体，并且在内部包括至少第二室，其可渗透微波，适于容纳液体以供入散热器和吸热管; 当微波辐射时，所述液体被摩擦加热; 所述照明微波加热器包括通过适于防止微波从第一室逸出的装置连接到所述至少一个第二室的管道; 当被微波激发时，等离子体状态的所述电离气体适于产生至少在内部照射所述第一室的光。

公开(公告)号：US09240302B2

公开(公告)日：2016-01-19

申请号：US13809612

申请日：2011-07-12

Applicant: Kjell Lidstrom

Inventor： Kjell Lidstrom

IPC: H01J25/50 ,  H01J65/04 ,  H05B41/24 ,  H05H1/46

CPC classification number: H01J25/50 ,  H01J65/044 ,  H05B41/24 ,  H05H1/46

Abstract: To the common point (C) of two transistors of a magnetron, switched converter power circuit is connected a coupling capacitor which provides input to a starter circuit. A transistor switch id in series with a capacitor and a diode. When the switch is off no current flows in (D11). When the switch is made, (D11) conducts during alternate halves of cycles present a (C). A second diode also conducts and allows current to pass through discharge capacitor. This progressively charges until the voltage across it reaches the breakdown voltage of a gas discharge tube (GTD). Whereupon the capacitor discharges through the primary winding of transformer (TR2). The second winding has many more turns and a started voltage is induced in the starter electrode. This is isolated from the Faraday cage and terminates adjacent to the crucible, close to the void.

Abstract translation: 对于磁控管的两个晶体管的共同点（C），开关转换器电源电路连接有向起动器电路提供输入的耦合电容器。 与电容器和二极管串联的晶体管开关ID。 当开关断开时（D11）不流过电流。 当开关切换时，（D11）在存在a（C）的周期的另外一半期间进行。 第二个二极管也导通并允许电流通过放电电容器。 逐渐充电，直到其两端的电压达到气体放电管（GTD）的击穿电压。 于是电容器通过变压器的初级绕组（TR2）放电。 第二绕组具有更多的匝数，并且在起动电极中感应起始电压。 这是从法拉第笼中分离出来的，靠近坩埚，靠近空隙。