公开(公告)号：US07088030B2

公开(公告)日：2006-08-08

申请号：US10839844

申请日：2004-05-06

Applicant: Jerwei Hsieh ,  Huai-Yuan Chu ,  Julius Ming-Lin Tsai ,  Weileun Fang

Inventor： Jerwei Hsieh ,  Huai-Yuan Chu ,  Julius Ming-Lin Tsai ,  Weileun Fang

IPC: H02N1/00 ,  G02B26/08

CPC classification number: H02N1/008 ,  B81B2201/033 ,  B81C1/00595 ,  Y10S438/942

Abstract: A high-aspect-ratio-microstructure (HARM) is provided. The structure includes: a substrate; a lower structure with a comb shape fixedly mounted on said substrate and having first plural comb fingers, wherein each of the first plural comb fingers has a thin slot thereon; an upper structure with a comb shape having second plural comb fingers, wherein the lower structure and the upper structure have a height difference therebetween so as to form an uneven surface; and a lateral strengthening structure formed at vertically peripheral walls of the first plural comb fingers and the second plural comb fingers for protecting the plural first and second comb fingers.

Abstract translation: 提供了高纵横比微结构（HARM）。 该结构包括：基底; 具有固定地安装在所述基板上并具有第一多个梳齿的梳形的下部结构，其中所述第一多个梳齿中的每一个在其上具有薄的狭槽; 具有梳形的具有第二多个梳齿的上部结构，其中下部结构和上部结构之间具有高度差以形成不平坦表面; 以及形成在第一多个梳齿的垂直周壁上的横向加强结构和用于保护多个第一和第二梳齿的第二多个梳齿。

公开(公告)号：US20060113644A1

公开(公告)日：2006-06-01

申请号：US11275575

申请日：2006-01-17

Applicant: Jeffrey Ridley ,  James Neus

Inventor： Jeffrey Ridley ,  James Neus

IPC: H01L23/495

CPC classification number: B81C1/00698 ,  B81B2201/0271 ,  B81B2201/033 ,  B81C2201/0132

Abstract: Methods of fabricating comb drive devices utilizing one or more sacrificial etch-buffers are disclosed. An illustrative fabrication method may include the steps of etching a pattern onto a wafer substrate defining one or more comb drive elements and sacrificial etch-buffers, liberating and removing one or more sacrificial etch-buffers prior to wafer bonding, bonding the etched wafer substrate to an underlying support substrate, and etching away the wafer substrate. In some embodiments, the sacrificial etch-buffers are removed after bonding the wafer to the support substrate. The sacrificial etch-buffers can be provided at one or more selective regions to provide greater uniformity in etch rate during etching. A comb drive device in accordance with an illustrative embodiment can include a number of interdigitated comb fingers each having a more uniform profile along their length and/or at their ends, producing less harmonic distortion during operation.

Abstract translation: 公开了使用一个或多个牺牲蚀刻缓冲器制造梳状驱动装置的方法。 示例性的制造方法可以包括以下步骤：将图案蚀刻到限定一个或多个梳状驱动元件和牺牲蚀刻缓冲器的晶片衬底上，在晶片接合之前释放和去除一个或多个牺牲蚀刻缓冲器，将蚀刻的晶片衬底接合到 底层支撑衬底，并蚀刻掉晶片衬底。 在一些实施例中，在将晶片接合到支撑衬底之后去除牺牲蚀刻缓冲器。 可以在一个或多个选择性区域处提供牺牲蚀刻缓冲器，以在蚀刻期间提供更大的蚀刻速率均匀性。 根据说明性实施例的梳状驱动装置可以包括多个交叉指状梳，每个梳指在其长度和/或其端部具有更均匀的轮廓，在操作期间产生较少的谐波失真。

公开(公告)号：US06995495B2

公开(公告)日：2006-02-07

申请号：US10685800

申请日：2003-10-16

Applicant: Young-chul Ko ,  Jin-ho Lee

Inventor： Young-chul Ko ,  Jin-ho Lee

IPC: H02N1/00 ,  G02B26/08 ,  G02B26/10

CPC classification number: B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  B81C2201/019 ,  G02B26/0841 ,  H02N1/008

Abstract: An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.

Abstract translation: 致动器包括具有垂直于第一方向的第一方向和第二方向并相对于沿着第一方向设置的旋转中心轴垂直于第一方向和第二方向的第三方向跷跷板的台。 第一支撑部分支撑舞台的跷跷板运动。 在第一支撑部分支撑着一个以预定间隔在舞台下面对着舞台的底座。 舞台驱动部分具有多个第一驱动梳状电极和对应于第一驱动梳状电极的多个第一固定梳状电极，该第一固定梳状电极分别形成在每个级的下表面上，并且该基座的上表面面向该级 。 第二支撑部分支撑第一支撑部分，使得第一支撑部分相对于沿第二方向设置的旋转中心轴线跷跷板。 第一支撑部分驱动部分具有设置在第一支撑部分的第二驱动梳状电极和固定地定位成对应于第二驱动梳状电极的第二固定梳状电极，以产生第一支撑部分的跷跷板运动。

公开(公告)号：US20050236928A1

公开(公告)日：2005-10-27

申请号：US11114725

申请日：2005-04-26

Applicant: Akira Kurozuka ,  Yoshihiro Mushika ,  Osamu Kajino

Inventor： Akira Kurozuka ,  Yoshihiro Mushika ,  Osamu Kajino

IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058 ,  H02N1/008

Abstract: There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

Abstract translation: 在微型致动器的可动部的刚性和质量之间以及可动部的刚性与静电力之间存在权衡。 微致动器100包括：基座1; 由基座1支撑的第一梳状电极2; 具有与第一梳状电极2相对的第二梳状电极8的可动部6和朝向基部1突出的至少一个加强肋9; 以及用于支撑可动部分6以使可动部分6相对于基座1移位的弹性支撑部件3.第二梳状电极8的高度与至少一个加强肋的高度不同 9。

公开(公告)号：US20050136621A1

公开(公告)日：2005-06-23

申请号：US10746219

申请日：2003-12-22

Applicant: Jeffrey Ridley ,  James Neus

Inventor： Jeffrey Ridley ,  James Neus

IPC: B81B3/00 ,  H02N1/00 ,  H01L21/30

CPC classification number: B81C1/00698 ,  B81B2201/0271 ,  B81B2201/033 ,  B81C2201/0132

Abstract: Methods of fabricating comb drive devices utilizing one or more sacrificial etch-buffers are disclosed. An illustrative fabrication method may include the steps of etching a pattern onto a wafer substrate defining one or more comb drive elements and sacrificial etch-buffers, liberating and removing one or more sacrificial etch-buffers prior to wafer bonding, bonding the etched wafer substrate to an underlying support substrate, and etching away the wafer substrate. In some embodiments, the sacrificial etch-buffers are removed after bonding the wafer to the support substrate. The sacrificial etch-buffers can be provided at one or more selective regions to provide greater uniformity in etch rate during etching. A comb drive device in accordance with an illustrative embodiment can include a number of interdigitated comb fingers each having a more uniform profile along their length and/or at their ends, producing less harmonic distortion during operation.

Abstract translation: 公开了使用一个或多个牺牲蚀刻缓冲器制造梳状驱动装置的方法。 示例性的制造方法可以包括以下步骤：将图案蚀刻到限定一个或多个梳状驱动元件和牺牲蚀刻缓冲器的晶片衬底上，在晶片接合之前释放和去除一个或多个牺牲蚀刻缓冲器，将蚀刻的晶片衬底接合到 底层支撑衬底，并蚀刻掉晶片衬底。 在一些实施例中，在将晶片接合到支撑衬底之后去除牺牲蚀刻缓冲器。 可以在一个或多个选择性区域处提供牺牲蚀刻缓冲器，以在蚀刻期间提供更大的蚀刻速率均匀性。 根据说明性实施例的梳状驱动装置可以包括多个交叉指状梳，每个梳指在其长度和/或其端部具有更均匀的轮廓，在操作期间产生较少的谐波失真。

公开(公告)号：US20040184135A1

公开(公告)日：2004-09-23

申请号：US10392594

申请日：2003-03-18

Applicant: The Regents of the University of California

Inventor： Robin R. Miles ,  Alexandros P. Papavasiliou

IPC: G02B026/00

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0136 ,  B81B2203/053 ,  G02B26/0841 ,  G02B26/0866

Abstract: A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.

Abstract translation: 可以使用用于可变形反射镜的标准MEMS方法制造的镜像素。 像素被静电驱动，并且能够实现基于间隔镜的应用所需的高偏转。 在一个实施例中，反射镜包括三层，顶层或镜层，由弯曲构成的中间层，以及梳状驱动层，中间层的弯曲部连接到镜层和梳状驱动层。 梳子驱动器通过弹簧弯曲连接到框架。 这些反射镜像素中的许多可用于构造大镜组件。 用于镜像素的致动器可以被配置为具有一端固定地固定或被配置为剪刀式千斤顶的带锯齿形梁。 镜像素可以用于需要高冲程自适应光学器件的各种应用中。

公开(公告)号：US20040121506A1

公开(公告)日：2004-06-24

申请号：US10328944

申请日：2002-12-23

Applicant: Motorola Inc.

Inventor： Bishnu Gogoi

IPC: C23F001/00 ,  H01L021/00 ,  H01L021/44

CPC classification number: B81C1/00476 ,  B81B2201/033 ,  B81B2203/033 ,  B81B2203/051 ,  B81B2207/07 ,  B81C1/00626

Abstract: A method for creating a MEMS structure (100) is provided. In accordance with the method, an article is provided comprising a substrate (101), a sacrificial layer (103) and a semiconductor layer (105), wherein the sacrificial layer comprises a first material such as silicon oxide. A MEMS structure is then formed in the semiconductor layer. The structure has first (107) and second (109) elements which have an exposed portion of the sacrificial layer (103) disposed between them. The first element is then released from the substrate (101) by contacting the exposed portion of the sacrificial layer (103) with a first etchant, typically by way of one or more trenches (119), after which the first element is reattached to the substrate (101) with a second material (131). The first element is then released from the substrate (101) by contacting the second material (131) with a second etchant.

Abstract translation: 提供了一种用于创建MEMS结构（100）的方法。 根据该方法，提供了一种包括衬底（101），牺牲层（103）和半导体层（105）的制品，其中所述牺牲层包括诸如氧化硅的第一材料。 然后在半导体层中形成MEMS结构。 该结构具有第一（107）和第二（109）元件，其具有设置在它们之间的牺牲层（103）的暴露部分。 然后通过将牺牲层（103）的暴露部分与第一蚀刻剂（通常通过一个或多个沟槽（119））接触将第一元件从衬底（101）释放，之后将第一元件重新连接到 衬底（101）与第二材料（131）。 然后通过使第二材料（131）与第二蚀刻剂接触来将第一元件从基板（101）释放。

公开(公告)号：US20040081391A1

公开(公告)日：2004-04-29

申请号：US10685800

申请日：2003-10-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-Chul Ko ,  Jin-Ho Lee

IPC: G02B006/26

CPC classification number: B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  B81C2201/019 ,  G02B26/0841 ,  H02N1/008

Abstract: An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.

Abstract translation: 致动器包括具有垂直于第一方向的第一方向和第二方向并相对于沿着第一方向设置的旋转中心轴垂直于第一方向和第二方向的第三方向跷跷板的台。 第一支撑部分支撑舞台的跷跷板运动。 在第一支撑部分支撑着一个以预定间隔在舞台下面对着舞台的底座。 舞台驱动部分具有多个第一驱动梳状电极和对应于第一驱动梳状电极的多个第一固定梳状电极，该第一固定梳状电极分别形成在每个级的下表面上，并且该基座的上表面面向该级 。 第二支撑部分支撑第一支撑部分，使得第一支撑部分相对于沿第二方向设置的旋转中心轴线跷跷板。 第一支撑部分驱动部分具有设置在第一支撑部分的第二驱动梳状电极和固定地定位成对应于第二驱动梳状电极的第二固定梳状电极，以产生第一支撑部分的跷跷板运动。

公开(公告)号：US06664707B2

公开(公告)日：2003-12-16

申请号：US10100253

申请日：2002-03-14

Applicant: John H. Jerman ,  John D. Grade

Inventor： John H. Jerman ,  John D. Grade

IPC: H02N200

CPC classification number: H02N1/008 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/037 ,  B81B2201/047 ,  B81B2203/051 ,  G11B7/0925

Abstract: A miniature device comprising a substrate and primary and secondary movable members overlying the substrate. First and second suspension members couple the secondary movable member to the substrate. Third and fourth suspension members couple the primary movable member to the secondary movable member. A lever assembly is provided and has a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the primary movable member and an opposite second extremity. The secondary movable member is coupled to the lever between the first extremity and the pivot.

公开(公告)号：US06612029B2

公开(公告)日：2003-09-02

申请号：US09810335

申请日：2001-03-14

Applicant: Behrang Behin ,  Satinderpall Pannu

Inventor： Behrang Behin ,  Satinderpall Pannu

IPC: H05K302

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

Abstract translation: 一种制造多层垂直梳状驱动致动器的方法，该致动器包括具有多个第一梳齿的第一梳结构和具有多个第二梳指的第二梳结构，其中第一和第二梳指基本上交错。 本发明包括掩蔽和蚀刻包含这些多层的结构，其中同时制造第一和第二梳齿。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。