Abstract:
An infrared sensor, which achieves a low manufacturing cost, or has high sensitivity, or in which an increase in heat capacity is reduced, is provided. The infrared sensor includes a first infrared absorbing portion, an infrared sensing portion for sensing infrared rays based on infrared rays absorbed by the first infrared absorbing portion, and a plurality of protrusions including metal and disposed apart from each other on a surface of the first infrared absorbing portion. Since an absorption rate of infrared rays is improved, sensitivity can be improved, or an increase in heat capacity can be reduced.
Abstract:
A temperature measurement system includes at least one filament configured to emit thermal radiation in a relatively broad and substantially continuous wavelength band that is at least partially representative of a temperature of the at least one filament. The system also includes an optical system configured to receive at least a portion of the thermal radiation emitted from the filament. The optical system includes a wavelength splitting device configured to split the emitted thermal radiation into at least one relatively narrow wavelength band of thermal radiation. The optical system also includes a detector array configured to receive the at least one relatively narrow wavelength band of thermal radiation and to generate electrical signals at least partially representative of the received thermal radiation. The temperature measurement system further includes a controller communicatively coupled to the detector array. The controller is configured to transform the generated electrical signals to a temperature indication using a predetermined conversion module.
Abstract:
A substrate processing apparatus is provided. The substrate processing apparatus includes a vacuum chamber having a dome and a floor. A substrate support is disposed inside the vacuum chamber. A plurality of thermal lamps are arranged in a lamphead and positioned proximate the floor of the vacuum chamber. A reflector is disposed proximate the dome, where the reflector and the dome together define a thermal control space. The substrate processing apparatus further includes a plurality of power supplies coupled to the thermal lamps and a controller for adjusting the power supplies to control a temperature in the vacuum chamber.
Abstract:
An optical lens system for focusing light on a focal plane for detection by a detector device. The optical lens system comprises a series of optical materials including first and last optical materials with a plurality of other optical materials located therebetween. A housing accommodates the series of optical materials, and each of the optical materials is spaced a desired distance from one another. An external entrance pupil supplies infrared light to the series of optical materials of the optical lens system, and the entrance pupil is located in front of the first optical material. A Dewar window and a filter are located between the last optical material and the focal plane. The optical materials are selected and arranged to focus simultaneously both mid-wave infrared light and long-wave infrared light on the focal plane over a wide temperature range.
Abstract:
A turbine engine optical system includes a plurality of viewing ports in an engine case that are circumferentially spaced from one-another. At least one optical device is optically coupled to the ports for viewing an internal chamber defined by the engine case and for depicting at least spatial temperature distributions. The chamber may be an exhaust chamber and the controller may have the capability to correlate events in the exhaust chamber to events in an upstream combustor chamber and may thereby adjust operating parameters of a fuel system of the combustor.
Abstract:
In embodiments of display viewing detection, a presence module, implemented on an electronic device, enables a first sensor to detect an object responsive to detecting audio via one or more microphones of the electronic device. The first sensor generates data that is used by the presence module to determine that the object is within a viewing range of the electronic device and that movement of the object is below a predetermined threshold. The presence module then enables at least a second sensor to confirm the object is viewing a display of the electronic device. When the object is detected by the second sensor, the presence module enables the display for viewing by the object.
Abstract:
This invention provides a device and method for recording thermal imaging information, and relates to a thermal imaging device and an infrared detection filed. The position information (such as GPS information) record by a thermal imaging device in the prior art cannot conveniently correspond to object information. As only the GPS information is record, during subsequent arrangement, the object information needs to be correspondingly input according to the GPS information, causing the heavy workload. According to the device for recording thermal imaging information in this invention, the object information corresponding to the received position information is displayed according to the received position information, then the object information is selected, and the selected object information is record with the infrared data, thereby solving the present problem.
Abstract:
A readout circuit for an uncooled infrared focal plane array includes: a first biasing circuit for generating a detection output signal; a second biasing circuit for generating a first reference output signal; a first integration circuit; and an analog-to-digital circuit including: a ramp signal generating circuit for generating a ramp signal according to a second reference microbolometer of a third biasing circuit. In the readout circuit, subtracting and amplifying the detection output signal and the first reference output signal are provided by the integrator at an analog domain, while ratio counting is provided by an analog-to-digital converter during analog-to-digital conversion. Furthermore, a column level integrated readout channel utilizes only one reference microbolometer, and the chip level ramp signal generator also utilizes only one reference microbolometer. Therefore, a chip area is further saved, and noise sources are decreased.
Abstract:
An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.
Abstract:
Disclosed are a temperature sensor device using a thermopile, the total number n of thermocouples thereon can be increased without greatly increasing the internal resistance of the thermopile r, providing high output level and high S/N ratio, a highly sensitive radiation thermometer using the device, and production method of the device using organic material for thin films to form the thermopile. These provide a standardized inexpensive multi-layered thin film thermopile, a radiation thermometer with high sensitivity, and production method of these devices. The temperature sensor device is a device wherein a thermopile which is formed on a thin film thermally isolated from a substrate is place in a temperature sensing part, and the thin film is formed as a multi-layered thin film, a layered thermopile is formed on each layered thin film, the substrate functioning as a heat sink which is one junction of the reference temperature of the thermopile.