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    Low water peak optical waveguide fiber
    153.
    发明申请
    Low water peak optical waveguide fiber 有权
    低水峰光波导光纤

    公开(公告)号：US20020102083A1

    公开(公告)日：2002-08-01

    申请号：US10023291

    申请日：2001-12-14

    Inventor： George E. Berkey ,  Dana C. Bookbinder ,  Richard M. Fiacco ,  Dale R. Powers

    IPC: G02B006/16 ,  C03B037/018

    CPC classification number: C03C25/607 ,  C03B37/01446 ,  C03B37/0146 ,  C03B37/01486 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/31 ,  C03C3/06 ,  C03C13/045 ,  C03C13/047 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2203/54 ,  G02B6/02

    Abstract: Optical waveguide fiber having low water peak as well as optical waveguide fiber preforms and methods of making optical waveguide fiber preforms from which low water peak and/or low hydrogen aged attenuation optical waveguide fibers are formed, including optical waveguide fiber and preforms made via OVD. The fibers may be hydrogen resistant, i.e. exhibit low hydrogen aged attenuation. A low water peak, hydrogen resistant optical waveguide fiber is disclosed which exhibits an optical attenuation at a wavelength of about 1383 nm which is less than or equal to an optical attenuation exhibited at a wavelength of about 1310 nm.

    Abstract translation: 具有低水峰的光波导纤维以及光波导纤维预制件以及制造出低水峰值和/或低氢老化衰减光波导纤维的光波导纤维预制棒的方法，包括通过OVD制造的光波导纤维和预制棒。 纤维可以是耐氢性的，即表现出低氢老化衰减。 公开了一种低水峰，耐氢光波导纤维，其在约1383nm的波长处表现出光衰减，其小于或等于在约1310nm的波长处显示的光衰减。

    Method of fabricating optical fiber preform and method of fabricating optical fiber
    154.
    发明申请
    Method of fabricating optical fiber preform and method of fabricating optical fiber 有权
    制造光纤预制棒的方法和制造光纤的方法

    公开(公告)号：US20020073741A1

    公开(公告)日：2002-06-20

    申请号：US09982015

    申请日：2001-10-19

    Applicant: THE FURUKAWA ELECTRIC CO., LTD.

    Inventor： Yoshinori Ishida

    IPC: C03B037/018

    CPC classification number: C03C25/607 ,  C03B37/0124 ,  C03B37/01413 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2203/22 ,  C03C25/64

    Abstract: Methods of fabricating an optical fiber preform and a method of fabricating an optical fiber of the invention realize the fabrication of an optical fiber having desirable transmission characteristics in the entire wavelength rage of about 1.3 to 1.6 nullm. The fabrication method comprisses a porous core rod producing step of depositing a first cladding (3) having an outer diameter D so as to surround a core (2) having an outer diameter d to produce a porous core rod (1) of D/dnull4.0 by VAD. Then, the porous core rod (1) is dehydrated to reduce the OH group concentration to 0.8 ppb or less by weight ratio. The porous core rod (1) is formed to be transparent for a vitrified core rod (4) and is heated and stretched. Thereafter, a second cladding is obtained by depositing a second porous cladding (5) around the vitrified core rod (4) by VAD to be dehydrated, transparent and vitrified. The optical fiber preform thus fabricated is drawn to form into an optical fiber and is then allowed to stand in a deuterium gas atmosphere for a predetermined period.

    Abstract translation: 制造光纤预制棒的方法和本发明的制造光纤的方法实现了在整个波长范围内具有理想的传输特性的光纤的制造，其大约为1.3到1.6μm。 制造方法包括多孔芯棒的制造步骤，沉积具有外径D的第一包层（3）以包围具有外径d的芯（2）以产生D / d的多孔芯棒（1） > = VAD。 然后，将多孔芯棒（1）脱水，将OH基浓度按重量比降低至0.8ppb以下。 多孔芯棒（1）形成为对于玻璃化芯棒（4）是透明的，并被加热和拉伸。 此后，通过VAD将玻璃化芯棒（4）周围沉积第二多孔包层（5）以进行脱水，透明和玻璃化，获得第二包层。 将如此制造的光纤预制件拉制成光纤，然后在氘气气氛中放置预定时间。

    Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
    156.
    发明授权
    Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass 失效
    真空紫外透射硅氧氟硅光刻玻璃

    公开(公告)号：US06242136B1

    公开(公告)日：2001-06-05

    申请号：US09397573

    申请日：1999-09-16

    Applicant: Lisa A. Moore ,  Charlene Smith

    Inventor： Lisa A. Moore ,  Charlene Smith

    IPC: G03F900

    CPC classification number: C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  G03F1/60 ,  Y02P40/57

    Abstract: High purity silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a “dry,” silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1×1017 molecules/cm3 of molecular hydrogen and low chlorine levels.

    Abstract translation: 公开了适用于在低于190nm的VUV波长区域中用于光刻应用的光掩模基板的高纯度氟氧化硅玻璃。 本发明的氟氧化硅玻璃在157nm波长下是透射的，使其特别适用于157nm波长区域的光掩模衬底。 本发明的光掩模基材是“真空”的氟氧化硅玻璃，其在真空紫外（VUV）波长区域中表现出非常高的透射率，同时保持通常与高纯度熔融石英相关的优异的热和物理性能。 除了含氟并且具有很少或不含OH含量之外，本发明的适合用作157nm的光掩模衬底的氟氧化硅玻璃的特征还在于具有小于1×10 17分子/ cm 3的分子氢和低氯水平。

    Method of making a large MCVD single mode fiber preform by varying internal pressure to control preform straightness
    157.
    发明授权
    Method of making a large MCVD single mode fiber preform by varying internal pressure to control preform straightness 失效
    通过改变内部压力来制造大型MCVD单模纤维预成型件以控制预成型件直线度的方法

    公开(公告)号：US6105396A

    公开(公告)日：2000-08-22

    申请号：US115783

    申请日：1998-07-14

    Applicant: Paul Francis Glodis ,  Charles Francis Gridley ,  Donald Paul Jablonowski ,  David Kalish ,  Kenneth Lee Walker

    Inventor： Paul Francis Glodis ,  Charles Francis Gridley ,  Donald Paul Jablonowski ,  David Kalish ,  Kenneth Lee Walker

    IPC: C03C3/04 ,  C03B37/012 ,  C03B37/018 ,  C03B37/027

    CPC classification number: C03B37/01211 ,  C03B37/01869 ,  C03B37/01884 ,  C03B37/01892 ,  C03B2201/02 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2203/24

    Abstract: A large optical preform 303 is made by a modified chemical vapor deposition (MCVD) process by depositing successive layers of core and cladding materials onto the inside surface of a rotating glass tube 33 having a hydroxyl ion (OH.sup.-) level that is less than 0.5 parts per million (ppm) by weight. The tube is then collapsed inwardly to form a core rod 301 in which the deposited core material 31 has a diameter that is greater than about 5 millimeters and the deposited cladding material 32 has an outside diameter that is less than about 15 millimeters. A machine-vision system 140, 150, 160 monitors and controls the diameter of the glass tube by regulating the pressure within the tube. Moreover, the machine-vision system monitors and controls the straightness of the tube by varying its rotational speed according to angular position. After the core rod 301 is formed, it is plasma etched to remove contaminants, and then overclad with two glass jackets 34, 35 having a hydroxyl ion (OH.sup.-) level that is less than 1.0 ppm by weight to create a large preform 303 from which about 400 kilometers of singlemode optical fiber can be drawn per meter of length.

    Abstract translation: 通过改进的化学气相沉积（MCVD）工艺，通过将核心和包层材料的连续层沉积到具有小于0.5的羟基离子（OH-）水平的旋转玻璃管33的内表面上来制造大型光学预成型件303 百万分之几（ppm）（重量）。 管然后向内折叠以形成芯棒301，其中沉积的芯材料31具有大于约5毫米的直径，并且沉积的包层材料32具有小于约15毫米的外径。 机器视觉系统140,150,160通过调节管内的压力来监视和控制玻璃管的直径。 此外，机器视觉系统通过根据角度位置改变其转速来监测和控制管的平直度。 在形成芯棒301之后，将其等离子体蚀刻以除去污染物，然后用两个小于1.0重量ppm的羟基离子（OH-）水平的两个玻璃外套34,35包覆，以从 每米长度可以绘制约400公里的单模光纤。

    Method for producing glass preform for optical fiber
    158.
    发明授权
    Method for producing glass preform for optical fiber 失效
    光纤玻璃预制棒的制造方法

    公开(公告)号：US5203899A

    公开(公告)日：1993-04-20

    申请号：US832330

    申请日：1992-02-07

    Applicant: Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

    Inventor： Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

    IPC: C03B37/014

    CPC classification number: C03B37/0146 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

    Abstract: A glass preform which is used for fabricating an optical fiber, has substantially no bubbles therein and contains sufficient amount of fluorine is produced by a method comprising steps of: forming a porous glass soot body from a glass-forming raw material, removing trapped gas and water from pores of the soot body by heating the soot body under pressure lower than several ten Torr. at a temperature at which the soot body is not vitrified, filling the pores of the soot body with a gas containing SiF.sub.4 and uniformly adding fluorine to the soot body, vitrifying the fluorine-added soot body into a transparent glass body, boring said transparent glass body to form a bore therein, and inserting a highly pure quartz rod in said bore to form a glass preform, or a method forming a glass soot composite body having a core portion consisting of a solid glass and a peripheral portion consisting of a porous glass mass, removing trapped gas and water from pores of the soot composite body by heating the soot composite body under a pressure lower than several ten Torr. at a temperature at which the porous glass mass is not vitrified, filling the pores in the porous glass mass of the soot composite body with a gas containing SiF.sub.4 and uniformly adding fluorine to the soot glass mass, and vitrifying the fluorine-added soot glass mass into a transparent glass mass to form a glass preform.

    Abstract translation: 用于制造光纤的玻璃预成型体在其中基本上没有气泡并且通过包括以下步骤的方法制造含有足够量的氟：从玻璃形成原料形成多孔玻璃烟炱体，除去被捕获的气体和 通过在低于几十乇的压力下加热烟灰体，从烟灰体的孔中吸收水分。 在烟灰体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰体的孔，并将氟均匀地添加到烟炱体中，将氟化烟炱体玻璃化成透明玻璃体，使透明玻璃镗孔 在其中形成孔，并且将高纯石英棒插入所述孔中以形成玻璃预制件，或者形成玻璃烟灰复合体的方法，所述玻璃烟灰复合体具有由实心玻璃构成的芯部和由多孔玻璃构成的周边部 通过在低于几十乇的压力下加热烟灰复合体，从烟灰复合体的孔中除去捕获的气体和水。 在多孔玻璃体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰复合体的多孔玻璃块中的孔，并向烟灰玻璃块均匀地加入氟，并且将添加氟的烟灰玻璃块 变成透明玻璃块以形成玻璃预制件。

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