Abstract:
A Fourier Transform Infrared (FTIR) Spectrometer integrated in a CMOS technology on a Silicon-on-Insulator (SOI) wafer is disclosed. The present invention is fully integrated into a compact, miniaturized, low cost, CMOS fabrication compatible chip. The present invention may be operated in various infrared regions ranging from 1.1 μm to 15 μm or it can cover the full spectrum from 1.1 μm to 15 μm all at once.The CMOS-FTIR spectrometer disclosed herein has high spectral resolution, no movable parts, no lenses, is compact, not prone to damage in harsh external conditions and can be fabricated with a standard CMOS technology, allowing the mass production of FTIR spectrometers. The fully integrated CMOS-FTIR spectrometer is suitable for battery operation; any and all functionality can be integrated on a chip with standard CMOS technology. The disclosed invention for the FTIR spectrometer may also be adapted for a CMOS-Raman spectrometer.
Abstract:
A spectrometer capable of eliminating side-tail effects includes a body and an input section, a diffraction grating, an image sensor unit and a wave-guiding device, which are mounted in the body. The input section receives a first optical signal and outputs a second optical signal travelling along a first light path. The diffraction grating receives the second optical signal and separates the second optical signal into a plurality of spectrum components, including a specific spectrum component travelling along a second light path. The image sensor unit receives the specific spectrum component. The wave-guiding device includes first and second reflective surfaces opposite to each other and limits the first light path and the second light path between them to guide the second optical signal and the specific spectrum component. The first and second reflective surfaces are separated from a light receiving surface of the image sensor unit by a predetermined gap.
Abstract:
A dispersive element is disclosed which is designed to receive incident light (1) and disperse the incident light (1) into multiple spatially separated wavelengths of light. The dispersive body (DB) comprises a collimation cavity (COLL) to collimate the incident light (1), at least two optical interfaces (PRIS) to receive and disperse the collimated light (2) and a collection cavity (CLCT) to collect the dispersed light (3) from the at least two dispersive interfaces (op1, op2) and to focus the collected light (4).
Abstract:
The invention relates to a multispectral imaging device comprising a multiple-quantum-well structure operating on inter-sub-band transitions by absorbing radiation at a wavelength λ lying within a set of wavelengths to which said structure is sensitive, said structure comprising a matrix of individual detection pixels, characterized in that the matrix is organized in subsets (Eij) of four individual detection pixels, a first individual detection pixel (Pλ1) comprising a first diffraction grating (Rλ1) sensitive to a first subset of wavelengths, a second individual detection pixel (Pλ2) comprising a second diffraction grating (Rλ2) sensitive to a second subset of wavelengths, a third individual detection pixel (Pλ3) comprising a third diffraction grating (Rλ3) sensitive to a third subset of wavelengths and a fourth individual detection pixel (PΔλ) not comprising a wavelength-selective diffraction grating, the first, second and third subsets of wavelengths belonging to the set of wavelengths to which said structure is sensitive.
Abstract:
The present invention discloses a multi-cavity optical sensing and thermopile infrared sensing system, which comprises an optical sensing part, a dielectric layer, a plurality of optical cavities, and a plurality of thermocouples. The dielectric layer covers on the top of the optical sensing part. The optical cavities are formed by a plurality of metal reflectors inside the dielectric layer. The thermocouples are laterally disposed near the bottom of the dielectric layer. In addition, a low temperature region is formed in an area which is the overlapping of vertical projections of such thermocouples and the optical sensing part; a high temperature region is formed by the overlapping of vertical projections of such thermocouples, but without the overlaying which belongs to the vertical projection of the optical sensing part. Therefore, the system can sense the ambient light brightness, color conditions and human blackbody infrared signals within the range of 8-12 micrometers wavelength.
Abstract:
A device and a method for implementing a photo-spectrometer unit (20), or PSU (20), for use with a spectrometry system (100) having optical means (12), and electronic means (13) is disclosed. The PSU is formed in a two-step manufacturing process to form a chip having a monolithic structure. The chip has a first surface and second surface. During the first manufacturing process step, optical means are integrally formed on the first surface (301), and during the second manufacturing process step, electronic means are formed on the second surface (302). The chip is transparent to electromagnetic radiations, and the PSU has at least one optical deflecting element (32) for guiding received radiations through the chip, for establishing direct optical path coupling between an optical element formed on the first surface and an electronic element formed on the second surface.
Abstract:
Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.
Abstract:
The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.
Abstract:
Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.
Abstract:
The invention relates to a spectrograph (11) comprising a waveguide (10) provided with accesses (10; 10b, 12), a means for injecting two guided contra-propagative waves by each accesses in such a way that a spatial interference is formed in the waveguide, means (19, 20, 14, 16) for detecting the energy of the evanescent wave of the guided field produced by the interference of said contra-propagative waves.