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    CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECHANICAL SYSTEM SENSORS
    121.
    发明公开
    CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECHANICAL SYSTEM SENSORS 审中-公开

    公开(公告)号：US20230192479A1

    公开(公告)日：2023-06-22

    申请号：US18066802

    申请日：2022-12-15

    Applicant: INVENSENSE, INC.

    Inventor： Joseph Seeger

    IPC: B81B7/02 ,  H02M3/07

    CPC classification number: B81B7/02 ,  H02M3/07 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2203/04 ,  B81B2207/03

    Abstract: Embodiments for constant charge or capacitance for capacitive micro-electromechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.

    ENVIRONMENTAL SENSOR AND MANUFACTURING METHOD THEREOF
    122.
    发明申请
    ENVIRONMENTAL SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开

    公开(公告)号：US20180356255A1

    公开(公告)日：2018-12-13

    申请号：US15781352

    申请日：2015-12-14

    Applicant: Goertek Inc.

    Inventor： Junkai ZHAN ,  Mengjin CAI

    IPC: G01D5/241

    CPC classification number: G01D5/2417 ,  B81B2201/0214 ,  B81B2201/0221 ,  B81B2201/0264 ,  B81B2201/0278 ,  B81B2207/053 ,  B81C1/00182 ,  B81C1/00214 ,  G01K7/34 ,  G01L9/0045 ,  G01L9/0047 ,  G01L9/0073

    Abstract: An environmental sensor and manufacturing method thereof. The environmental sensor comprises: a substrate comprising at least one recess disposed at an upper portion of the substrate; and a sensitive film layer disposed above the substrate, comprising a fixed portion fixed on an end surface of the substrate and a bent portion configured to extend inside the recess. The bent portion and a side wall of the recess form a capacitor configured to detect a signal. The bent portion, fixed portion, and the recess form a closed cavity. A conventional capacitive structure configured on a substrate surface is changed to a capacitive structure of the environmental sensor vertically extending into the inside of the substrate, increasing a depth of the recess, and in turn, increasing a sensing area between two polar plates of the capacitor, significantly shrinking a coverage area of the capacitor on the substrate, and satisfying a requirement of a modern compact electronic component.

    MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE
    125.
    发明申请
    MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE 审中-公开

    公开(公告)号：US20170240417A1

    公开(公告)日：2017-08-24

    申请号：US15210588

    申请日：2016-07-14

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Masaki YAMADA

    IPC: B81B7/00

    CPC classification number: B81B7/0038 ,  B81B3/0051 ,  B81B2201/0221 ,  B81B2203/04 ,  H01G5/16

    Abstract: A micro electro mechanical systems (MEMS) device includes a first electrode formed on a substrate, a second electrode that faces the first electrode, a protective film formed on the substrate with a space therebetween in which the first and second electrodes are located, and a sealing layer covering the protective film. The second electrode has a curved structure extending in a direction away from the first electrode, and is movable toward or away from the first electrode. The protective film has a plurality of openings formed therein and a protrusion that protrudes toward the second electrode.

    MEMS DEVICE
    129.
    发明申请
    MEMS DEVICE 审中-公开
    MEMS器件

    公开(公告)号：US20160272481A1

    公开(公告)日：2016-09-22

    申请号：US15067110

    申请日：2016-03-10

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Hiroaki YAMAZAKI ,  Yoshihiko KURUI ,  Tamio IKEHASHI

    IPC: B81B3/00

    CPC classification number: B81B3/0008 ,  B81B2201/0221 ,  B81B2203/04 ,  H01G5/18

    Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first electrode fixed on the substrate. The first electrode includes a first one end portion and a first other end portion. A capacitor insulating film is provided on the first electrode. An insulating film is provided on the substrate and located around a periphery of the first electrode. A second electrode is provided above the first electrode and movable. The second electrode includes a second one end portion corresponding to the first one end portion, and a second other end portion corresponding to the first other end portion. The second one end portion extends outside the first one end portion and includes a first bent portion bent downward.

    Abstract translation: 根据一个实施例，公开了一种MEMS器件。 该装置包括基板，固定在基板上的第一电极。 第一电极包括第一端部和第一另一端部。 电容绝缘膜设置在第一电极上。 绝缘膜设置在基板上并且位于第一电极的周边周围。 第二电极设置在第一电极上方并可移动。 第二电极包括对应于第一一个端部的第二一个端部和与第一另一个端部对应的第二另一个端部。 第二一个端部在第一一个端部的外侧延伸并且包括向下弯曲的第一弯曲部分。

    ELECTROSTATIC DAMPING OF MEMS DEVICES
    130.
    发明申请
    ELECTROSTATIC DAMPING OF MEMS DEVICES 审中-公开
    MEMS器件的静电阻尼

    公开(公告)号：US20160196923A1

    公开(公告)日：2016-07-07

    申请号：US14889629

    申请日：2014-05-20

    Applicant: CAVENDISH KINETICS, INC

    Inventor： Robertus Petrus VAN KAMPEN ,  Anartz UNAMUNO

    IPC: H01G5/18 ,  B81B7/00

    CPC classification number: H01G5/18 ,  B81B7/008 ,  B81B2201/0221 ,  H01H59/0009

    Abstract: The present invention generally relates to a method and apparatus for damping a plate electrode or switching element in a MEMS DVC device. A resistor disposed between a waveform controller and the electrodes of the MEMS DVC causes the voltage to increase while capacitance decreases during the time that the plate electrode is moving. Due to the increase in voltage and decrease in capacitance, the electrostatic force that resists the plate electrode movement away from an electrode increases, which in turn dampens the movement of the plate electrode.

    Abstract translation: 本发明一般涉及一种用于阻尼MEMS DVC装置中的平板电极或开关元件的方法和装置。 布置在波形控制器和MEMS DVC的电极之间的电阻器在平板电极移动期间电容降低，导致电压增加。 由于电压的增加和电容的减小，抵抗板电极远离电极的静电力增加，这又抑制板电极的运动。

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