公开(公告)号：US06916009B2

公开(公告)日：2005-07-12

申请号：US10619391

申请日：2003-07-14

Applicant: Thomas Blecha

Inventor： Thomas Blecha

IPC: B65G49/00 ,  B01J3/00 ,  B01J3/02 ,  F16K51/02 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  F16K21/00

CPC classification number: H01L21/67092 ,  F16K51/02

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is arranged behind a plane which extends through the contact surface of the load-lock chamber and lies vertical to the axis of the input-side opening.

Abstract translation: 用于将基板引入真空室的装载锁定装置包括装载锁定室，其具有在输入侧上的至少一个开口，用于将基板从位于输入侧开口前方的气氛区域引入位于内部的内部空间 负载锁定室和输出侧的至少一个开口，用于将负载锁定室的内部空间连接到具有阀的真空室的内部空间; 至少一个真空门，其与输入侧上的相应开口相关联并且包括通过至少一个承载杆与驱动装置连通的关闭元件，并且可由驱动装置在输入 - 侧开口是打开的，并且其中输入侧开口关闭并且闭合元件接触到装载锁定室的接触表面的位置，其中，从位于输入侧开口前方的大气区域考虑， 驱动装置布置在延伸穿过装载锁定室的接触表面并垂直于输入侧开口的轴线的平面的后面。

公开(公告)号：US20050124782A1

公开(公告)日：2005-06-09

申请号：US10726652

申请日：2003-12-04

Applicant: Takatsugu Takamura ,  Kim Baek ,  Jyunji Yamada

Inventor： Takatsugu Takamura ,  Kim Baek ,  Jyunji Yamada

IPC: B01J3/00 ,  B01J19/18 ,  C08G63/08 ,  C08G63/78 ,  C08G63/82

CPC classification number: B01J3/006 ,  B01J19/18 ,  B01J2219/00162 ,  B01J2219/00184 ,  B01J2219/00186 ,  B01J2219/00779 ,  C08G63/785 ,  C08G63/823

Abstract: The present invention provides a production method of biodegradable plastic in which polylactic acid is directly synthesized from lactic acid without employing the conventional route of polylactic acid synthesis from lactic acid via lactide, and apparatus for use in production thereof. In this way, time required for the synthesis of polylactic acid is strikingly shortened and the production cost is reduced. In the production method of biodegradable plastic, polylactic acid, the main component of biodegradable plastic, is obtained by means of condensation polymerization by dehydration of the raw material, lactic acid, under high temperature and reduced pressure in the presence of a metal catalyst.

Abstract translation: 本发明提供一种生物可降解塑料的制造方法，其中乳酸直接由乳酸直接合成而不使用常规乳酸合成路线，通过丙交酯和其制备方法。 以这种方式，合成聚乳酸所需的时间显着缩短，生产成本降低。 在生物降解塑料的生产方法中，通过在金属催化剂存在下，在高温和减压下脱水原料乳酸，通过缩聚得到聚乳酸，生物降解塑料的主要成分。

公开(公告)号：US06897156B2

公开(公告)日：2005-05-24

申请号：US10347363

申请日：2003-01-21

Applicant: Tuqiang Ni ,  Kenji Takeshita ,  Tom Choi ,  Frank Y. Lin

Inventor： Tuqiang Ni ,  Kenji Takeshita ,  Tom Choi ,  Frank Y. Lin

IPC: H05H1/46 ,  B01J3/00 ,  B01J19/08 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/302

CPC classification number: H01J37/321

Abstract: 200 mm and 300 mm wafers are processed in vacuum plasma processing chambers that are the same or have the same geometry. Substantially planar excitation coils having different geometries for the wafers of different sizes excite ionizable gas in the chamber to a plasma by supplying electromagnetic fields to the plasma through a dielectric window at the top of the chamber. Both coils include plural symmetrical, substantially circular turns coaxial with a center point of the coil and at least one turn that is asymmetrical with respect to the coil center point. Both coils include four turns, with r.f. excitation being applied to the turn that is closest to the coil center point. The turn that is third farthest from the center point is asymmetric in the coil used for 200 mm wafers. The two turns closest to the coil center point are asymmetric in the coil used for 300 mm wafers.

Abstract translation: 200mm和300mm晶片在相同或具有相同几何形状的真空等离子体处理室中进行处理。 对于不同尺寸的晶片，具有不同几何形状的基本上平面的激励线圈通过在腔室的顶部处的电介质窗口向等离子体提供电磁场，从而激发腔室中的可电离气体到等离子体。 两个线圈包括与线圈的中心点同轴的多个对称的基本圆形的匝和至少一个相对于线圈中心点不对称的匝。 两个线圈包括四圈，r.f. 激励被施加到最接近线圈中心点的转弯。 距离中心点第三远的转弯在用于200 mm晶圆的线圈中是不对称的。 在线圈中心点最近的两个转弯在用于300毫米晶圆的线圈中是不对称的。

公开(公告)号：US20050107252A1

公开(公告)日：2005-05-19

申请号：US10978853

申请日：2004-11-01

Applicant: Anne Gaffney ,  Jose Martinez ,  Ruozhi Song

Inventor： Anne Gaffney ,  Jose Martinez ,  Ruozhi Song

IPC: B01J37/08 ,  B01J3/00 ,  B01J19/26 ,  B01J21/02 ,  B01J23/00 ,  B01J23/02 ,  B01J23/04 ,  B01J23/06 ,  B01J23/08 ,  B01J23/16 ,  B01J23/18 ,  B01J23/20 ,  B01J23/32 ,  B01J23/648 ,  B01J23/652 ,  B01J27/057 ,  B01J27/14 ,  B01J27/186 ,  B01J27/187 ,  B01J27/199 ,  B01J37/00 ,  B01J37/03 ,  B01J37/04 ,  C07B61/00 ,  C07C51/215 ,  C07C51/25 ,  C07C57/00 ,  C07C57/05 ,  C07C253/24 ,  C07C255/00

CPC classification number: B01J23/002 ,  B01J3/008 ,  B01J4/002 ,  B01J19/26 ,  B01J23/648 ,  B01J23/6484 ,  B01J23/6525 ,  B01J23/6527 ,  B01J27/0576 ,  B01J37/0018 ,  B01J37/0036 ,  B01J37/0045 ,  B01J37/036 ,  B01J2523/00 ,  C07C51/215 ,  C07C51/252 ,  C07C253/24 ,  C07C253/26 ,  Y02P20/52 ,  Y02P20/544 ,  C07C57/04 ,  B01J2523/55 ,  B01J2523/56 ,  B01J2523/64 ,  B01J2523/68 ,  B01J2523/824 ,  C07C255/08

Abstract: The present invention includes a process for preparing an improved catalyst having the steps of admixing compounds containing the components of the catalyst and at least one solvent to form a precursor; extracting the precursor with a supercritical stream to form a processed precursor, where the extracting step includes drying the precursor, atomizing the precursor, and combinations thereof; and calcining the processed precursor to form a catalyst. The process may include drying the precursor by introducing the precursor, which has been previously washed with an alcohol, such as ethanol or methanol, into a vessel and introducing the supercritical stream at a pressure and temperature above the critical point of the stream into the vessel. The process may include drying and atomizing the precursor by introducing the supercritical solvent into the vessel at a pressure and a temperature above critical point of the solvent and introducing the precursor into the extraction vessel through a nozzle. The process may also include drying and atomizing the precursor by introducing the precursor and the supercritical solvent into the vessel through a nozzle.

Abstract translation: 本发明包括一种制备改进的催化剂的方法，该方法具有以下步骤：混合含有催化剂组分的化合物和至少一种溶剂以形成前体; 用超临界流提取前体以形成加工的前体，其中提取步骤包括干燥前体，雾化前体及其组合; 并煅烧加工的前体以形成催化剂。 该方法可以包括通过将先前用醇如乙醇或甲醇洗涤的前体引入容器来干燥前体，并将超临界流在高于流的临界点的压力和温度下引入到容器 。 该方法可以包括通过在高于溶剂临界点的压力和温度下将超临界溶剂引入容器中来干燥和雾化前体，并通过喷嘴将前体引入萃取容器。 该方法还可以包括通过将前体和超临界溶剂通过喷嘴引入容器来干燥和雾化前体。

公开(公告)号：US06886272B2

公开(公告)日：2005-05-03

申请号：US10683067

申请日：2003-10-14

Applicant: Shigekazu Kato ,  Kouji Nishihata ,  Tsunehiko Tsubone ,  Atsushi Itou

Inventor： Shigekazu Kato ,  Kouji Nishihata ,  Tsunehiko Tsubone ,  Atsushi Itou

IPC: B01J3/00 ,  B41J2/36 ,  B41J2/365 ,  C23C14/56 ,  H01L21/00 ,  H01L21/677 ,  F26B13/30

CPC classification number: H01L21/67748 ,  B01J3/006 ,  B41J2/36 ,  B41J2/365 ,  C23C14/564 ,  H01L21/67028 ,  H01L21/67167 ,  H01L21/67253 ,  H01L21/67736 ,  Y10S134/902 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple. Furthermore, the dummy substrates used for dry cleaning and the substrates to be processed do not coexist, contamination of the substrates to be processed due to dust and remaining gas can be prevented and the production yield can be high.

Abstract translation: 本发明涉及一种具有真空处理室的真空处理装置，其内部必须是干式清洁的，以及一种操作这种装置的方法。 当真空处理室被干洗时，虚设基板通过基板传送装置从设置在空气气氛中的虚设基板存储装置与用于存储待处理基板的存储装置一起转移到真空处理室中， 通过产生等离子体对真空处理室进行干洗。 在完成干洗之后，虚拟衬底返回到虚设衬底存储装置。 因此，仅用于清洁目的的特定机构是不必要的，并且可以使装置的结构简单。 此外，用于干洗的虚拟基板和待加工的基板不共存，可以防止由于灰尘和剩余气体而被处理的基板的污染，并且生产率可以高。

公开(公告)号：US20050089950A1

公开(公告)日：2005-04-28

申请号：US10504258

申请日：2003-02-20

Applicant: Joerg Hucklenbroich ,  Markus Mueller

Inventor： Joerg Hucklenbroich ,  Markus Mueller

IPC: C12N15/09 ,  B01J3/00 ,  C12N15/10 ,  C12P19/34 ,  C12P1/00 ,  C07H21/02 ,  C12N1/08 ,  C12Q1/68

CPC classification number: C12N15/1003

Abstract: The present invention relates to the coarse clarification of lysed cell material from microorganisms and particularly to a method of obtaining nucleic acids.

Abstract translation: 本发明涉及从微生物中裂解的细胞材料的粗略澄清，特别涉及获得核酸的方法。

公开(公告)号：US06878290B2

公开(公告)日：2005-04-12

申请号：US10398320

申请日：2001-10-09

Applicant: Christophe Joussot-Dubien ,  Gérard Didier ,  Hubert-Alexandre Turc

Inventor： Christophe Joussot-Dubien ,  Gérard Didier ,  Hubert-Alexandre Turc

IPC: A62D3/20 ,  A62D101/20 ,  B01F7/00 ,  B01J3/00 ,  B01J3/02 ,  B01J3/04 ,  B01J19/00 ,  B01J19/02 ,  B01J19/18 ,  B09B3/00 ,  C02F1/74 ,  C02F1/78 ,  C02F1/72

CPC classification number: A62D3/20 ,  A62D2101/20 ,  A62D2203/10 ,  B01F7/00908 ,  B01J3/008 ,  B01J3/042 ,  B01J19/006 ,  B01J19/0066 ,  B01J19/0073 ,  B01J19/02 ,  B01J19/18 ,  B01J19/1843 ,  B01J2219/00085 ,  B01J2219/00094 ,  B01J2219/00765 ,  B01J2219/00777 ,  B01J2219/00779 ,  B01J2219/0263 ,  B01J2219/0277 ,  B01J2219/0286 ,  C02F1/74 ,  C02F1/78 ,  C02F11/086 ,  Y02P20/544

Abstract: A method and device for oxidization of materials in supercritical water. The method involves a) introducing a fluid containing water and an oxidizing agent in a ring-shaped area and through a first end of a substantially tube-shaped reactor comprising an external wall and an internal tube, b) heating the fluid in the ring-shaped area, c) introducing the heated fluid into the internal tube and simultaneously introducing material to be treated into said internal tube at a second end of the reactor, d) mixing the fluid and the material to be treated in a first portion of the internal tube, followed by cooling the obtained mixture in a second portion of the internal tube, and e) isobarically discharging the fluid/oxidized material from the internal tube of the reactor.

Abstract translation: 一种在超临界水中氧化材料的方法和装置。 该方法包括：a）将含有水和氧化剂的流体引入环形区域，并通过包含外壁和内管的基本管状的反应器的第一端，b） c）将加热的流体引入内管，同时在反应器的第二端将待处理的材料引入所述内管，d）将流体和被处理材料混合在内部的第一部分中 然后在所述内管的第二部分中冷却所获得的混合物，以及e）从所述反应器的内管中均匀地排出所述流体/氧化物质。

公开(公告)号：US20050072272A1

公开(公告)日：2005-04-07

申请号：US10275681

申请日：2000-11-29

Applicant: Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

Inventor： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

IPC: A61K8/19 ,  A23L1/304 ,  A23L2/52 ,  A61K8/00 ,  A61K33/24 ,  A61P43/00 ,  A61Q19/00 ,  B01J3/00 ,  C02F1/68 ,  C01G23/00

CPC classification number: A61K33/24 ,  A23L2/52 ,  A23L33/16 ,  A23V2002/00 ,  C02F1/68 ,  A23V2250/1634

Abstract: This invention provides a method and apparatus for manufacturing titanium-dissolved water with molten titanium dissolved therein, the molten titanium being titanium metal melted by the combustion gas resulting from the combustion of a mixed gas of oxygen and hydrogen in high-pressure water, as well as the resultant titanium-dissolved water and health articles, medical articles and cosmetics utilizing the physiologically activating effect of the high-function water containing titanium.

Abstract translation: 本发明提供了一种用于溶解有熔融钛的钛溶解水的制造方法和装置，熔融钛是由在高压水中的氧气和氢气的混合气体的燃烧而产生的燃烧气体熔融的钛金属，以及 作为所得的钛溶解水和健康用品，医疗用品和化妆品，利用含钛高功能水的生理活化作用。

公开(公告)号：US20050072137A1

公开(公告)日：2005-04-07

申请号：US10679397

申请日：2003-10-07

Applicant: Nobuyuki Hokari ,  Tomohiko Miyamoto ,  Hirokazu Takahashi ,  Atsushi Morihara ,  Hiromi Koizumi

Inventor： Nobuyuki Hokari ,  Tomohiko Miyamoto ,  Hirokazu Takahashi ,  Atsushi Morihara ,  Hiromi Koizumi

IPC: B01J3/00 ,  B01J8/00 ,  B01J8/02 ,  B01J8/06 ,  C01B3/34 ,  C01B3/36 ,  C01G31/02 ,  F02C3/20

CPC classification number: F02C3/20 ,  B01J3/008 ,  B01J8/0055 ,  B01J8/025 ,  B01J8/065 ,  B01J2219/00006 ,  C01B3/34 ,  C01B3/36 ,  C01B2203/0216 ,  C01B2203/0255 ,  C01B2203/1247 ,  C01G31/02 ,  Y02P20/129 ,  Y02P20/544

Abstract: The reforming of heavy oil with supercritical water or subcritical water is accomplished by mixing together supercritical water, heavy oil, and oxidizing agent, thereby oxidizing vanadium in heavy oil with the oxidizing agent at the time of treatment with supercritical water and separate vanadium oxide. The separated vanadium oxide is removed by the scavenger after treatment with supercritical water. In this way it is possible to solve the long-standing problem with corrosion of turbine blades by vanadium which arises when heavy oil is used as gas turbine fuel.

Abstract translation: 重油与超临界水或亚临界水的重整是通过将超临界水，重油和氧化剂混合在一起完成的，从而在用超临界水和分离的氧化钒处理时用氧化剂氧化重油中的钒。 在用超临界水处理后，通过清除剂除去分离的氧化钒。 以这种方式，可以解决当使用重油作为燃气轮机燃料时产生的钒的涡轮叶片的腐蚀的长期存在的问题。

公开(公告)号：US20050054891A1

公开(公告)日：2005-03-10

申请号：US10921259

申请日：2004-08-19

Applicant: Yoshie Akai ,  Masahiko Oosaki ,  Kazuya Yamada ,  Takao Takada

Inventor： Yoshie Akai ,  Masahiko Oosaki ,  Kazuya Yamada ,  Takao Takada

IPC: A62D3/20 ,  A62D101/22 ,  B01D53/68 ,  B01D53/78 ,  B01J3/00 ,  B01J3/02 ,  B01J3/04 ,  C07B35/06 ,  C07B37/06 ,  F28D21/00 ,  G21F9/00 ,  G21F9/06 ,  G21F9/30

CPC classification number: G21F9/04 ,  B01J3/008

Abstract: A treatment apparatus for organic waste including a reaction vessel for introducing and decomposing organic waste and pulling out decomposed organic waste as a treated fluid. The reaction vessel includes an internal vessel made of corrosion-resistant material, an external vessel made of pressure-resistant material provided for surrounding the internal vessel via a gap, and an interconnection pipe for interconnecting the gap and the internal vessel outside the external vessel, thereby to control inside the gap and inside the internal vessel to practically equal pressure. The internal vessel has a heating zone for heating the introduced organic waste to a temperature higher than a critical point of water, a reaction zone for holding and decomposing the organic waste at a temperature higher than the critical point of water, and a cooling zone for cooling the treated fluid containing a decomposition product of the organic waste to lower than 100° C. The gap is adapted to be charged with high-pressure water or hydrogen peroxide water.

Abstract translation: 一种用于有机废物的处理装置，包括用于引入和分解有机废物并抽出分解的有机废物作为处理流体的反应容器。 反应容器包括由耐腐蚀材料制成的内部容器，由耐压材料制成的外部容器，其通过间隙围绕内部容器，以及用于将间隙和外部容器外部的内部容器互连的互连管， 从而在内部容器内部和内部的内部控制实际上相等的压力。 内部容器具有用于将引入的有机废物加热到高于临界点的温度的加热区，用于在高于临界点的温度下保持和分解有机废物的反应区，以及用于 将含有有机废物的分解产物的处理过的液体冷却至低于100℃。该间隙适于装入高压水或过氧化氢水。