Techniques for fabricating a resistor on a flexible base material
    145.
    发明授权
    Techniques for fabricating a resistor on a flexible base material 有权
    在柔性基材上制造电阻器的技术

    公开(公告)号:US07158383B2

    公开(公告)日:2007-01-02

    申请号:US10716143

    申请日:2003-11-18

    Abstract: A technique for fabricating a resistor on a flexible substrate. Specifically, at least a portion of a polyimide substrate is activated by exposure to a ion sputter etch techniques. A metal layer is disposed over the activated portion of the substrate, thereby resulting in the formation of a highly resistive metal-carbide region. Interconnect layers are disposed over the metal-carbide region and patterned to form terminals at opposite ends of the metal carbide region. The metal-carbide region is patterned to form a resistor between the terminals. Alternatively, only a selected area of the polyimide substrate is activated. The selected area forms the area in which the metal-carbide region is formed. Interconnect layers are disposed over the metal-carbide region and patterned to form terminals at opposite ends of the metal-carbide region.

    Abstract translation: 一种在柔性基板上制造电阻器的技术。 具体地,通过暴露于离子溅射蚀刻技术来活化聚酰亚胺基底的至少一部分。 金属层设置在基板的激活部分上,从而形成高电阻金属碳化物区域。 互连层设置在金属碳化物区域上并被图案化以在金属碳化物区域的相对端形成端子。 将金属碳化物区域图案化以在端子之间形成电阻器。 或者,仅激活聚酰亚胺基板的选定区域。 所选择的区域形成形成金属碳化物区域的区域。 互连层设置在金属碳化物区域上并被图案化以在金属碳化物区域的相对端形成端子。

Patent Agency Ranking